A method of conditioning a surface of a polishing pad is used for conditioning a polishing pad on a polishing table for polishing a thin film formed on a surface of a substrate. The conditioning method includes bringing a dresser into contact with the polishing pad, and conditioning the polishing pad by moving the dresser between a central part of the polishing pad and an outer circumferential part of the polishing pad. A moving speed of the dresser at a predetermined area of the polishing pad is higher than a standard moving speed of the dresser at the predetermined area of the polishing pad.

A method of conditioning a surface of a polishing pad is used for conditioning a polishing pad on a polishing table for polishing a thin film formed on a surface of a substrate. The conditioning method includes bringing a dresser into contact with the polishing pad, and conditioning the polishing pad by moving the dresser between a central part of the polishing pad and an outer circumferential part of the polishing pad. A moving speed of the dresser at a predetermined area of the polishing pad is higher than a standard moving speed of the dresser at the predetermined area of the polishing pad.

A grinding wheel dressing tool with hollow spheres preferably includes a tool shank and a dressing portion. The tool shank preferably includes a shank portion and a tool body. The shank portion extends from one end of the tool body and a dressing portion cavity is formed in an opposing end. The dressing portion preferably includes a quantity of diamond grit, metal bond powder, binder and a plurality of hollow spheres. The dressing portion cavity is preferably filled to a top with metal bond powder. The diamond grit, the metal bond powder and the binder are mixed together to form a grit mixture. A tubular mold is slipped over a top of the tool body. The dressing portion is created by forming alternative layers of grit mixture and hollow spheres in the tubular mold. The tubular mold is heated and the grit mixture pressed with a plunger.

A grinding wheel dressing tool with hollow spheres preferably includes a tool shank and a dressing portion. The tool shank preferably includes a shank portion and a tool body. The shank portion extends from one end of the tool body and a dressing portion cavity is formed in an opposing end. The dressing portion preferably includes a quantity of diamond grit, metal bond powder, binder and a plurality of hollow spheres. The dressing portion cavity is preferably filled to a top with metal bond powder. The diamond grit, the metal bond powder and the binder are mixed together to form a grit mixture. A tubular mold is slipped over a top of the tool body. The dressing portion is created by forming alternative layers of grit mixture and hollow spheres in the tubular mold. The tubular mold is heated and the grit mixture pressed with a plunger.

An abrasive tool for a floor grinder, wherein the tool extends along a wear direction (D) from a grinding surface (G) to a mounting surface (M), wherein the abrasive tool comprises at least two sections (410, 420, 430) separated by a surface (P) transversal to the wear direction (D), where the at least two sections comprise respective abrasive materials associated with different grit sizes, where the section located closer to the grinding surface (G) is associated with a larger grit size compared to the section located closer to the mounting surface (M).

An abrasive tool for a floor grinder, wherein the tool extends along a wear direction (D) from a grinding surface (G) to a mounting surface (M), wherein the abrasive tool comprises at least two sections (410, 420, 430) separated by a surface (P) transversal to the wear direction (D), where the at least two sections comprise respective abrasive materials associated with different grit sizes, where the section located closer to the grinding surface (G) is associated with a larger grit size compared to the section located closer to the mounting surface (M).