Embodiments of an optical data communication apparatus using micro-electro-mechanical system (MEMS) micro-mirror arrays is described herein. The apparatus may include a router configured to operate as a relay to exchange optical data signals between optical switches of the apparatus. The optical switches may be configured to switch between reflection directions to reflect the optical signals over different optical connections between the optical switches and different receiving ports of the router. The reflection directions may be switched in accordance with predetermined mappings between the receiving ports of the router and destinations of the optical signals. The router includes a MEMS micro-mirror array configured to reflect received optical signals to the destinations. A processing element of the optical data switching circuitry may generate a plurality of optical data signals and may send the optical data signals to an optical switch of the optical data switching circuitry.

Embodiments of a satellite transceiver configurable for inter-satellite communication and configurable for satellite to ground communication are disclosed herein. In some embodiments, the satellite transceiver comprises a micro-electromechanical (MEM) micro-mirror array (MMA) (MEM-MMA) configured to steer a beam of encoded optical data over a field-of-view (FOV). The MEM-MMA comprises a plurality of individual mirror elements. Each of the mirror elements is controllable by control circuitry to steer the beam over the FOV.

An active mode image sensor for optical non-uniformity correction (NUC) of an active mode sensor uses a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) having tilt, tip and piston mirror actuation to form and scan a laser spot that simultaneously performs the NUC and illuminates the scene so that the laser illumination is inversely proportional to the response of the imager at the scan position. The MEMS MMA also supports forming and scanning multiple laser spots to simultaneously interrogate the scene at the same or different wavelengths. The piston function can also be used to provide wavefront correction. The MEMS MMA may be configured to generate a plurality of fixed laser spots to perform an instantaneous NUC.

The present invention provides a motion control structure and a actuator. The motion control structure includes a motion platform, a first actuator having a first execution unit arranged on opposite sides of the motion platform along an X-axis direction and a second execution unit arranged on opposite sides of the motion platform along a Y-axis direction. The first execution unit includes a first actuating element displaced along the X-axis direction. The second execution unit includes a second actuating element displaced along the Y-axis direction. A second actuator surrounds an inner periphery of the motion platform and includes a third execution unit having an assembly portion displaced along the Z-axis direction. The motion control structure of the invention has the advantages that the motion platform can be driven to realize motion in six degrees of freedom.

A micro-electrical-mechanical system (MEMS) device includes one or more slidable connection assemblies for releasably coupling the micro-electrical-mechanical system (MEMS) device to a wafer from which the micro-electrical-mechanical system (MEMS) device was made. The MEMS device may include a MEMS actuation core, and a MEMS electrical connector assembly electrically coupled to the MEMS actuation core configured to be electrically coupled to a printed circuit board.

An autofocus system is disclosed. The autofocus system includes a lens assembly, an upper actuator, and a lower actuator. The upper and the lower actuators have stationary elements and movable elements. The lens assembly is attached to the movable elements of the upper and the lower actuators. The autofocus system allows three degrees of freedoms of translational adjustments and two degrees of freedoms of rotational adjustments.

A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).

An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.

According to an embodiment, a semiconductor device includes a first actuator, a second actuator, a first frame provided between the first actuator and the second actuator, a first connection member connecting the first actuator and the first frame to each other, a second connection member connecting the first actuator and the first frame to each other at a position different from a position at which the first connection member connects the first actuator and the first frame to each other, a third connection member connecting the second actuator and the first frame to each other, a fourth connection member connecting the second actuator and the first frame to each other at a position different from a position at which the third connection member connects the second actuator and the first frame to each other.

Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.