Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 .Math.in.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

An insert apparatus for protecting a curved inner surface within a passageway from abrasion during an abrasive machining operation is disclosed. In various embodiments, the insert apparatus includes a shield having a shell shaped to match a curved portion of the curved inner surface of the passageway and a shaft having a first end connected to the shell and a second end connected to a member configured to maintain the shaft within the passageway and the shell positioned against the curved inner surface during the abrasive machining operation.

This document discloses a system and method for polishing a metal surface, using a grinding machine and a burnishing machine. The grinding machine comprises an arm coupled with a grinding wheel for grinding the internal surface of a workpiece, an arm rotation drive block configured to drive rotation of the arm around its longitudinal axis, an arm movement drive block configured to move the arm longitudinally and vertically, and rollers for rotating the workpiece around its cylindrical axis via friction with an external surface of the workpiece. The arm comprises a fixed main shaft, a universal joint shaft and a head section coupled with the grinding wheel, wherein the head section is configured to oscillate vertically, allowing the grinding wheel to follow up-and-down fluctuations of the workpiece. The burnishing machine is configured to tumble the workpiece including a tumbling detergent and tumbling beads therein.

A method of processing a surface in additive manufacturing includes assembling a structure for a component by additive manufacturing out of a bed of a powdery base material, such that the structure is provided with an internal surface and a powdery base material covers at least a part of the internal surface, and actuating the base material relatively to the structure such that the internal surface is mechanically processed by the base material.

A hollow spring includes a steel tube in which the average of surface roughness is smaller than 10 μm across the entire inner surface of the steel tube and/or compressive residual stress is given to the entire inner surface of the steel tube. The hollow spring may be manufactured by a step of polishing the inner surface of the steel tube by flowing a viscoelastic abrasive medium (200) within the tubular member (10), between a first opening (11) and a second opening (12) of the tubular member (10). The abrasive medium (200) may include a viscoelastic base material and a granular abrasive. The inner surface of the steel tube is polished evenly to reduce the surface roughness and/or is given compressive residual stress to increase the fatigue life of the hollow spring.

The present subject matter relates to a method and an apparatus in the form of a machine system (1200) for machining a component (100) with an internal passage (115). In an aspect, the method comprises periodically injecting 5 abrasive slurry back and forth through the internal passage (115) at a pressure ranging from about 25 bar to about 35 bar. The abrasive slurry comprises a mixture of abrasive particles having a size in the range of about 40 m to about 60 m, and a slurry medium. The volume fraction of the abrasive particles in the slurry medium is about 40% to about 50%. Further, the injection of the abrasive 10 slurry is performed for a predefined number of process cycles at predetermined time versus pressure changes to obtain the component having a final average surface roughness of less than about 3.0 m.

A method for abrasive flow machining includes moving an abrasive media through a high-aspect passage of a workpiece. Local pressure of the abrasive media is increased at target abrasion surfaces of the high-aspect passage using a passage geometry that is configured to direct flow of the abrasive media into the target abrasion surfaces such that the target abrasion surfaces are preferentially polished by the abrasive media over other, non-targeted surfaces of the high-aspect passage at which the flow of the abrasive media is not directed into.

A method of altering an additively manufactured part can include orienting a surface of the additively manufactured part toward a rotational center that may be independent of a rotational axis defined by the additively manufactured part, flowing an abrasive media past the surface, rotating the additively manufacturing part about the rotational center; urging abrasive particles in the abrasive media past the surface abrasive media to impinge the surface with centrifugal force generated by the rotating, and improving surface finish of the surface.

A method for abrasive flow machining includes moving an abrasive media through a high-aspect passage of a workpiece. Local pressure of the abrasive media is increased at target abrasion surfaces of the high-aspect passage using a passage geometry that is configured to direct flow of the abrasive media into the target abrasion surfaces such that the target abrasion surfaces are preferentially polished by the abrasive media over other, non-targeted surfaces of the high-aspect passage at which the flow of the abrasive media is not directed into.