A transport vehicle travels on first and second paths orthogonally or diagonally crossing each other and each including an opening at a center and treads on both sides of the opening. The transport vehicle includes a vehicle in an upper portion; a transport in a lower portion to hold an article; and a column extending downward from the vehicle to the transport. The vehicle includes on front and rear of the column along the first path, at least a pair of first traveling units each including a first traveling wheel that travels on the tread of the first path, and first auxiliary wheels on front and rear of the first traveling wheel along the first path; on front and rear of the column along the second path, at least a pair of second traveling units each including a second traveling wheel that travels on the tread of the second path, and second auxiliary wheels on front and rear of the second traveling wheel along the second path; and a lifting mechanism that raises and lowers one of the at least the pair of first traveling units and the at least the pair of second traveling units.

A transport vehicle travels on first and second paths orthogonally or diagonally crossing each other and each including an opening at a center and treads on both sides of the opening. The transport vehicle includes a vehicle in an upper portion; a transport in a lower portion to hold an article; and a column extending downward from the vehicle to the transport. The vehicle includes on front and rear of the column along the first path, at least a pair of first traveling units each including a first traveling wheel that travels on the tread of the first path, and first auxiliary wheels on front and rear of the first traveling wheel along the first path; on front and rear of the column along the second path, at least a pair of second traveling units each including a second traveling wheel that travels on the tread of the second path, and second auxiliary wheels on front and rear of the second traveling wheel along the second path; and a lifting mechanism that raises and lowers one of the at least the pair of first traveling units and the at least the pair of second traveling units.

A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.

A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.

Aspects of the present disclosure are directed toward apparatuses, systems, and methods for releasably connecting a first beam to a second beam. The apparatuses, systems, and methods may include a locking pin arranged on the first beam and configured to actuate between an unlocked position and a locked position and an arm coupled to the locking pin and extending parallel therewith. The apparatuses, systems, and methods may also include a sleeve arranged on the second beam and configured to receive the locking pin in the locked position to releasably secure the first beam to the second beam.

A method for controlling a movement of a load in a workspace by a control device, including a) acquiring target coordinates to be set of a target point in the workspace towards which a load pick-up apparatus is to be moved, b) determining a load measured value by measuring the weight of the load using a load measuring device, c) determining actual cable lengths of positioning cables, d) determining desired cable lengths to be set by the respective positioning cable winch, for the positioning cables for the target coordinates of the target point to be set and for the current load measured value, and for each of the positioning cables, the control device searches a database for a data set that matches the target coordinates of the target point that are to be set and the current load measured value, and determines the desired cable length to be set.

A method for controlling a movement of a load in a workspace by a control device, including a) acquiring target coordinates to be set of a target point in the workspace towards which a load pick-up apparatus is to be moved, b) determining a load measured value by measuring the weight of the load using a load measuring device, c) determining actual cable lengths of positioning cables, d) determining desired cable lengths to be set by the respective positioning cable winch, for the positioning cables for the target coordinates of the target point to be set and for the current load measured value, and for each of the positioning cables, the control device searches a database for a data set that matches the target coordinates of the target point that are to be set and the current load measured value, and determines the desired cable length to be set.

A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.

A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.