Patent classifications
B29C59/02
IMPRINT METHOD, IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD, MODEL, MODEL GENERATION METHOD, AND STORAGE MEDIUM
The present invention provides an imprint method of performing, for each of a plurality of shot regions on a substrate, a process of forming a pattern of an imprint material on the substrate using a mold, comprising: obtaining a model configured to receive condition information representing a condition of the process and output an extrusion state of the imprint material from a shot region; estimating the extrusion state of the imprint material from at least one first shot region that has already undergone the process, by the model, based on the condition information obtained in the process of the first shot region; and determining, based on the estimated extrusion state in the first shot region, whether to execute the process for a second shot region scheduled to undergo the process next to the first shot region.
IMPRINT APPARATUS, IMPRINT METHOD, METHOD OF MANUFACTURING ARTICLE, DETERMINATION METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a supplier configured to supply the imprint material as a plurality of droplets onto the substrate; and a controller configured to control the supplier based on information indicating a target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate, wherein the plurality of droplets in the target arrangement include a first droplet group including a plurality of first droplet arrays, a second droplet group including a plurality of second droplet arrays, and a third droplet array.
Imprint apparatus, and product manufacturing method
An imprint apparatus forms imprint material using a mold on a substrate. The imprint apparatus includes a movable stage configured to hold the substrate, a supply portion configured to discharge the imprint material, and a control unit configured to cause the supply portion to discharge the imprint material while moving the stage so that the imprint material is supplied onto the substrate. The control unit controls discharge of the imprint material from the supply portion so that a target amount of the imprint material is arranged at a target position on the substrate, based on property information indicating a relation between a discharge amount of imprint material from the supply portion and a position on a target object where the imprint material is to be arranged.
Imprint apparatus, and product manufacturing method
An imprint apparatus forms imprint material using a mold on a substrate. The imprint apparatus includes a movable stage configured to hold the substrate, a supply portion configured to discharge the imprint material, and a control unit configured to cause the supply portion to discharge the imprint material while moving the stage so that the imprint material is supplied onto the substrate. The control unit controls discharge of the imprint material from the supply portion so that a target amount of the imprint material is arranged at a target position on the substrate, based on property information indicating a relation between a discharge amount of imprint material from the supply portion and a position on a target object where the imprint material is to be arranged.
COATING COMPOSITION FOR PRODUCING INTERLAYER INSULATION FILM, INTERLAYER INSULATION FILM, SEMICONDUCTOR ELEMENT, AND METHOD FOR PRODUCING INTERLAYER INSULATION FILM
Provided are a coating composition for producing an interlayer insulation film, the coating composition making it possible to produce an interlayer insulation film patterned and having a high Young’s modulus and a low relative dielectric constant in high throughput, a method for producing the interlayer insulation film, and a semiconductor element including the interlayer insulation film. Specifically, the coating composition for producing the interlayer insulation film includes: a polymerizable compound (A) being a polymerizable silicon compound having two or more polymerizable groups, at least one of the two or more polymerizable groups being a polymerizable group Q expressed by *-O-R-Y (wherein * represents a bond with a silicon atom, R represents a single bond, an unsubstituted or substituted alkylene group having 1 to 12 carbon atoms and optionally containing a heteroatom, or a phenylene group, and Y represents a polymerizable group); and a photopolymerization initiator (B).
IMPRINT APPARATUS, METHOD OF IMPRINTING, METHOD OF MANUFACTURING ARTICLE, AND PROGRAM THEREFOR
An imprint apparatus performing a pattern formation on an imprint material on a substrate by bringing the imprint material on the substrate and a mold into contact with each other, includes: an imprint unit configured to perform the pattern formation; and a control unit configured to control an operation of the imprint unit, in which the control unit performs a control such that the pattern formation is performed on all shot regions, in which no foreign substance exists, on a plurality of substrates using a first mold based on a foreign substance information on the substrate, and then the pattern formation is performed on all shot regions where the foreign substance exists on the plurality of substrates using a second mold different from the first mold.
DECORATIVE SHEET, DECORATIVE BOARD, METHOD FOR MANUFACTURING TRANSFER MASTER PLATE, AND METHOD FOR MANUFACTURING DECORATIVE SHEET
There are provided a decorative sheet having excellent fingerprint resistance of the surface of the decorative sheet, a decorative board, a method for manufacturing a transfer master plate, and a method for manufacturing a decorative sheet. The decorative sheet includes: a base material layer; a colored pattern layer provided on one surface of the base material layer; and a first surface protective layer provided on the surface on the side opposite to the base material layer of the colored pattern layer and having irregular shapes on the surface. The decorative sheet is formed using a transfer master plate which is a resin material having irregular shapes for master plate on the surface formed by irradiating the surface of an applied ionizing radiation curable resin with a first ionizing radiation having energy capable of cleaving a polymer chain of the ionizing radiation curable to shrink the surface of the ionizing radiation curable resin, forming the irregular shapes for master plate on the surface of the ionizing radiation curable resin, irradiating the shrunk ionizing radiation curable resin with a second ionizing radiation curing the ionizing radiation curable resin to cure the ionizing radiation curable resin.
DECORATIVE SHEET, DECORATIVE BOARD, METHOD FOR MANUFACTURING TRANSFER MASTER PLATE, AND METHOD FOR MANUFACTURING DECORATIVE SHEET
There are provided a decorative sheet having excellent fingerprint resistance of the surface of the decorative sheet, a decorative board, a method for manufacturing a transfer master plate, and a method for manufacturing a decorative sheet. The decorative sheet includes: a base material layer; a colored pattern layer provided on one surface of the base material layer; and a first surface protective layer provided on the surface on the side opposite to the base material layer of the colored pattern layer and having irregular shapes on the surface. The decorative sheet is formed using a transfer master plate which is a resin material having irregular shapes for master plate on the surface formed by irradiating the surface of an applied ionizing radiation curable resin with a first ionizing radiation having energy capable of cleaving a polymer chain of the ionizing radiation curable to shrink the surface of the ionizing radiation curable resin, forming the irregular shapes for master plate on the surface of the ionizing radiation curable resin, irradiating the shrunk ionizing radiation curable resin with a second ionizing radiation curing the ionizing radiation curable resin to cure the ionizing radiation curable resin.
Imprinting tape, method of manufacture thereof and articles comprising the same
Disclosed herein is a multilayered tape comprising a first layer; where the first layer comprises a first surface and second surface; the first surface of the first layer having a surface texture; a second layer; the second layer having a first surface and a second surface; where the first surface of the second layer is closer to the second surface of the first layer than the second surface of the second layer; where the second surface of the second layer contains at least one partition that is parallel to a longitudinal direction of the multilayered tape.
Food imprinting device
A food imprinting system including at least one imprint block, and a mounting plate having at least one opening dimensioned for receiving at least a forward portion including a printing face of the imprint block, wherein the imprint block and the mounting plate are mounted within an imprinting assembly.