Multiple holding surfaces of a chuck table are disposed in such a manner that the heights thereof from a reference surface are in increasing order along a first direction parallel to each of them. Thus, in a case of using this chuck table, creep-feed grinding for workpieces each held by a respective one of the multiple holding surfaces can be executed in states in which a grinding unit is positioned at different heights. In this case, the workpiece for which the creep-feed grinding has been executed is located on the lower side as viewed from the grinding unit when another workpiece is ground. Due to this, in this creep-feed grinding, a specific workpiece can be prevented from being ground twice.

Multiple holding surfaces of a chuck table are disposed in such a manner that the heights thereof from a reference surface are in increasing order along a first direction parallel to each of them. Thus, in a case of using this chuck table, creep-feed grinding for workpieces each held by a respective one of the multiple holding surfaces can be executed in states in which a grinding unit is positioned at different heights. In this case, the workpiece for which the creep-feed grinding has been executed is located on the lower side as viewed from the grinding unit when another workpiece is ground. Due to this, in this creep-feed grinding, a specific workpiece can be prevented from being ground twice.

A workpiece holding assembly (20) comprises a magnetic chuck (22), and first and second separate sets of workrests for engaging with the outer circumferential surface of an annular workpiece (40, 60). The workrests are configurable such that when the outer circumferential surface of the workpiece (40, 60) is ground with the chuck Urotating in one direction, the outer circumferential surface is only urged in contact with the first set (26, 28) of workrests, and when an inner circumferential surface of said workpiece is ground with the direction of rotation of the chuck reversed, the outer circumferential surface is only urged in contact with the second set (30, 32) of workrests. Grinding methods using such a workpiece holding assembly are also described.

A grinding jig for holding a blade tool having an edge in a grinding machine. The grinding jig may have a first and a second clamp half arranged to hold between them at least a portion of a blade tool. An elongate support portion may support the grinding jig onto a support bar of a grinding machine. The elongate support portion may comprise a front end abutment surface and a rear end abutment surface. The front and rear end abutment surfaces may be spaced to receive a portion of a support bar such that the grinding jig may be moved back and forth relative to the support bar in a direction parallel with its longitudinal center axis.

Disclosed is a polishing head for a polishing apparatus for polishing a quadrangular substrate using a polishing pad attached to a polishing table, comprising a head body portion, a plurality of elastic bags disposed in a surface of the head body portion, which is to face the polishing table, and a substrate holding plate for holding the substrate, the substrate holding plate being pressed by the elastic bags in a direction away from the head body portion, the head body portion being provided with channels for bags, which are in communication with the respective elastic bags, the polishing head further including at least two support plates disposed between the elastic bags on one hand and the substrate holding plate on the other, the elastic bags being configured to press the substrate holding plate through the support plates.

Disclosed is a polishing head for a polishing apparatus for polishing a quadrangular substrate using a polishing pad attached to a polishing table, comprising a head body portion, a plurality of elastic bags disposed in a surface of the head body portion, which is to face the polishing table, and a substrate holding plate for holding the substrate, the substrate holding plate being pressed by the elastic bags in a direction away from the head body portion, the head body portion being provided with channels for bags, which are in communication with the respective elastic bags, the polishing head further including at least two support plates disposed between the elastic bags on one hand and the substrate holding plate on the other, the elastic bags being configured to press the substrate holding plate through the support plates.

A carrier head includes a base assembly, a substrate mounting surface connected to the base assembly, and a plurality of segments disposed circumferentially around the substrate mounting surface to provide a retaining ring to surround a substrate mounted on the substrate mounting surface. An inner surface of each of the plurality of segments is configured to engage the substrate, and each segment of the plurality of segments of the retaining ring is pivotally connected to the base assembly such that a lower portion of each segment of the retaining ring is swingable toward and away from the substrate.

A wheel polishing device is provided and configured to be used with a polishing stand. The device includes a base plate defining a plurality of tracks and a plurality of peg members. Each of the plurality of peg members configured to slidably engage a least one of the plurality of tracks defined by the plate. A peg expanding hub is configured to expand into the plurality of peg members when a nut is tightened on a center screw that passes through the peg expanding hub.

A wheel polishing device is provided and configured to be used with a polishing stand. The device includes a base plate defining a plurality of tracks and a plurality of peg members. Each of the plurality of peg members configured to slidably engage a least one of the plurality of tracks defined by the plate. A peg expanding hub is configured to expand into the plurality of peg members when a nut is tightened on a center screw that passes through the peg expanding hub.

A component according to the disclosure may include a body having an aperture therein for receiving one of a turbomachine shaft or a lathe chuck, wherein in response to the body being coupled to the lathe chuck, the aperture is oriented substantially axially relative to an axis of rotation of the body with the lathe chuck; and a flange coupled to and in direct axial contact with the body, the flange including a surface that extends axially relative to the axis of rotation of the body, wherein the surface of the flange comprises a matingly engageable face configured to contact an axially aligned surface during operation of the component and having a sanding indentation thereon, wherein a surface roughness of the surface of the flange is less than a surface roughness of a remainder of the component.