A package for abrasive wheels is provided. The package comprises a base providing an inner space between a side surface, an open end having a diameter D.sub.open and a closing plane end having a diameter D.sub.closed, the inner space being adapted to contain stacked abrasive wheels having a diameter D.sub.wheel, the side surface having a projecting portion having a diameter D.sub.proj, that projects from the closing plane end; and a cover configured to couple to the base at the open end so as to close the inner space, the base and the cover insulating the abrasive wheels against atmospheric agents when coupled, the cover comprising a projection shaped to define an annular plane portion having an inner diameter D.sub.in and an outer diameter D.sub.out.

At least a surface of a reel pallet is made of resin. When a distance in a first direction between a reel supported by a first reel support and a reel supported by a second reel support is denoted by La, a distance in the first direction between an outer edge of the reel supported by the second reel support and a fourth side of an arrangement surface is denoted by Lb1, and a distance in the first direction between an end surface of the reel supported by the first reel support and a second side of the arrangement surface is denoted by Lb2, the reel pallet satisfies a relationship of 1<La/(Lb1+Lb2)<3.

A storage unit includes a wound body made of wound linear material and a storage body that stores the wound body. The wound body includes a first spiral part in which the wound linear material is spirally wound in a first winding direction such that a distance between the wound linear material of the first spiral part and a center of the wound body gradually decreases, a first inversion part, disposed inside the first spiral part, that inverts a winding direction of the wound linear material from the first winding direction to a second winding direction opposite to the first winding direction, and a second spiral part, disposed outside the first inversion part, in which the wound linear material is spirally wound in the second winding direction such that a distance between the wound linear material of the second spiral part and the center gradually increases.

A storage container for securely holding one or more rings is provided. The storage container includes a base with a base coupling feature that can be coupled to a lid coupling feature of a lid. Both the base and the lid have sidewalls that define respective inner regions. A post extends from a bottom portion of the base and is contained within the base inner region and the lid inner region when the base and lid are coupled together. The storage container consistent with implementations of the current subject matter provides for easy storage of rings on the post and other items that may be loosely held within the inner regions.

A storage container for securely holding one or more rings is provided. The storage container includes a base with a base coupling feature that can be coupled to a lid coupling feature of a lid. Both the base and the lid have sidewalls that define respective inner regions. A post extends from a bottom portion of the base and is contained within the base inner region and the lid inner region when the base and lid are coupled together. The storage container consistent with implementations of the current subject matter provides for easy storage of rings on the post and other items that may be loosely held within the inner regions.

A wafer arrangement in accordance with various embodiments may include: a wafer; and a wafer support ring, wherein the wafer and the wafer support ring are configured to be releasably attachable to one another.

A ring storage station used for delivering a consumable part to a substrate processing system includes a housing that includes a base plate and a rotating plate disposed over the base plate. An end-effector opening is disposed at a first side of the housing and a service window opening is disposed at a second side of the housing. A set of finger support structures is connected to the rotating plate. Each finger support structure includes a support column and support fingers disposed thereon. At least two of the set of columns have support fingers with index pins to radially align consumable parts when disposed in the ring storage station. In one configuration, consumable parts may be designed to match the rotation angle engagement to ensure catching the angle alignment between ring storage and process module.

A ring storage station used for delivering a consumable part to a substrate processing system includes a housing that includes a base plate and a rotating plate disposed over the base plate. An end-effector opening is disposed at a first side of the housing and a service window opening is disposed at a second side of the housing. A set of finger support structures is connected to the rotating plate. Each finger support structure includes a support column and support fingers disposed thereon. At least two of the set of columns have support fingers with index pins to radially align consumable parts when disposed in the ring storage station. In one configuration, consumable parts may be designed to match the rotation angle engagement to ensure catching the angle alignment between ring storage and process module.

In an embodiment, a carrier tape 10 for storing electronic components includes a band-shaped tape body 11 and storage recesses 12a, each having length L1, width W1, and depth D1 sufficient to store an electronic component EC, which storage recesses are provided in the tape body 11 at equal intervals in the length direction. On one width-direction side of the storage recesses 12a in the tape body 11, guide recesses 12b are provided in such a way that their depth D2 increases from the top face of the tape body 11 toward the one width-direction side face of the storage recess 12b, and that the guide recesses 12b themselves continue to the storage recesses 12a. The carrier tape is suited for the method of inserting electronic components into the storage recesses in the carrier tape from the side.

In an embodiment, a carrier tape 10 for storing electronic components includes a band-shaped tape body 11 and storage recesses 12a, each having length L1, width W1, and depth D1 sufficient to store an electronic component EC, which storage recesses are provided in the tape body 11 at equal intervals in the length direction. On one width-direction side of the storage recesses 12a in the tape body 11, guide recesses 12b are provided in such a way that their depth D2 increases from the top face of the tape body 11 toward the one width-direction side face of the storage recess 12b, and that the guide recesses 12b themselves continue to the storage recesses 12a. The carrier tape is suited for the method of inserting electronic components into the storage recesses in the carrier tape from the side.