A mirror with a reflective layer formed thereon is supported within a frame-shaped support by two U-shaped arms. A plate-like arm connects fixation points (Q1, Q2), and a plate-like arm connects fixation points (Q3, Q4). A pair of piezoelectric elements (E11, E12) disposed along a longitudinal axis (L1) on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E20) disposed along the longitudinal axis (L2) on the upper surface of an inside bridge. Similarly, a pair of piezoelectric elements (E31, E32) disposed on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E40) disposed on the upper surface of an inside bridge. When a positive drive signal is applied to the piezoelectric elements (E11, E20, E31, E40) and a negative drive signal is applied to the piezoelectric elements (E12, E32), the mirror is displaced efficiently.

An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.

Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.

A flexure-based micro-array having a plurality of micro-assemblies, each comprising: an object; and at least three electrostatic actuation modules for tipping, tilting, and/or piston-actuating the object, each actuation module comprising: a base with first and second electrodes electrically isolated from each other; an electrically conductive lever arm; a first flexure bearing suspending the lever arm adjacent the first and second electrodes so that electrical activation of at least one of the first and second electrodes produces an electrostatic moment of force on the lever arm to resiliently bias the first flexure bearing and pivot the lever arm about a fulcrum; and a second flexure bearing connecting the lever arm to the object at a connection location that is different from other connection locations of the other actuation modules so that pivoting the lever arm about the fulcrum induces the second flexure bearing to pivot the object about an object pivot axis defined between two of the other connection locations while the second flexure bearing decouples the lever arm from object displacements induced by two of the other actuation modules connected to the two other connection locations defining the object pivot axis, wherein the plurality of micro-assemblies are arranged with the objects juxtaposed in a substantially 2D array.

A bending actuator and methods for making and using the same. A beam of anisotropic polymer material, such as nylon, characterized by a greater degree of molecular orientation along a longitudinal axis than transverse to the longitudinal axis, has a heating element in thermal contact with at least one of a pair of opposing faces parallel to the longitudinal axis of the beam. The heating element in certain embodiments provides for photothermal activation of the bending actuator.

An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

In a method of manufacturing a highly stretchable three-dimensional (3D) percolated conductive nano-network structure, a 3D nano-structured porous elastomer including patterns distributed in a periodic network is formed. A surface of the 3D nano-structured porous elastomer is changed to a hydrophilic state. A polymeric material is conformally adhered on the surface of the 3D nano-structured porous elastomer. The surface of the 3D nano-structured porous elastomer is wet by infiltrating a conductive solution in which a conductive material is dispersed. A 3D percolated conductive nano-network coupled with the 3D nano-structured porous elastomer is formed by evaporating a solvent of the conductive solution and removing the polymeric material.

An actuator includes a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole; first driving sources formed on first surfaces of the first beams; and ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts. The first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.

Microelectromechanical and/or nanoelectromechanical device comprising a support and at least one moveable element so as to be able to be displaced translationally with respect to the support, a means (G1) for translationally guiding said element, said guiding means (G1) comprising two rigid arms (6), a rotating articulation (12, 10) between each arm (6, 8) and the moveable element (4) and a rotating articulation (10, 14) between each arm (6, 8) and the support, the guiding means (G1) also comprising a coupling articulation (18) between the two arms having at least rotating articulation, said rotating articulations having axes of rotation at least parallel with each other such that during a translational displacement of the moveable element (4) the arms (6, 8) pivot with respect to each other in opposite directions, the rotating articulations being made by torsionally deformable beams.

A vertical comb drive assembly may include a rotor assembly. The rotor assembly may include a comb anchor to attach the rotor assembly to a base, a comb rotor attached to the comb anchor, and a movable element attached to the comb rotor. The vertical comb drive assembly may include a stator assembly. The stator assembly may include a plate anchor to attach the stator assembly to the base, a plate, wherein the plate forms a comb stator, and a plate hinge to connect the plate to the plate anchor. The plate hinge and the plate may be configured for moving the plate from a first position where the comb rotor and the comb stator are both in a first plane to a second position where the comb rotor is in the first plane and the comb stator is in a second plane.