An object of the present invention is to reduce an amount of use of the polishing liquid. There is provided an apparatus for polishing an object to be polished using a polishing pad having a polishing surface, the apparatus including: a polishing table for supporting the polishing pad, the polishing table being configured to be rotatable; a substrate holding unit configured to hold the object to be polished and press the object against the polishing pad; a supplying device for supplying polishing liquid to the polishing surface in a state in which the supplying device is pressed against the polishing pad; and a pressing mechanism configured to press the supplying device against the polishing pad, in which the pressing mechanism is capable of respectively adjusting pressing forces for pressing the sidewalls of on the upstream side and the downstream side of the supplying device against the polishing surface.

A polishing apparatus capable of preventing condensation on an inner surface of a transparent window provided in a polishing pad and capable of achieving accurate measuring of a film thickness is disclosed. The polishing apparatus includes: a polishing pad having a polishing surface; a polishing head configured to press a workpiece against the polishing surface; a transparent window disposed in the polishing pad; a polishing table configured to support the polishing pad; an optical sensor head located below the transparent window and configured to direct light to the workpiece through the transparent window and receive reflected light from the workpiece through the transparent window; and a cooling device configured to cool a space between the transparent window and the optical sensor head.

A machine tool of high-frequency vibration is provided. A main shaft structure of the machine tool comprises a rotating shaft, the end of which is provided with a tool holder chuck for fixing a tool holder; the upper portion of which is provided with a rotating coil portion; the main shaft structure is correspondingly provided with a stationary coil portion; and the tool holder is provided with a high-frequency vibration module. By non-contact coils, an external electric power/signal can be transmitted into the high-frequency vibration module to avoid a wear phenomenon in a contact-rotating electrode. Because the inductive coil is arranged outside of the tool holder, the manufacturing cost of the tool holder is reduced, and the convenience of changing the tool holder is increased. Moreover, the machining stability and efficiency of the tool holder are improved by a control method of sensing/feedback signals with wireless transmission.

A machine tool of high-frequency vibration is provided. A main shaft structure of the machine tool comprises a rotating shaft, the end of which is provided with a tool holder chuck for fixing a tool holder; the upper portion of which is provided with a rotating coil portion; the main shaft structure is correspondingly provided with a stationary coil portion; and the tool holder is provided with a high-frequency vibration module. By non-contact coils, an external electric power/signal can be transmitted into the high-frequency vibration module to avoid a wear phenomenon in a contact-rotating electrode. Because the inductive coil is arranged outside of the tool holder, the manufacturing cost of the tool holder is reduced, and the convenience of changing the tool holder is increased. Moreover, the machining stability and efficiency of the tool holder are improved by a control method of sensing/feedback signals with wireless transmission.

An apparatus for performing a polishing process includes: a rotatable polishing pad; a temperature sensor configured to monitor a temperature on a top surface of the rotatable polishing pad; a first dispenser configured to dispense a first slurry that is maintained at a first temperature on the rotatable polishing pad; and a second dispenser configured to dispense a second slurry that is maintained at a second temperature on the rotatable polishing pad, wherein the second temperature is different from the first temperature so as to maintain the temperature on the top surface of the rotatable polishing pad at a substantially constant value.

An apparatus for performing a polishing process includes: a rotatable polishing pad; a temperature sensor configured to monitor a temperature on a top surface of the rotatable polishing pad; a first dispenser configured to dispense a first slurry that is maintained at a first temperature on the rotatable polishing pad; and a second dispenser configured to dispense a second slurry that is maintained at a second temperature on the rotatable polishing pad, wherein the second temperature is different from the first temperature so as to maintain the temperature on the top surface of the rotatable polishing pad at a substantially constant value.

The invention relates to a method for producing a gear worm (12) which is located in particular on an armature shaft (14) of an electromotive drive unit (10), wherein firstly a worm gear (20) having screw flanks (22) axially opposite one another on a longitudinal axis (18) is formed by means of a rolling tool, and subsequently a groove structure (24) which is concentric about the longitudinal axis (18) is formed on the screw flanks (22) by means of an additional process step. The invention also relates to a gear worm (12) produced according to the method according to the invention, and to a transmission drive unit (10) containing such a gear worm (12).

The invention relates to a method for producing a gear worm (12) which is located in particular on an armature shaft (14) of an electromotive drive unit (10), wherein firstly a worm gear (20) having screw flanks (22) axially opposite one another on a longitudinal axis (18) is formed by means of a rolling tool, and subsequently a groove structure (24) which is concentric about the longitudinal axis (18) is formed on the screw flanks (22) by means of an additional process step. The invention also relates to a gear worm (12) produced according to the method according to the invention, and to a transmission drive unit (10) containing such a gear worm (12).

An abrasive profiling tool that may be part of a robotic machining system for machining a trailing edge of an airfoil, includes a shank extending along a rotational axis, a bearing guide rotationally secured to a distal end of the shank for riding upon the airfoil; and an abrasive profiler projecting radially and rigidly outward from the shank for grinding at least the trailing edge as the shank rotates. The profiler may include a round-over portion for grinding the trailing edge and a chamfered blending portion for grinding adjacent surfaces of the airfoil to produce a smooth transition from the adjacent surfaces and to the trailing edge.

An abrasive profiling tool that may be part of a robotic machining system for machining a trailing edge of an airfoil, includes a shank extending along a rotational axis, a bearing guide rotationally secured to a distal end of the shank for riding upon the airfoil; and an abrasive profiler projecting radially and rigidly outward from the shank for grinding at least the trailing edge as the shank rotates. The profiler may include a round-over portion for grinding the trailing edge and a chamfered blending portion for grinding adjacent surfaces of the airfoil to produce a smooth transition from the adjacent surfaces and to the trailing edge.