A polishing apparatus includes a polishing station to hold a polishing pad, a carrier head to hold a substrate in contact with a polishing pad at the polishing station, a camera positioned to capture an image of a lower surface of a consumable part when the consumable part moves away from the polishing pad, and a controller configured to perform an image processing algorithm on the image to determine whether the consumable part is damaged. The consumable part can be a retaining ring on a carrier head, or a conditioner disk on a conditioner head.

The present disclosure provides a chemical mechanical polishing system having a unitary platen. The platen includes one or more recesses within the platen to house various components for the polishing/planarization process. In one embodiment, the platen includes a first recess and a second recess. The first recess is located under the second recess. An end point detector is placed in the first recess and a detector cover may be placed in the second recess. A sealing mean is provided in a space between the end point detector and the detector cover to prevent any external or foreign materials from coming in contact with the end point detector. A fastener used for fastening the detector cover to the platen also provides addition protection to prevent foreign materials from coming in contact with components received in the recesses.

The present disclosure provides a chemical mechanical polishing system having a unitary platen. The platen includes one or more recesses within the platen to house various components for the polishing/planarization process. In one embodiment, the platen includes a first recess and a second recess. The first recess is located under the second recess. An end point detector is placed in the first recess and a detector cover may be placed in the second recess. A sealing mean is provided in a space between the end point detector and the detector cover to prevent any external or foreign materials from coming in contact with the end point detector. A fastener used for fastening the detector cover to the platen also provides addition protection to prevent foreign materials from coming in contact with components received in the recesses.

An apparatus for automated polishing of an object with multiple facets includes a polishing wheel, a robotic arm, a sensor and a controller. The robotic arm positions the object in contact with the polishing wheel. The sensor senses a polishing related parameter during polishing of the object with the polishing wheel. The controller operates the robotic arm to rotate the object about an axis perpendicular to the polishing wheel, receives a sensing signal from said sensor at different orientations of said object during polishing and selects a polishing orientation from the different orientations based on said sensing signal.

A workpiece processing device includes a workpiece supporting unit configured to support a workpiece so that the workpiece is rotatable around a first axis parallel to a central axis of the workpiece, a cutting unit having a blade configured to cut a surface of the workpiece, a detecting unit configured to calculate a position of a vertex of the surface in a direction along a second axis which is perpendicular to the first axis and parallel to the blade, and a control unit configured to control the workpiece supporting unit so that a cutting position on the surface is located at a vertex in the direction along the second axis, and relatively move the workpiece supporting unit and the cutting unit so that an incision direction of the blade is on a plane defined by the central axis and the cutting position, thereby forming a groove at the cutting position.

A workpiece processing device includes a workpiece supporting unit configured to support a workpiece so that the workpiece is rotatable around a first axis parallel to a central axis of the workpiece, a cutting unit having a blade configured to cut a surface of the workpiece, a detecting unit configured to calculate a position of a vertex of the surface in a direction along a second axis which is perpendicular to the first axis and parallel to the blade, and a control unit configured to control the workpiece supporting unit so that a cutting position on the surface is located at a vertex in the direction along the second axis, and relatively move the workpiece supporting unit and the cutting unit so that an incision direction of the blade is on a plane defined by the central axis and the cutting position, thereby forming a groove at the cutting position.

A surface treatment vehicle for manufacturing a wind turbine blade is provided, the vehicle including: a transportation unit for locomotion of the vehicle, and a filling unit for applying a filler material on a surface of the blade, wherein the filling unit includes: a dispensing head for dispensing the filler material, the dispensing head being moveably attached to the transportation unit, and a tank for storing the filler material, the tank being attached to the transportation unit and fluidly connected to the dispensing head. Having the surface treatment vehicle with the filling unit allows an easier, faster, safer and more efficient manufacturing of a wind turbine blade.

A probe grinding device by acoustic positioning includes a fixing base, a grinding base, a rotating module, a motor module, a moving module, a processing module, an acoustic sensing module, and a memory module. The fixing base fixes a probe card. The acoustic sensing module generates and transmits an acoustic sensing signal to the processing module. The memory module stores a grinding audio of a grinding audio data. When the processing module drives the rotating module and the moving module via the motor module, the processing module determines whether the acoustic sensing signal matches the grinding audio. When the acoustic sensing signal matches the grinding audio, the processing module drives the moving module to slowly move the grinding base to avoid damaging the probes.

A probe grinding device by acoustic positioning includes a fixing base, a grinding base, a rotating module, a motor module, a moving module, a processing module, an acoustic sensing module, and a memory module. The fixing base fixes a probe card. The acoustic sensing module generates and transmits an acoustic sensing signal to the processing module. The memory module stores a grinding audio of a grinding audio data. When the processing module drives the rotating module and the moving module via the motor module, the processing module determines whether the acoustic sensing signal matches the grinding audio. When the acoustic sensing signal matches the grinding audio, the processing module drives the moving module to slowly move the grinding base to avoid damaging the probes.

A calibration device (500, 1000) for calibrating a floor surfacing system (200), the calibration device comprising at least four infrared sources (510, 520, 530, 540) arranged separated from each other on a structural member (501) according to a known geometrical configuration, where three of the infrared sources (510, 530, 540) are located in a common plane and where a fourth infrared source (520) is located distanced from the common plane along a normal vector to the common plane, wherein the calibration device (500, 1000) is arranged to be positioned at one or more locations around a perimeter of the surface to be processed in view from an nfrared vision sensor (210), whereby the infrared vision sensor may obtain images of the calibration device at the one or more locations.