A mechanical assembly for securing a first sheet to a second sheet includes a first projection having a first sidewall and a first top wall. The first sidewall extends from the first top wall at a first acute angle. The first sidewall includes a first top end and a first bottom end. A first discontinuity is defined in the first sidewall between the first top end and the first bottom end. A first base wall extends from the first bottom end. The first base wall extends generally parallel to the first top wall.

A thermal interface material is disclosed. The material includes: a sheet extending between a first major surface and a second major surface, the sheet including: a base material; and a filler material embedded in the base material. The base material may include anisotropically oriented thermally conductive elements. In some embodiments, the thermally conductive elements are preferentially oriented along a primary direction from the first major surface towards the second major surface to promote thermal conduction though the sheet along the primary direction. In some embodiments, the base material is substantially free of silicone. In some embodiments, the thermal conductivity of the sheet along the primary direction is at least 20 W/mK, 30 W/mK, 40 W/mK, 50 W/mK, 60 W/mK, 70 W/mK, 80 W/mK, 90 W/mK, 100 W/mK, or more.

Disclosed are embodiments for an engineered feature formed as a part of or on a chamber component. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has an outer surface. An engineered complex surface is formed on the outer surface. The engineered complex surface has a first lattice framework formed from a plurality of first interconnected laths and a plurality of first openings are bounded by three or more laths of the plurality of laths.

A method of manufacturing a heat exchanger array that includes stacking a plurality of heat exchanger units in an aligned configuration with respective first ports of the heat exchanger units aligned. The heat exchanger units can include a first and second sheet coupled together to define an cavity between the first and second sheets; the first port at a first end of the heat exchanger unit defined by the first and second sheets; and a second port at a second end of the heat exchanger unit defined by the first and second sheets. The method further includes stacking the plurality of heat exchanger units in an aligned configuration with the first ports of the plurality of heat exchanger units aligned and generating a first plurality of respective couplings between adjacent sheets of adjacent heat exchanger units about adjacent first ports. The coupling can be generated by an adhesive.

A manufacturing method of middle member structure includes steps of applying an external force to a plate body to shape the plate body and form multiple recessed/raised structures and perforating the plate body to form multiple perforations misaligned from the recessed/raised structures so as to achieve a plate body with recessed/raised structures. The middle member structure is applicable to a vapor chamber to enhance the vapor-liquid circulation effect and the support for the internal chamber.

The present invention relates to a device for controlling the temperature of a component and a method of production thereof. The device includes an elongate basic profile that defines a plurality of fluid flow channels in its interior. The fluid flow channels are arranged in series and separated by webs. The elongate basic profile extrudes from a plastic material. The device includes a connection unit connected to the basic profile and designed to direct fluid into the basic profile or out of the basic profile. The connection unit is formed partially or completely from a transparent plastic material.

A forming assembly configured to form a wick is disclosed. The forming assembly includes an expandable tube and a forming shell assembly. The expandable tube is hydraulically expandable to an expanded configuration. A wick mesh is configured to be wrapped about the expandable tube. The forming shell assembly includes a first forming shell comprising a first recess defined therein and a second forming shell comprising a second recess defined therein. The first recess and the second recess cooperate to define an outer diameter of the wick. The expandable tube and the wick mesh are positionable between the first recess and the second recess. The expandable tube and the forming shell assembly are configured to deform the wick mesh and form the wick based on the expandable tube hydraulically expanding towards the expanded configuration.

A method of building a heat exchanger includes forming the heat exchanger with layer-by-layer additive manufacturing. A first hollow annulus is formed. A body of the heat exchanger is formed to be integrally connected to and grown upwards from the first hollow annulus. The body includes an exterior wall and a heat exchanger core disposed within the exterior wall. The body defines an interior that is cylindrically shaped with an axis oriented parallel to a direction of gravity. The first annulus is disposed on a gravitational bottom of the body. A second hollow annulus is formed integrally connected to and grown upwards from a gravitational top of the body. Residual powder is removed from a bottom of the heat exchanger.

A method for forming a hybrid heat exchanger is provided. The method includes laser-texturing a metal surface to create a plurality of microstructures and subsequently melt-bonding a plastic component to the plurality of microstructures. During melt-bonding, plastic material penetrates the plurality of microstructures and conforms to the plastic component to the metal surface. After hardening inside the microstructures, the plastic component adheres to the metal surface as a hybrid component. As a result, a fastener or snap connection is not required, and the plastic-metal joint provides a barrier to water, glycol-based fluids, air, and other fluids.

A method of building a heat exchanger includes forming the heat exchanger with layer-by-layer additive manufacturing. A first hollow annulus is formed. A body of the heat exchanger is formed to be integrally connected to and grown upwards from the first hollow annulus. The body includes an exterior wall and a heat exchanger core disposed within the exterior wall. The body defines an interior that is cylindrically shaped with an axis oriented parallel to a direction of gravity. The first annulus is disposed on a gravitational bottom of the body. A second hollow annulus is formed integrally connected to and grown upwards from a gravitational top of the body. Residual powder is removed from a bottom of the heat exchanger.