An apparatus for supplying chemical liquid may include a gantry, a chemical liquid supply member providing a chemical liquid onto a substrate, and a moving device supporting the chemical liquid supply member and moving along the gantry. The moving device may include a moving member, load supporting members and absorbing members. The moving member may support one side of the chemical liquid supply member and may run over the gantry. The moving member may cover an upper face, a first side and a second side of the gantry. The load supporting members may support a load applied to the moving member and the gantry while maintaining a substantially constant distance between the moving member and the gantry. The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the gantry when the moving member deviates from a moving path provided by the gantry.

One aspect of the present disclosure provides a foot structure for a walking robot including a link configured to define a body, a buffer unit coupled to one end portion of the link and having a vacant space formed therein, and a pressure sensor provided in the link and configured to detect a change in pressure of air in the vacant space in the buffer unit.

A vibration reduction assembly (24) for reducing a magnitude of a vibration being transferred from a first component (14) (e.g. a robot assembly) to a second component (12) (e.g. a payload) includes a first vibration reduction system (30) and a second vibration reduction system (32). The first vibration reduction system (30) reducing vibration along a first axis that is oriented parallel with gravity. The second vibration reduction system (32) reducing vibration along a second axis that is orthogonal to the first axis. The first vibration reduction system (30) and the second vibration reduction system (32) are connected in series between the first component (14) and the second component (12).

Apparatus include a reaction mass and an actuator coupled to the reaction mass. The actuator is configured to couple to a payload and to move the reaction mass in response to a movement error of the payload to reduce the movement error of the payload. Robotic systems using actuated reaction masses, as well as related methods of reducing movement errors, are also disclosed.

A robot may include a robot frame having a bottom plate, and a rear caster and a wheel module disposed on the bottom plate, wherein the wheel module may include a link base mounted in the bottom plate to be spaced apart from the rear caster, a rotation damper mounted in the link base and having an elastic member accommodated therein, a front link connected to the rotation damper through a connecting shaft, a front caster mounted in a front portion of the front link, a drive motor mounted in a rear portion of the front link, and a drive wheel configured to be rotated by the drive motor.

A vibration reduction system includes a base, a carrier element, and a plurality of actuator systems extending between the base and the carrier element, the plurality of actuator systems arranged to apply forces to the carrier element in multiple axes to reduce vibration of the carrier element, each actuator system of the plurality of actuator systems including a pneumatic actuator and an electric actuator.

A hand 100 includes a first gripper 2 and a second gripper 5. The second gripper 5 grips a workpiece located on a predetermined axis E. The first gripper 2 includes two first fingers 21 that are opened and closed in a predetermined opening/closing direction. Each of the first fingers 21 includes a first part 22 including a distal end and a second part 23 including a proximal end, and is bent or curved such that the first part 222 moves between an interference position M1 at which an imaginary region X defined by projecting the first part 22 in the opening/closing direction A interferes with the axis E and a non-interference position M2 at which the imaginary region X does not interfere with the axis E.

A suction gripper head comprising at least one carrier and a soleplate (14) for resting against an item to be lifted, the soleplate being arranged in the bottom portion of the carrier. According to the invention, the head comprises a foam body (1) having a suction path arranged therein between the soleplate and an outlet orifice of the gripper head for connection to a suction block, the foam body thus acting on its own, over at least a portion of the path, to form the separation between air sucked through said path and the outside of the gripper head, such that the air that is being sucked comes directly into contact with the foam of the foam body.

A device for removing a framed wafer from a wafer tray is proposed, said wafer tray including an access for depositing or removing the framed wafer, wherein the deposited framed wafer has a front frame edge facing the access and the wafer tray includes at least one wafer tray edge contact element for abutting against the rear frame edge, comprising a wafer receptacle for receiving the framed wafer, the wafer receptacle being configured to hold the wafer perpendicular to the wafer plane and to remove it from the wafer tray in this manner and including at least one wafer receptacle edge contact element arranged and configured to abut against the front frame edge, and with a drive and control device configured to guide the wafer receptacle along a predetermined path of movement into the access to the wafer tray and out of it, wherein each wafer receptacle edge contact element is spring-mounted in the direction of the path of movement and the wafer receptacle is movable from a first position, in which each wafer receptacle edge contact element is located at a distance in front of the front frame edge, to a second position, in which each wafer receptacle edge contact element abuts against the front frame edge, the rear frame edge abuts against the wafer tray edge contact element and the spring mounting of each wafer receptacle edge contact element is compressed by a predetermined spring travel, and back. A method for removing a framed wafer from a wafer tray is also proposed.

A lightweight 4-degree-of-freedom leg mechanism of a bionic quadruped robot, which includes a hip-joint lateral-swing assembly, a thigh longitudinal-swing assembly and a shank longitudinal-swing assembly. The hip-joint lateral-swing assembly includes a hip-joint swing cylinder and an electro-hydraulic actuator. One end of the electro-hydraulic actuator and one end of the thigh longitudinal-swing assembly are respectively connected to the hip-joint swing cylinder via a connecting block. The other end of the electro-hydraulic actuator is hinged to a side of the thigh longitudinal-swing assembly. The other end of the thigh longitudinal-swing assembly is hinged to the shank longitudinal-swing assembly.