A substrate processing apparatus includes a first polishing chamber, a second polishing chamber, a dry polishing chamber and a loading chamber on a turntable. The dry polishing chamber includes a polishing device on the turntable, and a chamber cover including a cover plate, an interception filter at an intake port at the cover plate, and a particle barrier connected to the cover plate. The particle barrier faces the interception filter, and is between the polishing device and the interception filter.

Methods of forming a cutting element include leaching a diamond table of the cutting element and subsequent to leaching the diamond table of the cutting element, forming a chamfer on the diamond table of the cutting element at an interface between a cutting surface of the diamond table and an outer side surface of the diamond table. Methods of forming earth-boring tools include forming a cutting element and securing the cutting element to a body of the earth-boring tool. Forming the cutting element includes including leaching a diamond table of the cutting element and subsequent to leaching the diamond table of the cutting element, forming a chamfer on the diamond table of the cutting element at an interface between a cutting surface of the diamond table and an outer side surface of the diamond table.

Methods of forming a cutting element include leaching a diamond table of the cutting element and subsequent to leaching the diamond table of the cutting element, forming a chamfer on the diamond table of the cutting element at an interface between a cutting surface of the diamond table and an outer side surface of the diamond table. Methods of forming earth-boring tools include forming a cutting element and securing the cutting element to a body of the earth-boring tool. Forming the cutting element includes including leaching a diamond table of the cutting element and subsequent to leaching the diamond table of the cutting element, forming a chamfer on the diamond table of the cutting element at an interface between a cutting surface of the diamond table and an outer side surface of the diamond table.

A grinding machine includes a main part and an end case. A driving unit is connected to the end case and includes a first motor which has an output shaft with a groove. A grinding unit is connected to the end case, and cantilevered above the main part. The grinding unit includes a grinding wheel set which has a central axle with a slide. The slide is located in the groove of the output shaft of the first motor. A driving wheel is connected to the central axle. An adjustment device includes a second motor which drives an eccentric unit that has an eccentric axle, and the eccentric axle extends through a bearing which is located in a recess formed to the driving wheel. The driving wheel is driven by the eccentric unit to move the grinding wheel set of the grinding unit left and right.

A dust collector apparatus includes a housing, an airflow generation module and a filter. The housing has one side formed at least one intake vent-hole and another side formed of at least one exhaust vent-hole. An inner side of the housing has an airflow channel formed between the intake vent-hole and the exhaust vent-hole. The airflow generation module comprises an airflow drawing unit for drawing an airflow in order to form the airflow channel between the intake vent-hole and the exhaust vent-hole, a control module for controlling the airflow drawing unit, and a power module. The filter is detachably arranged at the intake end and used for filtering dust in the air sucked by the airflow drawing unit. The dust collector apparatus of the present invention allows the dust particles to be properly collected by the filter without secondary scattering, and guides the airflow to be exhausted smoothly.

A dust collector apparatus includes a housing, an airflow generation module and a filter. The housing has one side formed at least one intake vent-hole and another side formed of at least one exhaust vent-hole. An inner side of the housing has an airflow channel formed between the intake vent-hole and the exhaust vent-hole. The airflow generation module comprises an airflow drawing unit for drawing an airflow in order to form the airflow channel between the intake vent-hole and the exhaust vent-hole, a control module for controlling the airflow drawing unit, and a power module. The filter is detachably arranged at the intake end and used for filtering dust in the air sucked by the airflow drawing unit. The dust collector apparatus of the present invention allows the dust particles to be properly collected by the filter without secondary scattering, and guides the airflow to be exhausted smoothly.

A combined electric tool coordination system includes a main tool (4) and an auxiliary tool (1). The main tool (4) and the auxiliary tool (1) coordinate for working. A load detection module (E1) is used to detect a load parameter that is generated when the main tool (4) operates, and send the load parameter to a central control module (E2). The central control module (E2) adjusts output power of the auxiliary tool (1). The central control module (E2) controls power of the auxiliary tool (1) to increase as the load parameter of the main tool (4) increases and decrease as the load parameter decreases. An automatic adjustment function of the auxiliary tool (1) is applied to a dust collector (1). When power of the main tool (4) increases, more dust and scraps are generated, suction of the dust collector (1) is automatically adjusted to be higher, and the demand of a large quantity of dust is satisfied; and when the power of the main tool (4) decreases, less dust and scraps are generated, power of the dust collector (1) automatically decreases, the suction is reduced, and the demand of a small quantity of dust is satisfied.

To provide a dust collection deburring apparatus which is capable of performing efficient and preferable debarring work and which is capable of, even in the case of handing a large workpiece, performing preferable deburring work by placing the workpiece together with a pallet on a work table by a forklift. A dust collection deburring apparatus A includes a work table apparatus configured to allow a product together with a pallet to be placed on and allow a worker to perform deburring work, a chip antiscattering apparatus arranged so as to surround the work table apparatus and configured to prevent scattering of chips, and a chip suction collection apparatus including a dust collecting device configured to suck air from an internal space surrounded by the chip antiscattering apparatus to suck the chips generated in the deburring work.

Provided is a chemical-mechanical polishing composition comprising an abrasive, a basic component, at least one compound selected from the group consisting of a quaternary polyammonium salt, a quaternary ammonium salt having 6 or more carbon atoms, and an alkylated polymer having an amide structure, and an aqueous carrier; a rinse composition comprising the at least one compound and an aqueous carrier, as well as a method of chemically-mechanically polishing a substrate, and a method of rinsing a substrate, in which the respective compositions are used.

An abrasive article having a plurality of apertures arranged in a non-uniform distribution pattern, wherein the pattern is spiral or phyllotactic, and in particular those patterns described by the Vogel equation. Also, provided is a back-up pad having a spiral or phyllotactic patterns of air flow paths, such as in the form of open channels. The back-up pad can be specifically adapted to correspond with an abrasive article having a non-uniform distribution pattern. Alternatively, the back-up pad can be used in conjunction with conventional perforated coated abrasives. The abrasive articles having a non-uniform distribution pattern of apertures and the back-up pads can be used together as an abrasive system.