An articulated boom assembly comprises a base and a primary boom arm extending from the base. There is a power system for actuating the primary boom arm between an extended position and a retracted position. There is an attachment operatively connected to the primary boom arm which supports a nozzle. The attachment may include an actuating mechanism for reciprocating the nozzle along the length of the attachment.

Implementations of the present disclosure generally relate to planarization of surfaces on substrates and on layers formed on substrates, including an apparatus for in-situ temperature control during polishing, and methods of using the same. More specifically, implementations of the present disclosure relate to in-situ temperature control with a condensed gas during a chemical-mechanical polishing (CMP) process. In one implementation, the method comprises polishing one or more substrates against a polishing surface in the presence of a polishing fluid during a polishing process to remove a portion of a material formed on the one or more substrates. A temperature of the polishing surface is monitored during the polishing process. Carbon dioxide snow is delivered to the polishing surface in response to the monitored temperature to maintain the temperature of the polishing surface at a target value during the polishing process.

A method of cleaning a collector of an extreme ultraviolet light source system includes introducing the collector separated from the extreme ultraviolet light source system into a chamber; capturing an optical image of a reflective surface of the collector; measuring a contamination level of the reflective surface by comparing the optical image with a prestored standard image; performing a first cleaning operation if the contamination level exceeds a preset first reference value, the first cleaning operation including cleaning the reflective surface by spraying dry ice particles onto the reflective surface; and performing a second cleaning operation if the contamination level is less than or equal to the preset first reference value. The second cleaning operation includes cleaning the reflective surface by radiating atmospheric plasma onto the reflective surface and measuring a microcontamination level and a damage level of the reflective surface.

Provided is a water jet peening apparatus and a water jet peening method including: a clamping cylinder (201) which is able to be disposed at the outer peripheral side of an instrumentation nozzle (83) with a predetermined gap therebetween; a clamping piece (210) which is able to fix the clamping cylinder (201) to the instrumentation nozzle (83); a nozzle guide (221) which has a cylindrical shape, is provided inside the clamping cylinder (201), and is positioned to a position adjacent to the upper end of the instrumentation nozzle (83); an inner surface WJP nozzle (105) which is movable upward and downward inside the nozzle guide (221); and a drainage hole (224) which radially penetrates the nozzle guide (221). Accordingly, it is possible to improve the safety of the operation by preventing a thimble tube from being popped out due to a water jet peening operation.

According to one embodiment, there is provided a substrate processing apparatus including a processing unit and a manipulator. The processing unit processes a substrate. The manipulator is for maintenance. The manipulator is placed near the processing unit.

A system is provided for performing a cleaning process of a component of a vehicle. The system includes a first cleaning applicator configured to deliver a cleaning agent to a first surface of the component of the vehicle, a second cleaning applicator configured to deliver the cleaning agent to a second surface of the component of the vehicle, a third cleaning applicator configured to deliver the cleaning agent to a third surface of the component of the vehicle, and a control unit configured to instruct each of the first, second, and third cleaning applicators to project the cleaning agent onto the respective surface of the component for a corresponding predetermined period. The first, second, and third applicators are instructed to project the cleaning agent in a predetermined sequence.

A device for reducing the size of dry ice granules for dry ice cleaning devices including a supply of dry ice to a device for mixing of dry ice particles with the flow of gaseous medium. The device includes a die with a set of orifices for granulate passing and a granulate pushing-through member for pushing the granulate into the die. The die is placed in a body with at least one sloped surface inclining to the inside of the body towards the die, which, the body, is connectable to a supply of dry ice granulate to a device for mixing of dry ice particles with the flow of gaseous medium in a dry ice cleaning device, where above the die a granulate pushing-through member is movably mounted. The pushing-through member includes at least one surface facing the die, where this surface forms an acute angle with the die surface, and the orifices of the die at the side of the pushing-through member are provided with a recess or shape modification of the edge of the orifice increasing the roughness of the surface of the die relative to the roughness of the surface of the pushing-through member.

A method for cleaning using solid carbon dioxide is provided. Adhesive surfaces of the vehicle components are cleaned automatically in an assembly line including several work stations. The adhesive surfaces of the vehicle components may be adhesive surfaces of coated or painted vehicle components. The vehicle components may be composed of a metal alloy such as a steel or aluminum alloy, and/or composed of a fiber composite material such as carbon-fiber-reinforced plastic. The adhesive surfaces of the vehicle components may be cleaned with specifically adapted cleaning parameters.

Included are methods and systems for recycling a gas emitted from non-aqueous cleaning. An example method includes contacting a contaminated equipment with a non-aqueous cleaning material; wherein the spent non-aqueous cleaning material emits the gas. The method further comprises capturing the emitted gas, filtering the emitted gas, and recycling the emitted gas into the non-aqueous cleaning material.

An ice blasting system comprising a hopper to receive bulk ice and a rotary crusher disposed inside the hopper, the rotary crusher having rotary crusher arms that cooperate with anvils to produce crushed ice from the bulk ice. The system includes a rotary feeder mechanism disposed below the hopper, the rotary feeder mechanism having a rotor that includes ice-receiving pockets for receiving the crushed ice. The rotor rotates against an airtight seal block and delivers the crushed ice into a high-pressure airstream passing through the rotary feeder mechanism to thereby entrain the crushed ice into the high-pressure airstream whereby the ice-entrained airstream subsequently exits the ice blasting system through an outlet.