A method of fabricating a polishing pad using an additive manufacturing system includes receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection. The desired shape defines a profile including a polishing surface and one or more grooves on the polishing pad. Data indicative of a modified pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive manufacturing system, and a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the modified pattern.

A method of additive manufacturing includes dispensing successive layers of feed material to form a polishing pad, and directing first and second radiation beams toward the layers of feed material to form a polishing pad. Dispensing each successive layer of the layers of feed material includes dispensing a drop of feed material, and directing the first and second radiation beams toward the layers of feed material includes, for each successive layer, directing the first radiation beam toward the drop of feed material to cure an exterior surface of the drop of feed material, and directing the second radiation beam toward the drop of feed material to cure an interior volume of the drop of feed material.

The present disclosure provides methods of making a vitreous bond abrasive article and a metal bond abrasive article. The methods include sequential steps. Step a) includes a subprocess including sequentially: i) depositing a layer of loose powder particles in a confined region; and ii) selectively applying heat via conduction or irradiation, to heat treat an area of the layer of loose powder particles. The loose powder particles include abrasive particles and organic compound particles, as well as vitreous bond precursor particles or metal particles. The layer of loose powder particles has substantially uniform thickness. Step b) includes independently carrying out step a) a number of times to generate an abrasive article preform comprising the bonded powder particles and remaining loose powder particles. Step c) includes separating remaining loose powder particles from the abrasive article preform. Step d) includes heating the abrasive article preform to provide the vitreous bond abrasive article comprising the abrasive particles retained in a vitreous bond material, or to provide the metal bond abrasive article. A method of making a metal bond abrasive optionally includes infusing an abrasive article preform with a molten lower melting metal and solidifying the molten lower melting metal to provide the metal bond abrasive article. The present disclosure further provides a vitreous bond abrasive article precursor and a metal bond abrasive article precursor.

A system is provided. The system includes a 3D printer, which includes a first dispenser and a second dispenser. The first dispenser is configured to apply conductive material to a surface, and the second dispenser is configured to apply conductive diamonds to a surface. The conductive material includes a mixture of an elastomer and at least one of nickel and silver, and the conductive diamonds are between 1 and 10 microns in size.

An additive manufacturing apparatus for forming a polishing pad for chemical mechanical polishing includes a platform, an actuator system coupled to the platform to adjust a tilt of the platform, one or more printheads supported above the platform, the one or more printheads configured to dispense successive layers of feed material on the platform to be form the polishing pad, a sensing system to detect a height of a surface on or above the platform at each of a plurality of horizontally spaced points, and a controller configured to selectively operate the actuator system to adjust the tilt of the platform based on the detected height of the platform at each of the points such that the surface is moved closer to horizontal.

This invention is ablut a blade-like polisher and its manufacturing method. Benefits of the invention include melting-resistance of weldments, low welding temperature, mitigated deformation, reduced effects of oxidized film on welding, low power consumption, easy operation, rapidity and high efficiency.

A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material.

A rotary abrasive machining tool (101) is shown. The tool comprises a hub (103) having plurality of axially-oriented radial slots in the outer circumference thereof, and plurality of abrasive segments each of which is located in a respective slot in the hub and which form an abrading surface (102). The abrasive segments comprise a tab for location in a slot in the hub, and an abrading edge defining a plurality of abrasive elements.

Tooling strips and tools for using tooling strips.

A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material.