The object of the present invention is to provide a grinding tool capable of continuing machining in a dry state and of being manufactured in a short time and at low cost, and a manufacturing method therefor. For said purpose, a grinding tool (10-1) for grinding a workpiece includes a threaded helical groove (12) formed on an outer circumferential surface of a cylindrical metal head portion (10b), ridgetop surfaces that result from the formation of the helical groove (12) and are formed so as to protrude with a trapezoidal cross-sectional shape, and abrasive grain surfaces (18) formed by winding an insulating resin rope in the helical groove (12) to mask the inside of the helical groove (12) and fixing abrasive grains on the ridgetop surfaces. A helix angle of the helical groove (12) with respect to an axial direction of the grinding tool (10-1) is set to be at least 80 and less than 90.

The object of the present invention is to provide a grinding tool capable of continuing machining in a dry state and of being manufactured in a short time and at low cost, and a manufacturing method therefor. For said purpose, a grinding tool (10-1) for grinding a workpiece includes a threaded helical groove (12) formed on an outer circumferential surface of a cylindrical metal head portion (10b), ridgetop surfaces that result from the formation of the helical groove (12) and are formed so as to protrude with a trapezoidal cross-sectional shape, and abrasive grain surfaces (18) formed by winding an insulating resin rope in the helical groove (12) to mask the inside of the helical groove (12) and fixing abrasive grains on the ridgetop surfaces. A helix angle of the helical groove (12) with respect to an axial direction of the grinding tool (10-1) is set to be at least 80 and less than 90.

A grindstone tool is provided with a shaft part which has a tubular shape having a connection hole therein, a head part which has a cylindrical shape coaxially and integrally connected to the leading end of the shaft part and having a hollow section therein, and abrasive grains which adhere to the entire outer peripheral surface of the head part via a bonding material. A grinding fluid is supplied to the hollow section of the head part from one end side of the head part, the other end side of the head part is blocked by a lid member, and in the head part, a plurality of communication holes through which the hollow section and the outer peripheral surface communicate with each other, and which each have a taper shape with a diameter size on the outer peripheral surface side larger than a diameter size of the shaft center side are formed.

A grindstone tool is provided with a shaft part which has a tubular shape having a connection hole therein, a head part which has a cylindrical shape coaxially and integrally connected to the leading end of the shaft part and having a hollow section therein, and abrasive grains which adhere to the entire outer peripheral surface of the head part via a bonding material. A grinding fluid is supplied to the hollow section of the head part from one end side of the head part, the other end side of the head part is blocked by a lid member, and in the head part, a plurality of communication holes through which the hollow section and the outer peripheral surface communicate with each other, and which each have a taper shape with a diameter size on the outer peripheral surface side larger than a diameter size of the shaft center side are formed.

The present invention includes methods and materials for cleaning materials, particles, or chemicals from a substrate with a brush or pad. The method comprising: engaging a surface of a rotating wafer with an outer circumferential surface of a rotating cylindrical foam roller, the cylindrical foam roller having a plurality of circumferentially and outwardly extending spaced apart nodules extending from the outer surface, each nodule defining a height extending from the outer surface of the cylindrical foam roller to a substrate engagement surface of the nodule, the substrate engagement surface of one or more of the nodules having a rounded configuration; and positioning the cylindrical foam roller on the substrate such that the one or more nodules are positioned to have only the rounded substrate engagement surface contact the substrate such that no linear surface of the one or more nodules contacts the substrate.

The present invention includes methods and materials for cleaning materials, particles, or chemicals from a substrate with a brush or pad. The method comprising: engaging a surface of a rotating wafer with an outer circumferential surface of a rotating cylindrical foam roller, the cylindrical foam roller having a plurality of circumferentially and outwardly extending spaced apart nodules extending from the outer surface, each nodule defining a height extending from the outer surface of the cylindrical foam roller to a substrate engagement surface of the nodule, the substrate engagement surface of one or more of the nodules having a rounded configuration; and positioning the cylindrical foam roller on the substrate such that the one or more nodules are positioned to have only the rounded substrate engagement surface contact the substrate such that no linear surface of the one or more nodules contacts the substrate.

There is described a grinding wheel (1), particularly for grinding operations carried out on sheets of glass (2), ceramic material or similar materials, comprising a disc-shaped support with abrasive material arranged on the circumferential profile of the support, and an opposing central hole (3) for attachment to a drive shaft (4) of the grinding wheel. The disc-shaped support comprises a pair of opposed disc-shaped grinding wheel bodies (5, 6) coupled in a facing position so as to define together the abrasive grinding surface (5c, 6c) along the circumferential profile, and each of the disc-shaped bodies (5, 6) has a predetermined resilience such that the disc-shaped bodies (5, 6) can be flexed away from each other in the zone of contact with the component being ground, for the purpose of consequently applying pressure to the component in the grinding operation.

There is described a grinding wheel (1), particularly for grinding operations carried out on sheets of glass (2), ceramic material or similar materials, comprising a disc-shaped support with abrasive material arranged on the circumferential profile of the support, and an opposing central hole (3) for attachment to a drive shaft (4) of the grinding wheel. The disc-shaped support comprises a pair of opposed disc-shaped grinding wheel bodies (5, 6) coupled in a facing position so as to define together the abrasive grinding surface (5c, 6c) along the circumferential profile, and each of the disc-shaped bodies (5, 6) has a predetermined resilience such that the disc-shaped bodies (5, 6) can be flexed away from each other in the zone of contact with the component being ground, for the purpose of consequently applying pressure to the component in the grinding operation.

A diffusion plate includes a plate member facing an opening end of a supply pipe with a thickness direction thereof substantially parallel with a supply direction of a supply fluid. The plate member is rotatable around a rotation axis substantially parallel with the thickness direction and has a diffusion hole, penetrating in the thickness direction at a position other than a rotation center of the plate member. The diffusion hole has a wall surface defined at a rear side in a rotation direction and has a first wall surface end defined in a facing surface facing the supply pipe, at a rearmost in the rotation direction and a second wall surface end defined in a non-facing surface at a rearmost in the rotation direction. The wall surface is inclined with the first wall surface end being at a front side of the second wall surface end in the rotation direction.

A diffusion plate includes a plate member facing an opening end of a supply pipe with a thickness direction thereof substantially parallel with a supply direction of a supply fluid. The plate member is rotatable around a rotation axis substantially parallel with the thickness direction and has a diffusion hole, penetrating in the thickness direction at a position other than a rotation center of the plate member. The diffusion hole has a wall surface defined at a rear side in a rotation direction and has a first wall surface end defined in a facing surface facing the supply pipe, at a rearmost in the rotation direction and a second wall surface end defined in a non-facing surface at a rearmost in the rotation direction. The wall surface is inclined with the first wall surface end being at a front side of the second wall surface end in the rotation direction.