This application relates to an imprinting apparatus and method. In one aspect, the imprinting apparatus applies pressure between a master substrate and a polymer film to transfer a pattern formed on the master substrate to the polymer film. The imprinting apparatus includes a plurality of coils and the surface of the master substrate is heated by an electromagnetic field induced by the plurality of coils. Through holes are defined in each of the plurality of coils, and support bars are inserted into the through holes. The positions of the plurality of coils are changed corresponding to the master substrate.

A method of forming micro-channels in a plastic surface using a pressing device includes structuring a micro-channel forming tool for the pressing device to include a press end including a press surface that extends along a plane and a micro-channel detail positioned on the press end and extending beyond the plane of the press surface. The micro-channel detail includes a non-critical portion and a critical portion supported by the non-critical portion. The press end of the micro-channel forming tool is driven into the plastic surface at a predetermined force using a pressing device. Ultrasonic vibrations are applied to the micro-channel forming tool for a predetermined amount of time to melt portions of the plastic surface in contact with the pressing surface. The ultrasonic vibrations are removed after the predetermined amount of time has elapsed and the press end is retracted from the plastic surface.

A method of forming micro-channels in a plastic surface using a pressing device includes structuring a micro-channel forming tool for the pressing device to include a press end including a press surface that extends along a plane and a micro-channel detail positioned on the press end and extending beyond the plane of the press surface. The micro-channel detail includes a non-critical portion and a critical portion supported by the non-critical portion. The press end of the micro-channel forming tool is driven into the plastic surface at a predetermined force using a pressing device. Ultrasonic vibrations are applied to the micro-channel forming tool for a predetermined amount of time to melt portions of the plastic surface in contact with the pressing surface. The ultrasonic vibrations are removed after the predetermined amount of time has elapsed and the press end is retracted from the plastic surface.

Methods, apparatus and systems are disclosed by which patterned layers can be formed in a roll-to-roll process using a variable and programmable means for applying liquids and solutions used in the patterning process.

A thermally conductive polymer article is disclosed, made from a polymer resin and thermally conductive additives, wherein the article has undergone laser structuring and plasma metallization and, preferably, surface-mount technology (SMT) by non-lead reflow soldering, to provide an integrated circuit. The article can be in the shape of a printed circuit board or a LED lighting component among other possibilities. The thermally conductive additive can be either electrically insulative or electrically conductive, or both types can be used. The thermally conductive polymer compound can be extruded, molded, calendered, thermoformed, or 3D-printed before taking shape as a heat dissipating, laser structured, and plasma metalized polymer article.

An apparatus for the conveying of containers, with a conveyor which forms a contact face for the containers to be conveyed, wherein the conveyor moves at least locally along a pre-set direction and has a plurality of conveying members connected to one another in an articulated manner, and with a drive device for driving the conveyor. The conveying members are produced from a plastics material which has been acted upon with a radiation in order to change its material structure and/or which has a plurality of spherical bodies embedded in its material structure.

An apparatus for the conveying of containers, with a conveyor which forms a contact face for the containers to be conveyed, wherein the conveyor moves at least locally along a pre-set direction and has a plurality of conveying members connected to one another in an articulated manner, and with a drive device for driving the conveyor. The conveying members are produced from a plastics material which has been acted upon with a radiation in order to change its material structure and/or which has a plurality of spherical bodies embedded in its material structure.

An imprint lithography apparatus uses a mold having a pattern formed thereon and transfers the pattern to an imprint material fed to a substrate. The apparatus includes a light-receiving element; a detection system that irradiates a mark formed on the substrate and a mark formed on the mold with light which is reflected therefrom, and guides the light reflected from the mark formed on the substrate and from the mark formed on the mold to the light-receiving element; a relay optical system that causes the light reflected to focus between the mold and the detection system; an illumination system that emits illumination light for curing the imprint material; an optical element having a surface that transmits one of the illumination light and the light from the detection system and reflects the other; and a plate-shaped optical member that corrects aberration of the relay optical system.

An imprint lithography apparatus uses a mold having a pattern formed thereon and transfers the pattern to an imprint material fed to a substrate. The apparatus includes a light-receiving element; a detection system that irradiates a mark formed on the substrate and a mark formed on the mold with light which is reflected therefrom, and guides the light reflected from the mark formed on the substrate and from the mark formed on the mold to the light-receiving element; a relay optical system that causes the light reflected to focus between the mold and the detection system; an illumination system that emits illumination light for curing the imprint material; an optical element having a surface that transmits one of the illumination light and the light from the detection system and reflects the other; and a plate-shaped optical member that corrects aberration of the relay optical system.

Provided is a method of manufacturing a semiconductor device. The method of manufacturing a semiconductor device includes forming a target etching layer on a substrate, patterning the target etching layer to form a pattern layer including a pattern portion having a first height and a first width and a recess portion having a second width, providing a first gas and a second gas on the pattern layer, and performing a reaction process including reacting the first and second gases with a surface of the pattern portion by irradiating a laser beam on the pattern layer. The performing the reaction process includes removing a portion of sidewalls of the pattern portion so that the pattern portion has a third width that is smaller than the first width.