The present disclosure relates to a dressing tool. The dressing tool can include a shank having a proximal end and a distal end as well as an abrasive tip. The abrasive tip may include a superabrasive material that may be bonded to the distal end of the shank. The abrasive tip may be tilted relative to a longitudinal axis of the shank.

The present disclosure relates to a dressing tool. The dressing tool can include a shank having a proximal end and a distal end as well as an abrasive tip. The abrasive tip may include a superabrasive material that may be bonded to the distal end of the shank. The abrasive tip may be tilted relative to a longitudinal axis of the shank.

CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a CMP pad dresser can include a support substrate and a plurality of superabrasive particles secured to the support substrate with each superabrasive particle extending away from the support substrate to a protrusion distance, where a highest protruding tip of each of the plurality of superabrasive particles align along a designated profile with a tip variation of from about 5 microns to about 100 microns.

CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a CMP pad dresser can include a support substrate and a plurality of superabrasive particles secured to the support substrate with each superabrasive particle extending away from the support substrate to a protrusion distance, where a highest protruding tip of each of the plurality of superabrasive particles align along a designated profile with a tip variation of from about 5 microns to about 100 microns.

A method for dressing a grinding worm using a dressing roll that engages the grinding worm to profile its helical grinding profile. The dressing roll is produced by: a) producing a disk-shaped base body a profiled surface for receiving a layer of abrasive particles, wherein the surface is at least partially tooth-shaped in a radial cross section, b) positioning the abrasive particles on the profiled surface, c) profiling the base body provided with abrasive particles by removing outer sections of the abrasive particles with a profiling tool so that the abrasive profile of the dressing roll is created. Production of the profiled surface takes place in step a) so that the distance between the profiled surface and the abrasive profile changes during advancing from the root region to the tip region at a flank of the tooth-shaped surface, measured in the radial cross section perpendicular to the profiled surface.

A method for dressing a grinding worm using a dressing roll that engages the grinding worm to profile its helical grinding profile. The abrasive profile of the dressing roll is at least partially tooth-shaped in a radial cross section and extends radially from a root region to a tip region. The dressing roll is produced by: a) producing a counterpart having an inner surface; b) positioning and fixing a layer of abrasive particles on the tooth-shaped surface; c) producing a disk-shaped base body of the dressing roll and connecting the base body with a carrier layer for the abrasive particles; d) demolding the base body; e) profiling the base body. Step a) includes providing the counterpart with the surface so that the distance between the profiled surface and the abrasive profile changes during advancing from the root region to the tip region at least at one flank of the surface, measured in the radial cross section perpendicular to the profiled surface.

Disclosed herein is an attachment removing device for a diamond tool used in a machining process such as cutting, grinding, polishing, drilling, or the like, for removing an attachment attached to the diamond tool. The attachment removing device for a diamond tool for removing an attachment attached to the diamond tool includes a cylindrical member; and a plurality of bristles each having one end connected to the cylindrical member.

A processing apparatus includes a chuck table that holds a workpiece by a holding face, a processing unit that processes the workpiece with a grinding whetstone or a polishing pad, a movement unit for moving the chuck table and the processing unit parallel to the holding face, a processing feeding unit for moving the chuck table and the processing unit in a direction orthogonal to the holding face, an inspection unit to inspect a process mark of the workpiece during processing, a dressing unit to dress the grinding whetstone or the polishing pad of the processing unit, and a control unit. When a process mark of a size exceeding a threshold value is detected on the process face of the workpiece, the control unit stops processing of the workpiece, and after the grinding whetstone or the polishing pad is dressed, restarts processing.

A processing apparatus includes a chuck table that holds a workpiece by a holding face, a processing unit that processes the workpiece with a grinding whetstone or a polishing pad, a movement unit for moving the chuck table and the processing unit parallel to the holding face, a processing feeding unit for moving the chuck table and the processing unit in a direction orthogonal to the holding face, an inspection unit to inspect a process mark of the workpiece during processing, a dressing unit to dress the grinding whetstone or the polishing pad of the processing unit, and a control unit. When a process mark of a size exceeding a threshold value is detected on the process face of the workpiece, the control unit stops processing of the workpiece, and after the grinding whetstone or the polishing pad is dressed, restarts processing.

A chemical mechanical polish apparatus and methods for manufacturing and use of the chemical mechanical polishing apparatus are discussed herein. In an embodiment, a polishing apparatus is provided that includes: a polishing pad coated with polypeptides; and an enzyme spraying device positioned adjacent to the polishing pad.