A processing apparatus includes a holding table and a processing unit. The processing unit includes a spindle unit having a spindle and a housing in which the spindle is rotatably supported. The processing unit is connected to a spindle temperature adjusting unit for adjusting the temperature of the spindle unit to a predetermined temperature. The spindle temperature adjusting unit includes a circulation route through which a cooling liquid to be introduced into the housing circulates and a heat exchanger connected to the circulation route. The heat exchanger is supplied with a processing liquid, to lower the temperature of the cooling liquid flowing in the circulation route with the processing liquid and increase the temperature of the processing liquid with the cooling liquid.

A processing apparatus includes a holding table and a processing unit. The processing unit includes a spindle unit having a spindle and a housing in which the spindle is rotatably supported. The processing unit is connected to a spindle temperature adjusting unit for adjusting the temperature of the spindle unit to a predetermined temperature. The spindle temperature adjusting unit includes a circulation route through which a cooling liquid to be introduced into the housing circulates and a heat exchanger connected to the circulation route. The heat exchanger is supplied with a processing liquid, to lower the temperature of the cooling liquid flowing in the circulation route with the processing liquid and increase the temperature of the processing liquid with the cooling liquid.

A floor polishing armature including an inner ring having an inner ring upper surface and an inner ring lower surface, an outer ring, spokes extending between the inner ring and the outer ring, a disc retainer formed on the outer ring, a spoke opening extending from the inner ring upper surface to the inner ring lower surface, and a disc insert retained in the disc retainer. The disc is insert adapted for floor treatment. The spoke opening extends to the disc retainer. The disc insert is released by pressing through the spoke opening. Optionally, airflow openings are formed between the spokes. Spoke indents are preferably formed on an underside of the spokes between the inner ring and the disc retainer. The disc inserts and the arc inserts are both retained by interference fit.

A grinding tool for grinding an engine includes a main body with a central coupling region for connecting to a rotary drive of a grinding machine, the main body having a substantially rotationally symmetrical configuration with respect to an axis of rotation. The grinding tool also includes a grinding layer on the main body that extends over an outer circular ring zone of the main body, at least one feed for a cooling fluid, and a substantially circular cover plate arranged substantially normal to the axis of rotation and forming an axial gap on the main body. The axial gap is in fluid communication with the feed and the grinding layer so that a cooling fluid fed by the feed can be passed via the axial gap to the grinding layer.

A grinding tool for grinding an engine includes a main body with a central coupling region for connecting to a rotary drive of a grinding machine, the main body having a substantially rotationally symmetrical configuration with respect to an axis of rotation. The grinding tool also includes a grinding layer on the main body that extends over an outer circular ring zone of the main body, at least one feed for a cooling fluid, and a substantially circular cover plate arranged substantially normal to the axis of rotation and forming an axial gap on the main body. The axial gap is in fluid communication with the feed and the grinding layer so that a cooling fluid fed by the feed can be passed via the axial gap to the grinding layer.

A grinding tool for grinding an engine includes a main body with a central coupling region for connecting to a rotary drive of a grinding machine, the main body having a substantially rotationally symmetrical configuration with respect to an axis of rotation. The grinding tool also includes a grinding layer on the main body that extends over an outer circular ring zone of the main body, at least one feed for a cooling fluid, and a substantially circular cover plate arranged substantially normal to the axis of rotation and forming an axial gap on the main body. The axial gap is in fluid communication with the feed and the grinding layer so that a cooling fluid fed by the feed can be passed via the axial gap to the grinding layer.

Provided are a roll polishing rotary grinding stone and a roll polishing device and method which are configured to stably perform roll polishing without making the surface roughness of a surface to be processed non-uniform by preventing polishing debris to be generated during polishing from being accumulated in a recess at a center of a polishing surface of the roll polishing rotary grinding stone body. The roll polishing rotary grinding stone includes: a rotary grinding stone body having a rotary shaft mounted on a back end face and a polishing surface formed on a front end face; and a recess formed at a center of the front end face of the rotary grinding stone body, the roll polishing rotary grinding stone being configured to perform vertical polishing with respect to a surface of a roll by bringing the polishing surface into contact with the surface of the roll, in which the recess is formed into a tapered recess in which an inner peripheral surface of the recess is increased in diameter from the back end face of the rotary grinding stone body toward the front end face of the rotary grinding stone body.

A grindstone that enables grinding, polishing, super-finish polishing by using the same grindstone, without clogging even if the grindstone is being used continuously, in which a grinding/polishing section for processing a workpiece has a honeycomb structure formed by arranging polygonal prisms with no clearance therebetween. The grindstone includes the grindstone columns consisting of abrasive grains and binder and having an axis in depth direction of grinding/polishing surface, which are disposed on intersections or wall portions of the honeycomb structure. Porous elastomer is disposed inside the honeycomb structure, thus making it possible to perform a super-finish polishing.

A grindstone that enables grinding, polishing, super-finish polishing by using the same grindstone, without clogging even if the grindstone is being used continuously, in which a grinding/polishing section for processing a workpiece has a honeycomb structure formed by arranging polygonal prisms with no clearance therebetween. The grindstone includes the grindstone columns consisting of abrasive grains and binder and having an axis in depth direction of grinding/polishing surface, which are disposed on intersections or wall portions of the honeycomb structure. Porous elastomer is disposed inside the honeycomb structure, thus making it possible to perform a super-finish polishing.

The present disclosure provides a wafer grinding device comprising: a chuck table to suction the wafer thereon, a grinding wheel to grind the wafer by a predetermined thickness, wherein the grinding wheel includes a grinding body, and grinding teeth arranged along and on a bottom outer periphery of the grinding body, wherein the grinding teeth are segmented; and a cooling unit at least partially extending along a region between a departure point of the grinding teeth from the wafer during rotation of the teeth, and a re-encounter point of the teeth with the wafer during rotation of the teeth, wherein the region extends along rotation path of the grinding teeth.