The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.

A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.

A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.

A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.

A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

An electrically-connected MEMS precision motion stage includes a stationary portion, one or more electrically-conductive MEMS flexure assemblies coupled to the stationary portion, a movable portion coupled to the one or more electrically-conductive MEMS flexure assemblies, one or more motion control assemblies disposed between the stationary portion and the movable portion and configured to control motion of the movable portion, and one or more position sensors disposed adjacent to the one or more motion control assemblies and configured to enable detection of movement of the one or more motion control assemblies, respectively.

An imaging device includes an image pixel array and a plurality of micro-electro-mechanical systems (MEMS) Alvarez tunable lenses disposed over regions of the imaging pixels. The MEMS Alvarez tunable lenses are configured to be adjusted to varying optical powers to focus image light to the plurality of imaging pixels at varying focus depths. Processing logic is configured to drive the plurality of MEMS Alvarez tunable lenses to provide varying optical powers to focus the image light to the imaging pixels during a plurality of image captures with the imaging pixels.

Provided is a micro drive unit, which is capable of performing multi-axis drive, the micro drive unit including: a movable object; and at least one pair of beams configured to pivotally support the movable object and formed only in one direction, the movable object being configured to rotate or translate in an x-axis direction, a y-axis direction, and a z-axis direction when the at least one pair of beams is twisted or bent at one or a plurality of resonant frequencies of the at least one pair of beams, thereby being capable of simultaneously avoiding upsizing and complication of the structure. And by incorporating the micro drive unit, a micro device capable of achieving multi-axis drive can be manufactured.

A device includes proof masses within a device layer defining an xy-plane and perpendicular z-direction. The proof masses have first and second rotor comb sets extending in the x-direction. Four sets of stator combs in the device layer extend along the x-direction and are electrically insulated from each other. The proof masses are mobile in the y-and z-directions relative to the stator combs. The first and second stator comb sets interdigitate with the first rotor comb set, forming capacitors, while the third and fourth stator comb sets interdigitate with the second rotor comb set, forming additional capacitors. The device layer has parallel top and bottom surfaces in the xy-plane. All rotor and stator comb bottoms align, with the tops of the first and fourth stator comb sets level with the device layer's top surface, enabling precise capacitive measurements based on relative comb movement in the device layer.

A LIDAR module includes: a light detector configured to detect light; a first (MEMS) mirror and a second MEMS mirror, wherein one of the first MEMS mirror or the second MEMS mirror is configured to direct received light towards a field of view of the LIDAR module, wherein the other one of the first MEMS mirror or the second MEMS mirror is configured to receive light from the field of view of the LIDAR module and to direct the light towards the light detector, and wherein the first MEMS mirror and the second MEMS mirror are configured to oscillate in synchronization with one another to cover a same angular range.