Patent classifications
B24B53/12
Methods for modifying and adding features on grinding wheel surfaces
Systems and methods are disclosed herein for adding surface features to grinding wheels. A laser may be directed substantially perpendicular to a grinding surface of a grinding wheel. The laser may be pulsed and may ablate material from the grinding surface. The laser may move relative to the grinding wheel in order to ablate shaped surface features into the grinding surface.
Coupling mechanism with spherical bearing, method of determining bearing radius of spherical bearing, and substrate polishing apparatus
A coupling mechanism capable of preventing vibration of a rotating body from occurring due to a lower-bearing friction torque is disclosed. The coupling mechanism includes an upper spherical bearing and a lower spherical bearing disposed between a drive shaft and a rotating body. The upper spherical bearing has a first concave contact surface and a second convex contact surface, and the lower spherical bearing has a third concave contact surface and a fourth convex contact surface. The first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface are arranged concentrically. A lower-bearing radius of the lower spherical bearing is determined so that a lower-restoring torque is equal to or less than 0, the lower-restoring torque being the sum of a rotating-body friction torque generated in the rotating body due to a rotating-body frictional force between a polishing pad and the rotating body, and a lower-bearing friction torque generated in the rotating body due to a frictional force between the third concave contact surface and the fourth convex contact surface.
Coupling mechanism with spherical bearing, method of determining bearing radius of spherical bearing, and substrate polishing apparatus
A coupling mechanism capable of preventing vibration of a rotating body from occurring due to a lower-bearing friction torque is disclosed. The coupling mechanism includes an upper spherical bearing and a lower spherical bearing disposed between a drive shaft and a rotating body. The upper spherical bearing has a first concave contact surface and a second convex contact surface, and the lower spherical bearing has a third concave contact surface and a fourth convex contact surface. The first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface are arranged concentrically. A lower-bearing radius of the lower spherical bearing is determined so that a lower-restoring torque is equal to or less than 0, the lower-restoring torque being the sum of a rotating-body friction torque generated in the rotating body due to a rotating-body frictional force between a polishing pad and the rotating body, and a lower-bearing friction torque generated in the rotating body due to a frictional force between the third concave contact surface and the fourth convex contact surface.
Apparatus and method for deterministic control of surface figure during full aperture pad polishing
A polishing system configured to polish a lap includes a lap configured to contact a workpiece for polishing the workpiece; and a septum configured to contact the lap. The septum has an aperture formed therein. The radius of the aperture and radius the workpiece are substantially the same. The aperture and the workpiece have centers disposed at substantially the same radial distance from a center of the lap. The aperture is disposed along a first radial direction from the center of the lap, and the workpiece is disposed along a second radial direction from the center of the lap. The first and second radial directions may be opposite directions.
Apparatus and method for deterministic control of surface figure during full aperture pad polishing
A polishing system configured to polish a lap includes a lap configured to contact a workpiece for polishing the workpiece; and a septum configured to contact the lap. The septum has an aperture formed therein. The radius of the aperture and radius the workpiece are substantially the same. The aperture and the workpiece have centers disposed at substantially the same radial distance from a center of the lap. The aperture is disposed along a first radial direction from the center of the lap, and the workpiece is disposed along a second radial direction from the center of the lap. The first and second radial directions may be opposite directions.
Grinding Tool
A grinding tool includes a substrate having a surface provided with a plurality of openings, and a plurality of grinding studs. Each of the grinding studs includes a stud portion and an abrasive particle attached to each other, the stud portions being respectively attached into the openings, and the abrasive particles protruding outward from the surface, each of the abrasive particles having a pattern cut across a tip thereof to define multiple apexes adjacent to one another.
APPARATUS AND METHOD FOR DETERMINISTIC CONTROL OF SURFACE FIGURE DURING FULL APERTURE PAD POLISHING
A polishing system configured to polish a lap includes a lap configured to contact a workpiece for polishing the workpiece; and a septum configured to contact the lap. The septum has an aperture formed therein. The radius of the aperture and radius the workpiece are substantially the same. The aperture and the workpiece have centers disposed at substantially the same radial distance from a center of the lap. The aperture is disposed along a first radial direction from the center of the lap, and the workpiece is disposed along a second radial direction from the center of the lap. The first and second radial directions may be opposite directions.
Grinding tool and method of manufacturing the same
A grinding tool includes a substrate having a surface provided with a plurality of openings, and a plurality of grinding studs. Each of the grinding studs includes a stud portion and an abrasive particle attached to each other, the stud portions being respectively attached into the openings, and the abrasive particles protruding outward from the surface, each of the abrasive particles having a pattern cut across a tip thereof to define multiple apexes adjacent to one another. In some embodiments, methods of fabricating a grinding tool are also described.
TRUER, TRUING APPARATUS INCLUDING TRUER, GRINDER, AND TRUING METHOD
A truer includes: a core formed into a truncated cone; and an abrasive grain layer fixed onto an outer peripheral surface of the core. The core includes: a base that is a small-diameter portion of the truncated cone and has a disc shape; and a tubular member extending from an outer peripheral edge of the base in the direction in which a rotation axis of the truncated cone extends. The tubular member has a hollow tubular shape. The tubular member includes an outer peripheral surface tapered so that a portion of the tubular member opposite to the base and adjacent to an extremity of the tubular member is a large-diameter portion of the truncated cone. A recess opening toward the extremity is defined inward of the tubular member.
TRUER, TRUING APPARATUS INCLUDING TRUER, GRINDER, AND TRUING METHOD
A truer includes: a core formed into a truncated cone; and an abrasive grain layer fixed onto an outer peripheral surface of the core. The core includes: a base that is a small-diameter portion of the truncated cone and has a disc shape; and a tubular member extending from an outer peripheral edge of the base in the direction in which a rotation axis of the truncated cone extends. The tubular member has a hollow tubular shape. The tubular member includes an outer peripheral surface tapered so that a portion of the tubular member opposite to the base and adjacent to an extremity of the tubular member is a large-diameter portion of the truncated cone. A recess opening toward the extremity is defined inward of the tubular member.