Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a substrate; and a cooling plate for controlling a temperature of the transporting unit, wherein the cooling plate is spaced apart from a side surface of the transporting unit and installed as a side wall, or is installed in close contact with the side surface of the transporting unit.

An air-blowing method includes the steps of blowing, inside a machine tool, air onto a workpiece after machining, issuing a workpiece pick-up advance notice signal for notifying beforehand of pick-up of the workpiece by a robot or a worker, on the basis of a task state of the robot or an operation of the worker, and calculating the additional time for air blow on the basis of a time required by the robot or the worker to arrive at a workpiece pick-up position in front of the machine tool after the workpiece pick-up advance notice signal is issued, where air blow is extended by just the additional time in the step of blowing air.

An air-blowing method includes the steps of blowing, inside a machine tool, air onto a workpiece after machining, issuing a workpiece pick-up advance notice signal for notifying beforehand of pick-up of the workpiece by a robot or a worker, on the basis of a task state of the robot or an operation of the worker, and calculating the additional time for air blow on the basis of a time required by the robot or the worker to arrive at a workpiece pick-up position in front of the machine tool after the workpiece pick-up advance notice signal is issued, where air blow is extended by just the additional time in the step of blowing air.

A process is for the maintenance of a belt conveyor, which includes a longitudinal conveyor belt and a number of support stations for the conveyor belt distributed along the conveyor belt. Each support station includes a cradle on which the conveyor belt rests. The process includes inserting an inflatable pad in a deflated state below the conveyor belt, in a lifting position near one of the support stations, inflating the inflatable pad to an inflated state in which the conveyor belt rests directly on the inflatable pad and no longer rests on the cradle of the support station, performing a maintenance operation on the support station, and deflating the inflatable pad to its deflated state.

A process is for the maintenance of a belt conveyor, which includes a longitudinal conveyor belt and a number of support stations for the conveyor belt distributed along the conveyor belt. Each support station includes a cradle on which the conveyor belt rests. The process includes inserting an inflatable pad in a deflated state below the conveyor belt, in a lifting position near one of the support stations, inflating the inflatable pad to an inflated state in which the conveyor belt rests directly on the inflatable pad and no longer rests on the cradle of the support station, performing a maintenance operation on the support station, and deflating the inflatable pad to its deflated state.

A rack for holding flat panels containing PCM while the flat panels are conditioned and a method of conditioning the flat panels. The rack includes a frame structure defining an interior through which a conditioning air flow is directed. The interior includes a plurality of vertically spaced shelves for supporting the flat panels in a vertically spaced apart arrangement. The shelves are configured to hold the flat panels with at least a majority of their upper and lower surfaces in contact with the conditioning air flow. A conditioning method includes arranging the flat panels in a spaced apart array in the rack to create air flow channels between adjacent surfaces of the flat panels. Air is circulated between and in contact with the flat panels at a first temperature sufficient to bring the temperature of the PCM in each flat panel at least closer to a required temperature range.

A rack for holding flat panels containing PCM while the flat panels are conditioned and a method of conditioning the flat panels. The rack includes a frame structure defining an interior through which a conditioning air flow is directed. The interior includes a plurality of vertically spaced shelves for supporting the flat panels in a vertically spaced apart arrangement. The shelves are configured to hold the flat panels with at least a majority of their upper and lower surfaces in contact with the conditioning air flow. A conditioning method includes arranging the flat panels in a spaced apart array in the rack to create air flow channels between adjacent surfaces of the flat panels. Air is circulated between and in contact with the flat panels at a first temperature sufficient to bring the temperature of the PCM in each flat panel at least closer to a required temperature range.

Disclosed is an equipment front end module (EFEM) in which wafer transfer is conducted between a wafer storage device where a wafer is stored and a process chamber. In addition, the EFEM generates gas flow in a wafer transfer chamber.

Disclosed is an equipment front end module (EFEM) in which wafer transfer is conducted between a wafer storage device where a wafer is stored and a process chamber. In addition, the EFEM generates gas flow in a wafer transfer chamber.

The present invention relates to a particle separator configured to be operatively connected between an enclosure hood and a ventilation system. In practice, an air stream containing particulate matter from an industrial process is directed through an enclosure hood, through the particle separator and into the ventilation system. Relatively large particles are removed from the air stream in the particle separator before the air stream reaches the ventilation system. This reduces the abrasion and general damage that can occur from relatively large particles moving through the duct structure of a ventilation system.