The invention relates to an apparatus for producing, in particular high-strength, CO.sub.2 pellets from CO.sub.2 snow, in particular for a cleaning appliance for blasting surfaces to be treated with a mixed stream of a pressurized gas and CO.sub.2 pellets, wherein the apparatus comprises a compressing device for compressing CO.sub.2 snow to form CO.sub.2 pellets and a delivery device for delivering the CO.sub.2 pellets into a pressurized gas stream, wherein the apparatus comprises a fluid mechanical transfer device for conveying CO.sub.2 pellets from the compressing device to the delivery device and wherein the transfer device is arranged or formed between the compressing device and the delivery device.

Furthermore, an improved cleaning appliance and an improved method for producing CO.sub.2 pellets from CO.sub.2 snow are proposed.

Dry ice container for dry ice cleaning devices comprises the container for dry ice closed by the lid (2) on the upper side, and provided by the opening (3) for drawing out dry ice pellets on the lower side. The container (1) has the bottom (4) sloped towards the opening (3) for drawing out the pellets. The linear-movable member (5) is arranged in the chamber (6) at the bottom (4) of the container (1) transversely to the axis of the container (1). The member (5) has the shape of a gutter in which groups of separated openings (5a, 5b, 5c) are provided, to which at least one pellets plowing element (5d) is placed in the member (5). Each group of openings (5a, 5b, 5c) pertains to one opening (3) for drawing out the pellets.

A method and apparatus entrain particles in a flow of blast fluid from a flow of transport fluid with particles entrained therein, in which an effectual amount of the transport fluid is vented or extracted prior to the entrainment of the particles in the flow of blast fluid.

Method of cleaning a first material from a plasma processing apparatus, comprising: subjecting the plasma processing apparatus to a jet of a second material so as to remove the first material from the plasma processing apparatus; mixing the removed first material with a third material configured to dissipate the first material therein.

An apparatus for outputting a solid material entrained in a fluid, the apparatus comprising a receptacle for receiving the solid material, an input for the fluid, an output for solid material, an auger for transporting the solid material from the receptacle to the output, a motor for driving the auger, wherein the motor comprises one or more cylinders each comprising a piston, a second input connected to the input so as to feed part of the fluid to the cylinders, where a cross section of a piston is at least 700 mm.sup.2 or wherein a drive transforming the reciprocating movement of each piston, relative to the cylinder, to rotation of the auger around the first axis, is configured to rotate the auger at least 20 degrees when a cylinder completes a cycle.

A nozzle unit is configured to inject a liquefied fluid which evaporates after injection, and includes a tubular portion which has a base portion and a distal end portion and in which a flow path configured to guide the liquefied fluid to a part including the distal end portion and the base portion is formed, the distal end portion having an injection opening and being bent or curved and connected to the base portion.

Methods of cleaning flow path components of power systems, and sump purge kits used in the same or related methods are disclosed. A method of cleaning may include removing a casing of the turbine system to expose a rotor of the turbine system, a plurality of flow path components coupled to the rotor and/or the casing, and a sump system in communication with the rotor. The method may also include pressurizing the sump system in communication with the rotor, and sealing a plurality of openings formed in the rotor. Additionally, the method may include exposing the rotor and the plurality of flow path components to steam to dry hydrocarbons formed on a surface of the rotor and a surface of the plurality of flow path components, and blasting the rotor and the plurality of flow path components with solid carbon dioxide (CO.sub.2) to dislodge the dried hydrocarbons.

Methods for treating texturized surfaces of sputter targets in order to improve adhesion and retention of deposited particles thereon. The target surfaces may first be texturized by a precursor texturizing method such as bead blasting, grit blasting, plasma spraying, or a twin-wire-arc spraying (TWAS) method. The thus textured surface is then sprayed or blasted with ice particles to form an optimized textured surface. The ice particles may comprise sublimable particles such as frozen carbon dioxide or dry ice. Also, argon may be used as exemplary ice particles.

A method includes transferring a wafer into a first process chamber of a cluster tool; performing a first process to the wafer in the first process chamber; transferring the wafer from the first process chamber to a second process chamber of the cluster tool after performing the first process; cleaning the first process chamber; performing a second process to the wafer in the second process chamber during cleaning the first process chamber.

An electrostatic spray application apparatus and method for producing an electrostatically charged and homogeneous CO.sub.2 composite spray mixture containing an additive and simultaneously projecting at a substrate surface. The spray mixture is formed in the space between CO.sub.2 and additive mixing nozzles and a substrate surface. The spray mixture is a composite fluid having a variably-controlled aerial and radial spray density comprising pressure- and temperature-regulated propellant gas (compressed air), CO.sub.2 particles, and additive particles. There are two or more circumferential and high velocity air streams containing passively charged CO.sub.2 particles which are positioned axis-symmetrically and coaxially about an inner and lower velocity injection air stream containing one or more additives to form a spray cluster. The axis-symmetrical CO.sub.2 particle-air streams are passively tribocharged during formation, and the spray clustering arrangement creates a significant electrostatic field and Coanda air mass flow between and surrounding the coaxial flow streams.