There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

To provide a method of processing a tempered glass in which a length of time required for manufacturing one plate of a product glass is significantly reduced while the quality of the product glass is secured. In the method of processing the tempered glass in which a stacked block (1a) acting as a chemical tempered glass (1) is processed by using a processing device (8) under a condition that the processing device (8) is rotated and vibrated, the stacked block (1a) is cut out from a stack (1A) acting as the chemical tempered glass (1) by using a dicing blade (84), prior to the processing of the stacked block (1a) by using the processing device (8), and a finishing to an outer periphery of the stacked block (1a) is also performed during the processing of the stacked block (1a) by using the processing device (8).

To provide a method of processing a tempered glass in which a length of time required for manufacturing one plate of a product glass is significantly reduced while the quality of the product glass is secured. In the method of processing the tempered glass in which a stacked block (1a) acting as a chemical tempered glass (1) is processed by using a processing device (8) under a condition that the processing device (8) is rotated and vibrated, the stacked block (1a) is cut out from a stack (1A) acting as the chemical tempered glass (1) by using a dicing blade (84), prior to the processing of the stacked block (1a) by using the processing device (8), and a finishing to an outer periphery of the stacked block (1a) is also performed during the processing of the stacked block (1a) by using the processing device (8).

A method of machining a turbine shroud segment including inserting an annular flange of a grinding wheel through a first gap defined between the shroud retention elements and into a second gap defined between the shroud platform and an axially extending, radially inwardly facing arcuate inner surface of one of the retention elements. The wheel flange is inserted with its supporting leg and the wheel body remaining out of contact with the shroud segment and with the wheel flange remaining out of contact with the platform. The inner surface is ground through contact with an annular outer grinding surface of the wheel flange. The wheel leg and body remain out of contact with the shroud segment and the wheel flange remains out of contact with the platform during grinding.

A method of machining a turbine shroud segment including inserting an annular flange of a grinding wheel through a first gap defined between the shroud retention elements and into a second gap defined between the shroud platform and an axially extending, radially inwardly facing arcuate inner surface of one of the retention elements. The wheel flange is inserted with its supporting leg and the wheel body remaining out of contact with the shroud segment and with the wheel flange remaining out of contact with the platform. The inner surface is ground through contact with an annular outer grinding surface of the wheel flange. The wheel leg and body remain out of contact with the shroud segment and the wheel flange remains out of contact with the platform during grinding.

Methods and systems are provided for design and manufacture of a non-metallic polishing tool capable of polishing different surfaces and achieving a smooth and shiny finish. The polishing tool comprises an abrasive coated base surface, and a plurality of engravings in the base surface, forming cylindrical pillars. The pillars are arranged in concentric circular patterns to provide uniform polish and shine on a target material.

Methods and systems are provided for design and manufacture of a non-metallic polishing tool capable of polishing different surfaces and achieving a smooth and shiny finish. The polishing tool comprises an abrasive coated base surface, and a plurality of engravings in the base surface, forming cylindrical pillars. The pillars are arranged in concentric circular patterns to provide uniform polish and shine on a target material.

There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

A high-rotational speed cup-shaped grinding wheel includes an annular base, several blades and a flow splitting structure. The blades are fixed on a side of the base at an interval in a circumferential direction to form a blade ring. The side of the blade ring away from the base forms an annular working surface, and two adjacent blades are spaced apart from each other to form a water passage channel for delivering cooling water to the working surface. The flow splitting structure is fixed on the blade ring and splits the cooling water into two branches, where a first branch delivers the cooling water to an outer area of the working surface, and a second branch delivers the cooling water to an inner area of the working surface, and then delivers the cooling water from an inner area of the working surface to an outer side area thereof.

A high-rotational speed cup-shaped grinding wheel includes an annular base, several blades and a flow splitting structure. The blades are fixed on a side of the base at an interval in a circumferential direction to form a blade ring. The side of the blade ring away from the base forms an annular working surface, and two adjacent blades are spaced apart from each other to form a water passage channel for delivering cooling water to the working surface. The flow splitting structure is fixed on the blade ring and splits the cooling water into two branches, where a first branch delivers the cooling water to an outer area of the working surface, and a second branch delivers the cooling water to an inner area of the working surface, and then delivers the cooling water from an inner area of the working surface to an outer side area thereof.