Provided is a conveyance robot replacement apparatus used for replacing a conveyance robot installed in an atmosphere conveyance chamber of a semiconductor manufacturing apparatus in order to convey a substrate. The conveyance robot replacement apparatus includes a positioning unit configured to determine a position of the conveyance robot replacement apparatus with respect to the atmospheric conveyance chamber, a holding unit configured to suspend the conveyance robot to be supported, a guide portion configured to guide advancing and retreating into and from the atmospheric conveyance chamber of the holding unit by being engaged with the positioning unit, a position adjustment unit configured move the holding unit in each of the longitudinal direction, the horizontal direction, and the vertical direction to adjust a position of the holding unit, and a connecting component connectable to the holding unit as well as the conveyance robot.

Provided is an arm fixing device that includes: a bracket having close-contact surfaces that are brought into close contact with a mounting surface provided in a supporting member, and a mounting surface provided in an arm or a link for transmitting drive force to an arm, also having one of a screw hole or a through hole that is formed to penetrate each of the close-contact surfaces at a position corresponding to a position of the other of a screw hole or a through hole provided in each of the mounting surfaces, and bridged over the mounting surfaces such that each of the close-contact surfaces is brought into close contact with a corresponding one of the mounting surfaces; and a fastener that penetrates the through hole and is fastened to the screw hole.

A vacuum gripper (10) includes a suction element (12) and a wear detection device (22) for detecting a state of wear of the suction element. The wear detection device includes a wearing section (36) which is itself subject to wear as the suction element wears in normal use; a fluid channel (24), which interacts with the wearing section in such a way that, as a result of wear of the wearing section, a flow cross-section of the fluid channel is altered and/or a fluid flow through the fluid channel is released in the first place, and a sensor device (38) for detecting a pressure in the fluid channel and/or a fluid flow through the fluid channel.

A malfunction detection device compares detected data on a condition at a predetermined part of an apparatus with a threshold so as to determine a malfunction of the apparatus. The malfunction detection device varies the threshold in accordance with a type of a lubricant used for movable parts of the apparatus.

A tool for providing an electrical interface between a motor circuit analyzer having a plurality of motor circuit analyzer connection ports and an electrically operated machine having electrical devices and a multi-conductor cable comprising electrical wires connected to the electrical devices. The tool includes a plurality of tool connection ports configured to be electrically connected to motor circuit analyzer connection ports. The tool also includes a plurality of terminals configured to be electrically connected to the conductors of the multi-conductor cable, and a switching section configured to selectively electrically connect two of the plurality of tool connection ports to two of the plurality of terminals.

A horizontal articulated robot including a base; one or more arms, attached to the base so as to be capable of rotating horizontally; a ball screw spline shaft that is disposed at an end of the one or more arms and that supports a workpiece at one end of the ball screw spline shaft; a ball screw nut through which the ball screw spline shaft passes and which is driven; and two ball spline nuts configured to support the ball screw spline shaft passing through the ball spline nuts, respectively, on both sides of the ball screw nut interposed therebetween in a longitudinal axis direction. At least one of the ball spline nuts drives the ball screw spline shaft about the longitudinal axis with respect to the arms.

A lubricant injection system is provided, which includes a pedestal, a robotic arm including a plurality of arm bodies sequentially coupled from pedestal, lubricant injecting hand having a discharge part configured to be sequentially coupled to each of a plurality of filler ports of a target machine, robot control device configured to control operation of robotic arm, a lubricant pumping device in which pumping of lubricant is controlled, a lubricant pumping channel configured to lead lubricant from the lubricant pumping device to the discharge part, and a flow rate sensor provided to the lubricant pumping channel and configured to send the detected flow rate information to the robot control device. Robot control device calculates an injection quantity based on the flow rate information sent from flow rate sensor, and when calculated injection quantity reaches target injection quantity, robot control device controls to stop pumping of lubricant.

A machine assembly, such as a parts washer, includes an enclosure defining an interior and an exterior. A robot is disposed within an interior of the disclosure. The assembly includes a plurality of camrollers operatively connectable to a robot. The assembly also includes a rail extending from within the interior of the enclosure to the exterior of the enclosure for engaging with the plurality of camrollers.

A robot maintenance fixture includes: a fixture body removably attached to a robot mounted in a state of being suspended from a stand; a first hanger portion that can be disposed vertically above a position of the center of gravity of a working part of the robot, the working part being a part driven by an actuator on which maintenance is to be performed, the working part being in a state of being attached to the actuator, and with which the working part can be suspended from the fixture body with a first hanger member; and a second hanger portion that can be disposed vertically above a position of the center of gravity of the actuator in a state of being attached to the robot and with which the actuator can be suspended from the fixture body with a second hanger member.

A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.