Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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3/00
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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B81B3/0018
Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
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