Various embodiments relate to magnetically moveable displacement devices or robotic devices. Particular embodiments provide systems and corresponding methods for magnetically moving multiple movable robots relative to one or more working surfaces of respective one or more work bodies, and for moving robots between the one or more work bodies via transfer devices. Robots can carry one or more objects among different locations, manipulate carried objects, and/or interact with their surroundings for particular functionality including but not limited to assembly, packaging, inspection, 3D printing, test, laboratory automation, etc. A mechanical link may be mounted on planar motion units such as said robots.

An embodiment includes a plurality of transport modules forming a transport path on which a carriage that transports a workpiece travels, and a control unit that controls a position of the carriage on the plurality of transport modules based on a drive instruction, and the control unit corrects the drive instruction during carriage motion that is based on the drive instruction and stops the carriage.

An embodiment includes a plurality of transport modules forming a transport path on which a carriage that transports a workpiece travels, and a control unit that controls a position of the carriage on the plurality of transport modules based on a drive instruction, and the control unit corrects the drive instruction during carriage motion that is based on the drive instruction and stops the carriage.

Provided is a transport robot and a substrate treating apparatus including the transport robot. The substrate treating apparatus includes a transport chamber having a long shape on one side, and for providing a moving space of a substrate, a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process, a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber, a track provided in the transport chamber to provide a moving path of a substrate, and a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.

Provided is a transport robot and a substrate treating apparatus including the transport robot. The substrate treating apparatus includes a transport chamber having a long shape on one side, and for providing a moving space of a substrate, a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process, a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber, a track provided in the transport chamber to provide a moving path of a substrate, and a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.

A method for transferring data between movable and stationary units of a linear transport system having a controller and linear motor with stator and rotor for driving the movable unit along a guide rail. The stator includes the stationary units, each with one or more drive coils. The rotor is arranged on the movable unit, with one or more magnets. The stationary units each have at least one stationary antenna, and the movable unit has a movable antenna. The controller selects a stationary antenna based on position data of the moveable antenna and outputs a data packet to the stationary unit, with control and data signals transmitted via the selected stationary antenna. The control signal includes identification information to identify the stationary antenna. The data signal includes a communication frame with a start bit and user data following a start sequence arranged to trigger data receipt of the movable unit.

A method for transferring data between movable and stationary units of a linear transport system having a controller and linear motor with stator and rotor for driving the movable unit along a guide rail. The stator includes the stationary units, each with one or more drive coils. The rotor is arranged on the movable unit, with one or more magnets. The stationary units each have at least one stationary antenna, and the movable unit has a movable antenna. The controller selects a stationary antenna based on position data of the moveable antenna and outputs a data packet to the stationary unit, with control and data signals transmitted via the selected stationary antenna. The control signal includes identification information to identify the stationary antenna. The data signal includes a communication frame with a start bit and user data following a start sequence arranged to trigger data receipt of the movable unit.

A tray shuttle and a tray conveyor using the tray shuttle to route magnetic conveyor trays from one conveyor section to another. The trays and the shuttles are propelled by linear-motor stators that produce electromagnetic flux waves that interact with the magnetic fields of permanent-magnet arrays in movers in each tray. Each shuttle has a main holder mover and one or more other movers connected to a linkage that operates one or more pushers that push trays off a tray holder on the shuttles.

A tray shuttle and a tray conveyor using the tray shuttle to route magnetic conveyor trays from one conveyor section to another. The trays and the shuttles are propelled by linear-motor stators that produce electromagnetic flux waves that interact with the magnetic fields of permanent-magnet arrays in movers in each tray. Each shuttle has a main holder mover and one or more other movers connected to a linkage that operates one or more pushers that push trays off a tray holder on the shuttles.

The transfer operation of moving the slider between one fixed linear module and the movable linear module while locating the movable linear module in the facing range facing toward the one fixed linear module, out of the plurality of linear modules arranged in parallel, is performed. At this time, a judgement process of judging whether or not the coordinate axis of the one fixed linear module and the coordinate axis of the movable linear module are continuous is performed. If it is judged that the coordinate axes are not continuous, the transfer operation is performed while the speed control is executed for the slider. Thus, it is possible to suppress the occurrence of a situation where the transfer operation of moving the slider between the movable linear modules cannot be performed due to the discontinuity of the coordinate axes respectively set for the movable linear modules.