Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

A honing machine for machining workpieces that have at least one bore to be machined by means of honing, comprises a plurality of workstations (180-1, 180-2), wherein at least one of the workstations is configured as a honing station (180-1, 180-2) that comprises at least one honing unit (150-1, 150-2) that has a spindle shaft (152) that is rotatable about a vertical spindle axis (155) by means of a rotary drive and is movable back and forth parallel to the spindle axis by means of a reciprocating drive. The honing machine has a pallet transport system (200) internal to the machine, for transporting workpieces from and to the workstations (180-1, 180-2) by means of pallets (210-1, 210-2). The pallet transport system (200) is designed such that different transport paths are freely configurable via a control unit (190) of the honing machine (200).

A honing machine for machining workpieces that have at least one bore to be machined by means of honing, comprises a plurality of workstations (180-1, 180-2), wherein at least one of the workstations is configured as a honing station (180-1, 180-2) that comprises at least one honing unit (150-1, 150-2) that has a spindle shaft (152) that is rotatable about a vertical spindle axis (155) by means of a rotary drive and is movable back and forth parallel to the spindle axis by means of a reciprocating drive. The honing machine has a pallet transport system (200) internal to the machine, for transporting workpieces from and to the workstations (180-1, 180-2) by means of pallets (210-1, 210-2). The pallet transport system (200) is designed such that different transport paths are freely configurable via a control unit (190) of the honing machine (200).

A honing machine (100) for honing bores in workpieces has honing spindle (170) which is mounted movably in a spindle housing (130), is rotatable about a spindle axis (172) by means of a rotary drive (150), is drivable in an oscillating manner parallel to the spindle axis by means of a lifting drive and, at a tool-side end, has a device for fastening a honing tool arrangement with an expandable honing tool. Furthermore, an expanding drive for expanding the honing tool is provided, wherein the expanding drive is connected to the spindle housing and is coupled to a feed rod (180) running in the interior of the honing spindle. The honing machine is characterized by a monocoque housing (150), which has a spindle housing portion (150-1), which serves as the spindle housing, for receiving the rotary drive (135), and an expanding system portion (150-2), which is formed integrally with the spindle housing portion, for receiving the expanding drive (155).

A honing machine (100) for honing bores in workpieces has honing spindle (170) which is mounted movably in a spindle housing (130), is rotatable about a spindle axis (172) by means of a rotary drive (150), is drivable in an oscillating manner parallel to the spindle axis by means of a lifting drive and, at a tool-side end, has a device for fastening a honing tool arrangement with an expandable honing tool. Furthermore, an expanding drive for expanding the honing tool is provided, wherein the expanding drive is connected to the spindle housing and is coupled to a feed rod (180) running in the interior of the honing spindle. The honing machine is characterized by a monocoque housing (150), which has a spindle housing portion (150-1), which serves as the spindle housing, for receiving the rotary drive (135), and an expanding system portion (150-2), which is formed integrally with the spindle housing portion, for receiving the expanding drive (155).

A center shaft machining apparatus includes: a grinding structure that moves on a machining central axis while rotating about the machining central axis and machines an end surface on one end side of a workpiece arranged on the machining central axis; an end portion support structure that supports an opposite end side of the workpiece; and a shaft portion support structure that supports a shaft support portion set at an intermediate portion of the workpiece. The end portion support structure includes an eccentric mechanism capable of supporting an opposite end of the workpiece in a state where a workpiece central axis of the workpiece is eccentric with respect to the machining central axis.

A method relates to the manufacture of a drum for a spring brake for an electromechanical actuator, the drum including a housing configured to house at least one helical spring, an input member and an output member. The housing has an internal friction surface configured to cooperate with at least one coil of the helical spring. The method includes at least one step of mechanical surface treatment of the inner surface of the housing of the drum, the mechanical surface treatment of the inner surface of the housing of the drum being a step of creating grooves on the inner surface of the housing.

A method relates to the manufacture of a drum for a spring brake for an electromechanical actuator, the drum including a housing configured to house at least one helical spring, an input member and an output member. The housing has an internal friction surface configured to cooperate with at least one coil of the helical spring. The method includes at least one step of mechanical surface treatment of the inner surface of the housing of the drum, the mechanical surface treatment of the inner surface of the housing of the drum being a step of creating grooves on the inner surface of the housing.

Provided are a machining method and a machining device that can reduce the displacement from a target round shape due to elastic deformation after machining, and can shorten the time required to machine a target round shape in the work. A machining method machines a round hole in a work, and includes: a hole-shape acquisition step of acquiring a shape of a hole of the work; an inverted-shape acquisition step of inverting the shape of the hole acquired at the hole-shape acquisition step relative to a target round shape to acquire an inverted shape; and an inverted-shape machining step of machining the hole in accordance with the inverted shape acquired at the inverted-shape acquisition step.

Provided are a machining method and a machining device that can reduce the displacement from a target round shape due to elastic deformation after machining, and can shorten the time required to machine a target round shape in the work. A machining method machines a round hole in a work, and includes: a hole-shape acquisition step of acquiring a shape of a hole of the work; an inverted-shape acquisition step of inverting the shape of the hole acquired at the hole-shape acquisition step relative to a target round shape to acquire an inverted shape; and an inverted-shape machining step of machining the hole in accordance with the inverted shape acquired at the inverted-shape acquisition step.