A robotic repair unit (400) is presented that includes a removal tool (330, 425) coupled tot he robotic repair unit (400). The removal tool (330, 425) is configured to remove fluid or debris from a worksurface (130). The repair unit (400) also includes a controller (150) configured to control the robotic repair unit (400).

A robotic repair unit (400) is presented that includes a removal tool (330, 425) coupled tot he robotic repair unit (400). The removal tool (330, 425) is configured to remove fluid or debris from a worksurface (130). The repair unit (400) also includes a controller (150) configured to control the robotic repair unit (400).

A pipe coating removal apparatus (1) for removing all or some of the coating on a pipe, the pipe coating removal apparatus (1) having a pipe support means (2) for supporting a length of pipe. and further having a tool carriage (3). The tool carriage (3) being capable of supporting two or more different types of pipe coating removal tools (4), (5), (6), (7), (8), (80), (81), (82) and/or (70). The pipe coating removal apparatus (1) being capable of causing relative movement between the tool carriage (3) and the pipe support means (2) to remove all or some of the coating on the pipe that is supportable by the pipe support means (2).

A pipe coating removal apparatus (1) for removing all or some of the coating on a pipe, the pipe coating removal apparatus (1) having a pipe support means (2) for supporting a length of pipe. and further having a tool carriage (3). The tool carriage (3) being capable of supporting two or more different types of pipe coating removal tools (4), (5), (6), (7), (8), (80), (81), (82) and/or (70). The pipe coating removal apparatus (1) being capable of causing relative movement between the tool carriage (3) and the pipe support means (2) to remove all or some of the coating on the pipe that is supportable by the pipe support means (2).

A removing apparatus includes a table, multiple chucks, a nozzle and a table cover. The table is horizontally provided and configured to be rotated around a vertical rotation center line. The multiple chucks are disposed at a distance therebetween around the rotation center line of the table. The nozzle is configured to supply a processing liquid to a substrate held by the chuck. The table cover is configured to receive the processing liquid from above the table. The table cover has an inclined member of a conical shape having a decreasing height as the inclined member goes away from the rotation center line of the table while having a constant height in a rotation direction.

In a substrate polishing apparatus where a polishing liquid passes through inside a rotary joint, the rotary joint requires maintenance. There is provided a substrate polishing apparatus that includes: a polishing head for holding a substrate; a rotary table that has a surface to which a first opening portion is provided; a polishing liquid discharge mechanism disposed to the rotary table; and a controller configured to control at least the polishing liquid discharge mechanism. The polishing liquid discharge mechanism includes a first cylinder, a first piston, and a driving mechanism that drives the first piston. The first opening portion is communicated with a liquid holding space defined by the first cylinder and the first piston. The controller controls the driving of the first piston by the driving mechanism to increase and decrease a volume of the liquid holding space.

A sanding automation system for removing a surface defect of an exterior component includes a first robot for generating an inspection mark of a certain pattern on an exterior component with uniform pressure through an inspection mark tool to secure visibility of a surface defect, a vision system for analyzing an image of the exterior component photographed through at least one vision sensor and recognizing a surface defect marking position and a surface defect depth level displayed on the exterior component on which the inspection mark is generated, and a second robot for removing the surface defect by sequentially moving a sanding tool to at least one of the surface defect marking positions and performing a sanding operation with the set amount of sanding according to a corresponding surface defect depth level.

A sanding automation system for removing a surface defect of an exterior component includes a first robot for generating an inspection mark of a certain pattern on an exterior component with uniform pressure through an inspection mark tool to secure visibility of a surface defect, a vision system for analyzing an image of the exterior component photographed through at least one vision sensor and recognizing a surface defect marking position and a surface defect depth level displayed on the exterior component on which the inspection mark is generated, and a second robot for removing the surface defect by sequentially moving a sanding tool to at least one of the surface defect marking positions and performing a sanding operation with the set amount of sanding according to a corresponding surface defect depth level.

A processing apparatus includes a holder configured to hold a processing target object; a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner; and an exterior cover accommodating the holder and the processing mechanism therein. The exterior cover includes an entrance opening through which a replacing apparatus configured to replace the processing tool passes when advancing to an inside of the exterior cover from an outside thereof. The processing apparatus further includes a shutter configured to open or close the entrance opening of the exterior cover.

A processing apparatus includes a holder configured to hold a processing target object; a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner; and an exterior cover accommodating the holder and the processing mechanism therein. The exterior cover includes an entrance opening through which a replacing apparatus configured to replace the processing tool passes when advancing to an inside of the exterior cover from an outside thereof. The processing apparatus further includes a shutter configured to open or close the entrance opening of the exterior cover.