A processing apparatus includes a chuck table, a processing unit that has a spindle, a spindle housing, and a mount section fixed to a lower end portion of the spindle, a processing feeding mechanism that puts the processing unit into processing feeding, a processing chamber cover that has an opening penetrable by the mount section and that is able to cover the chuck table and the mount section, an extendable cover section having an annular lower connection section detachably connected to a peripheral portion of the opening, an annular upper connection section fixed to the spindle housing, and a tubular bellows section that connects the upper and lower connection sections and that is able to shrink and extend following movement of the processing unit, and a gas flow forming unit that forms a flow of gas from the upper connection section toward the lower connection section inside the bellows section.

A processing machine includes a chuck table, a chuck table cover having an opening through which a holding surface of the chuck table can protrude, a processing unit having a spindle, a spindle housing, and a mount portion arranged on a lower end portion of the spindle, the processing unit being configured to process a workpiece by a processing tool mounted on a lower part of the mount portion, a processing chamber construction cover that covers the chuck table and the mount portion. The processing machine further includes a processing tool cover that is secured to a lower end portion of the spindle housing and that has an upper wall and a side wall that extends downwardly from the upper wall. The processing tool cover is disposed inside the processing chamber construction cover and covers the processing tool from above and sides by the upper and side walls.

A processing machine includes a chuck table, a chuck table cover having an opening through which a holding surface of the chuck table can protrude, a processing unit having a spindle, a spindle housing, and a mount portion arranged on a lower end portion of the spindle, the processing unit being configured to process a workpiece by a processing tool mounted on a lower part of the mount portion, a processing chamber construction cover that covers the chuck table and the mount portion. The processing machine further includes a processing tool cover that is secured to a lower end portion of the spindle housing and that has an upper wall and a side wall that extends downwardly from the upper wall. The processing tool cover is disposed inside the processing chamber construction cover and covers the processing tool from above and sides by the upper and side walls.

The present invention relates to a floor treatment apparatus (1) and method for treating a floor. The apparatus comprises: •—a housing (10) comprising a top plate (11), and •—a drive system comprising: •—a transmission (21) arranged above the top plate (11), the transmission (21) comprising a transmission shaft (22) passing through an aperture in the top plate (11), •—a motor (23) attached to the transmission (21), the motor (23) arranged above the top plate (11), •—a rotatable drive plate (24) attached to the transmission shaft (22) and positioned below the top plate (11), and •—a coupling member (25) attached to a bottom of the drive plate (24) and arranged to couple a treatment member (26) for treating a floor surface, by engagement on said floor surface, to the drive plate (24), wherein the floor treatment apparatus comprises an open-ended tubular casing extending from a central aperture in the drive plate (24) through the housing (10) to an outlet opening (15) of the housing (10) to which a fluid conduit is connectable, wherein the casing is arranged for a fluid to flow through it.

A system for polishing an outer surface of a specimen, the system including a motor and a rotatable shaft extending from a first end of the motor, wherein the specimen is removably attachable to the rotatable shaft, a safety cover configured to at least partially surround at least a portion of the rotatable shaft, wherein the safety cover includes a top panel, a first side panel and a second side panel spaced from each other across a width of the safety cover and extending downwardly from the top panel, and at least one aperture extending through at least one of the first and second side panels. The system further includes an abrasive material insertable through the at least one aperture so that the abrasive material is positionable to contact the outer surface of the specimen.

A system for polishing an outer surface of a specimen, the system including a motor and a rotatable shaft extending from a first end of the motor, wherein the specimen is removably attachable to the rotatable shaft, a safety cover configured to at least partially surround at least a portion of the rotatable shaft, wherein the safety cover includes a top panel, a first side panel and a second side panel spaced from each other across a width of the safety cover and extending downwardly from the top panel, and at least one aperture extending through at least one of the first and second side panels. The system further includes an abrasive material insertable through the at least one aperture so that the abrasive material is positionable to contact the outer surface of the specimen.

A grinding wheel assembly has a tool holder, a mounting shaft connected to the tool holder, and a grinding wheel mounted on the mounting shaft. The tool holder has a first coolant passage defined through the tool holder. The mounting shaft has a second coolant passage communicating with the first coolant passage. The grinding wheel has multiple third coolant passages defined through the grinding wheel and communicating with the second coolant passage. The first coolant passage, the second coolant passage, and the multiple third coolant passages are utilized for a coolant to flow through. Thereby, the grinding wheel and a workpiece can be cooled down without setting up any pipeline and nozzle for the coolant in a grinding machine.

A region of a side surface of a tip part of a spindle, the region being opposed to an inside surface of a cover with a gap therebetween, is formed with a groove going round the spindle one time. At a location where the groove is formed, the sectional area of the gap between the tip part and the cover is enlarged. Hence, the gap between the tip part of the spindle and the cover can be expressed as a space (passage) in which a small sectional area and a space (expansion chamber) having a large sectional area are alternately disposed. If processing liquid containing processing swarf enters into the gap, the processing liquid is not likely to enter into the passage. Deposition of the swarf onto the tip part of the spindle is restrained, making it possible to reduce the frequency of cleaning of the tip part.

A region of a side surface of a tip part of a spindle, the region being opposed to an inside surface of a cover with a gap therebetween, is formed with a groove going round the spindle one time. At a location where the groove is formed, the sectional area of the gap between the tip part and the cover is enlarged. Hence, the gap between the tip part of the spindle and the cover can be expressed as a space (passage) in which a small sectional area and a space (expansion chamber) having a large sectional area are alternately disposed. If processing liquid containing processing swarf enters into the gap, the processing liquid is not likely to enter into the passage. Deposition of the swarf onto the tip part of the spindle is restrained, making it possible to reduce the frequency of cleaning of the tip part.

In a chemical mechanical polishing system, a platen shield cleaning assembly is installed on a rotatable platen in a gap between the rotatable platen and a platen shield. The assembly includes a sponge holder attached to the platen and a sponge. The sponge is held by the sponge holder such that an outer surface of the sponge is pressed against an inner surface of the platen shield.