A control device configured to control a robot including an articulated arm having a plurality of joints each provided with a motor and turned by driving of the motor and a base supporting the articulated arm includes: a temperature information obtaining unit configured to obtain temperature information about the plurality of joints; a joint specifying unit configured to specify one of the joints that requires cooling, based on the obtained temperature information about the plurality of joints; and a motor control unit configured to control the motor of each of the plurality of joints, wherein, when the joint specifying unit specifies one of the joints, the motor control unit controls the motor of at least one of the joints that is located on a side closer to the base from the specified joint so as to turn the joint on the base side for a given time.

A robotic force/torque (FT) sensor restricts the conduction of heat, generated by an attached tool, through the FT sensor body to a radial direction. Heat from the tool is channeled to the center of the FT sensor body by a thermally conductive member. Additionally, heat from the tool is insulated from portions of the FT sensor body other than its center by a thermally insulating member. Transducers, such as strain gages attached to the surfaces of deformable beams, are disposed at a substantially equal distance from the center of the FT sensor body. Accordingly, as heat conducts through the FT sensor body from the center radially outwardly, all transducers experience substantially equal thermal load at any given time. Embodiments of the present invention substantially eliminate thermal gradients across groups of transducers that are wired in differential circuit topologies, such as half-bridge or quarter-bridge, enhancing the ability of such circuits to reject a common-mode signal component caused by thermal changes to the FT sensor body or the transducers themselves. Elimination of thermal gradients in the FT sensor body, other than one in the radial direction, enhances the effectiveness of known temperature compensation techniques.

Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a substrate; and a cooling plate for controlling a temperature of the transporting unit, wherein the cooling plate is spaced apart from a side surface of the transporting unit and installed as a side wall, or is installed in close contact with the side surface of the transporting unit.

A robot includes a housing, a body frame disposed inside the housing, a driving motor provided at lower portion of the body frame, a driving wheel rotated by the driving motor and protruding downward of the housing, a control rack mounted to the body frame and positioned above the driving motor, an opening defined in the housing and positioned at a rear side of the control rack, the control rack being insertable into the opening, and a back cover covering the opening.

A vacuum transfer device includes: a main body including an arm unit with an internal mechanical part therein and a vacuum seal, and configured to transfer a high temperature substrate in a vacuum; a substrate holder connected to the main body to hold the substrate; a heat transport member provided on a surface of the main body and made of a material having a higher thermal conductivity than that of a material constituting the main body in a creeping direction to transport heat transferred from the substrate to the substrate holder; and a heat radiator configured to dissipate heat transported by the heat transport member.

Extension tools and methods of inserting extension tools within components are provided. For example, an extension tool has a proximal end and a distal end and comprises a plurality of sequentially arranged links moveable relative to one another and a support member defining the distal end and including a first wheel disposed at the distal end and a second wheel spaced apart from the first wheel. Additionally, or alternatively, an extension tool may comprise a plurality of windows defined in the plurality of sequentially arranged links. The windows are defined periodically along the plurality of sequentially arranged links such that a periodicity of the widows corresponds to a periodicity of a plurality of features of the component.

A cooling medium flow path structure according to the present disclosure is for use at a joint of a robot. The joint of the robot (101) includes an N-th link and an N+1-th link. A tubular projection (31c) extends from a first wall (31a) constituting the N-th link, and a motor (50) is located on the first wall (31a). The cooling medium flow path structure is annularly or tubularly shaped such that an inner peripheral surface (7b) of the cooling medium flow path structure is located outside an outer peripheral surface (5) of the motor (50). The cooling medium flow path structure includes an internal cooling medium flow path (71a) through which a cooling medium flows.

A robot including: a driving mechanism that drives a movable member with respect to a base; and a fan that cools the driving mechanism, wherein the driving mechanism is provided with a motor, and a reducer that is disposed between the base and the movable member and that moves the movable member with respect to the base by reducing the speed of the rotation of the motor, the motor and the reducer are disposed on either side of a securing plate that is secured to the base, the cooling fan is disposed on an opposite side from the securing plate with the motor interposed between the fan and the securing plate, a space in which a surface of the reducer is exposed is formed outside the reducer, and the securing plate is provided with a vent that is connected to the space by passing through the securing plate.

A method according to the present disclosure includes: (a) carrying out overexcitation of an electromagnetic brake; (b) controlling a fan cooling a control device in such a way that a power consumption of the fan becomes a first power consumption in an overexcitation period during which the overexcitation is carried out; and (c) controlling the fan in such a way that the power consumption of the fan becomes a second power consumption higher than the first power consumption, after the overexcitation period.

A mobile robot includes a driver configured to provide a traveling function, a body disposed at an upper side of the driver, a concave portion recessed inward from a surface of the body, a vent hole formed at an upper side of the concave portion, and a guide inclined surface formed at a lower side of the concave portion. During traveling of the mobile robot, the mobile robot induces inflow of air so that the body can be cooled.