An imprinting apparatus for a roll-to-plate process includes a flexible master (105), a plate carrier (101) and a substrate (102). The flexible master is pressable upon the substrate during the imprinting process and the plate carrier holds the substrate. The plate carrier includes a compensating material (114). The compensating material is larger than the area of the substrate and boundaries of the substrate and boundaries of the compensating material do not touch.

Method for producing arrays of free standing, three dimensional structures on material surfaces by establishing contact with a template, moving the template and the surface in contact relative to one another, inducing an increase in viscosity such that the structures are self-supported, and removing the template, leaving a negative of the template geometry at the tip of the object.

An imprinting apparatus includes an imprinting platform, an imprinting roller, a transfer module and a lifting and pressing mechanism. The imprinting roller is disposed above the imprinting platform. The transfer module includes a transfer film, wherein the transfer film is located between the imprinting roller and the imprinting platform. The lifting and pressing mechanism is linked with the imprinting roller, wherein the lifting and pressing mechanism drives the imprinting roller to move along a normal direction of the imprinting platform and selectively pressurizes the imprinting roller.

A forming apparatus forms a formable material using a mold including a contact region to be brought into contact with the formable material on a substrate. The apparatus includes a controller configured to perform processing of bringing the contact region and the formable material on the substrate into contact with each other. The controller controls the processing so as to bring the mold and the substrate close to each other at a first relative speed and then bring the mold and the substrate close to each other at a second relative speed lower than the first relative speed, and controls switching from the first relative speed to the second relative speed so as to compensate a manufacturing error of the mold.

In an emboss fabrication apparatus, an emboss roll includes, on an outer periphery, a molded portion having a concavo-convex shape. A first backup roll sandwiches, together with the emboss roll, a base material. A first heating unit heats the first backup roll. A second backup roll sandwiches, together with the emboss roll, the base material. A contact unit is provided opposite to the emboss roll in a first range. The contact unit contacts a back face of the base material.

The present invention provides an information processing apparatus including a processing unit configured to perform a process of outputting information indicating a contact state between a mold and a composition on a substrate, wherein the processing unit obtains a plurality of points representing a contour shape of a portion where the mold and the composition on the substrate are in contact with each other while at least one process of a contact process and a mold releasing process is performed, and outputs the information indicating the contact state based on the plurality of points.

An imprint method provided herein includes the steps of: adding a soluble material to a master mold; solidifying the soluble material to form a soluble mold having a mold pattern; adhering a dissociable tape to the soluble mold to separate the soluble mold from the master mold; placing the soluble mold onto a polymer layer of a workpiece for imprint; applying a high temperature and a pressure to the soluble mold to allow the polymer layer having an imprint pattern corresponding to the mold pattern and solidification, and to dissociate the tape; and providing a solvent to dissolve the soluble mold to obtain an imprint workpiece having the imprint pattern.

An imprint apparatus includes an ejection device which ejects ejection material and a substrate stage which moves a substrate in a first direction and a second direction intersecting with the first direction. The imprint apparatus causes the ejection device to eject ejection material to the substrate while moving the substrate stage. At the time of ejecting ejection material to a second field adjacent to a first field in succession to an ejection to the first field in the first direction, the ejection device accepts an ejection start signal for the second field and determines an ejection start timing in the second field before ejection operation in the first field is completed.

A position detection apparatus comprises an obtaining unit that obtains an image of a moiré that occurs due to first and second diffraction gratings overlapping; and a processor configured to perform a periodic analysis of a luminance distribution of the obtained image of the moiré, obtain a phase measurement value of the luminance distribution, and obtain a relative positioning between the first and second diffraction gratings, wherein the processor determines a phase shift amount for making the obtained phase measurement value be a value outside of a predetermined range including a discontinuous part of the phase, and performs a phase shift to shift the obtained phase measurement value by the determined phase shift amount, and obtains the relative positioning based on the phase-shifted phase measurement value.

An imprint apparatus that transfers a pattern of a mold to an imprint material on a substrate, includes: a mold having a pattern region in which the pattern is formed; a substrate holding unit having a substrate mounting surface on which the substrate is mounted; a driving unit configured to drive the mold and press the mold against the substrate coated with an imprint material at three or more positions; and a control unit configured to control a pressing force of the driving unit based on a distance in an XY plane parallel to the substrate mounting surface between the driving unit and a top portion of a convex shape of at least one of the mold and the substrate deformed by the deformation mechanism.