A pad conditioner and chemical mechanical planarization (CMP) pad conditioner assembly for a CMP assembly are disclosed. The pad conditioner includes a substrate having a first surface and a second surface opposite the first surface. A plurality of protrusions protrude away from the first surface in a direction that is normal to the first surface. The plurality of protrusions are arranged in a plurality of rows. A first row of the plurality of rows is offset from a second row of the plurality of rows.

A pad conditioner and chemical mechanical planarization (CMP) pad conditioner assembly for a CMP assembly are disclosed. The pad conditioner includes a substrate having a first surface and a second surface opposite the first surface. A plurality of protrusions protrude away from the first surface in a direction that is normal to the first surface. The plurality of protrusions are arranged in a plurality of rows. A first row of the plurality of rows is offset from a second row of the plurality of rows.

A dressing tool for dressing an annular array of grinding tones disposed on a surface of a grinding wheel includes a dressing board for dressing the grinding stones and a support plate supporting a reverse side of the dressing board. The reverse side of the dressing board has a recess defined therein that has a depth terminating short of s face side of the dressing board that is opposite the reverse side thereof and corresponding to a usage-limit thickness of the dressing board.

A dressing tool for dressing an annular array of grinding tones disposed on a surface of a grinding wheel includes a dressing board for dressing the grinding stones and a support plate supporting a reverse side of the dressing board. The reverse side of the dressing board has a recess defined therein that has a depth terminating short of s face side of the dressing board that is opposite the reverse side thereof and corresponding to a usage-limit thickness of the dressing board.

A method for dressing a grinding worm using a dressing roll that engages the grinding worm to profile its helical grinding profile. The dressing roll is produced by: a) producing a disk-shaped base body a profiled surface for receiving a layer of abrasive particles, wherein the surface is at least partially tooth-shaped in a radial cross section, b) positioning the abrasive particles on the profiled surface, c) profiling the base body provided with abrasive particles by removing outer sections of the abrasive particles with a profiling tool so that the abrasive profile of the dressing roll is created. Production of the profiled surface takes place in step a) so that the distance between the profiled surface and the abrasive profile changes during advancing from the root region to the tip region at a flank of the tooth-shaped surface, measured in the radial cross section perpendicular to the profiled surface.

A method for dressing a grinding worm using a dressing roll that engages the grinding worm to profile its helical grinding profile. The dressing roll is produced by: a) producing a disk-shaped base body a profiled surface for receiving a layer of abrasive particles, wherein the surface is at least partially tooth-shaped in a radial cross section, b) positioning the abrasive particles on the profiled surface, c) profiling the base body provided with abrasive particles by removing outer sections of the abrasive particles with a profiling tool so that the abrasive profile of the dressing roll is created. Production of the profiled surface takes place in step a) so that the distance between the profiled surface and the abrasive profile changes during advancing from the root region to the tip region at a flank of the tooth-shaped surface, measured in the radial cross section perpendicular to the profiled surface.

A method for dressing a grinding worm using a dressing roll that engages the grinding worm to profile its helical grinding profile. The abrasive profile of the dressing roll is at least partially tooth-shaped in a radial cross section and extends radially from a root region to a tip region. The dressing roll is produced by: a) producing a counterpart having an inner surface; b) positioning and fixing a layer of abrasive particles on the tooth-shaped surface; c) producing a disk-shaped base body of the dressing roll and connecting the base body with a carrier layer for the abrasive particles; d) demolding the base body; e) profiling the base body. Step a) includes providing the counterpart with the surface so that the distance between the profiled surface and the abrasive profile changes during advancing from the root region to the tip region at least at one flank of the surface, measured in the radial cross section perpendicular to the profiled surface.

A method for dressing a grinding worm using a dressing roll that engages the grinding worm to profile its helical grinding profile. The abrasive profile of the dressing roll is at least partially tooth-shaped in a radial cross section and extends radially from a root region to a tip region. The dressing roll is produced by: a) producing a counterpart having an inner surface; b) positioning and fixing a layer of abrasive particles on the tooth-shaped surface; c) producing a disk-shaped base body of the dressing roll and connecting the base body with a carrier layer for the abrasive particles; d) demolding the base body; e) profiling the base body. Step a) includes providing the counterpart with the surface so that the distance between the profiled surface and the abrasive profile changes during advancing from the root region to the tip region at least at one flank of the surface, measured in the radial cross section perpendicular to the profiled surface.

A sample preparation saw has a base, a housing, a saw assembly mounted to the base, a dressing assembly, a sample clamping assembly mounted to the base, and a reservoir assembly. The saw assembly includes a blade assembly with a rotating blade. The blade assembly is movable along x-, y- and z-axes by at least two drives. The dressing assembly is operable to dress the rotating blade. The sample clamping assembly includes a rail, a sample mount removably positioned on the rail and a saddle operable to hold a sample. The reservoir assembly is operable to recirculate a rinse fluid sprayed on the rotating blade, and includes a basin having a pump and a series of weirs.

A dresser includes a main body having a stepped surface comprising a plurality of steps, wherein a thickness of the main body at a first step of the plurality of steps is a largest thickness of the main body, and a thickness of the main body at a last step of the plurality of steps is a smallest thickness of the main body; and a plurality of superhard particles disposed on each of the plurality of steps of the stepped surface. The plurality of steps of the stepped surface are different in area, and particle diameters of the superhard particles increase stepwise from the first step of the plurality of steps to the last step of the plurality of steps.