A microelectromechanical device, in particular a non-volatile memory module or a relay, comprising: a mobile body including a top region and a bottom region; top electrodes facing the top region; and bottom electrodes, facing the bottom region. The mobile body is, in a resting condition, at a distance from the electrodes. The latter can be biased for generating a movement of the mobile body for causing a direct contact of the top region with the top electrodes and, in a different operating condition, a direct contact of the bottom region with the bottom electrodes. In the absence of biasing, molecular-attraction forces maintain in stable mutual contact the top region and the top electrodes or, alternatively, the bottom region and the bottom electrodes.

A system for detecting and evaluating environmental quantities and events is formed by a detection and evaluation device and a mobile phone, connected through a wireless connection. The device is enclosed in a containment casing housing a support carrying a plurality of inertial sensors and environmental sensors. A processing unit is coupled to the inertial sensors and to the environmental sensors. A wireless connection unit, is coupled to the processing unit and a wired connection port, is coupled to the processing unit. A programming connector is coupled to the processing unit and is configured to couple to an external programming unit to receive programming instructions of the processing unit. A storage structure is coupled to the processing unit and a power-supply unit supplied power in the detection and evaluation device. The mobile phone stores an application, which enables a basicuse mode, an expert use mode, and an advanced use mode.

An MEMS has a substrate and a cavity arranged in the substrate. A movable element is arranged in the cavity, configured to interact with a fluid arranged in the cavity, wherein a movement of the fluid and a movement of the movable element are causally related. A first opening which connects the cavity to an environment of the substrate causes a first phase offset of a first periodic oscillation which is causally related to the movement of the movable element when passing through the first opening. A second opening which connects the cavity to the environment of the substrate causes a second phase offset, different from the first phase offset, of a second periodic oscillation which is causally related to the movement of the movable element when passing through the second opening.

A microelectromechanical device, in particular a non-volatile memory module or a relay, comprising: a mobile body including a top region and a bottom region; top electrodes facing the top region; and bottom electrodes, facing the bottom region. The mobile body is, in a resting condition, at a distance from the electrodes. The latter can be biased for generating a movement of the mobile body for causing a direct contact of the top region with the top electrodes and, in a different operating condition, a direct contact of the bottom region with the bottom electrodes. In the absence of biasing, molecular-attraction forces maintain in stable mutual contact the top region and the top electrodes or, alternatively, the bottom region and the bottom electrodes.

A micro electro mechanical system (MEMS) device and a method for manufacturing the same are provided. The MEMS device includes a substrate, a polymer film on the substrate and having a lower surface facing toward the substrate, a cavity passing through the substrate, and coil structures on the substrate and in the polymer film. The polymer film includes a corrugation pattern on the lower surface of the polymer film. A portion of the polymer film is exposed in the cavity.

A microelectromechanical device, in particular a non-volatile memory module or a relay, comprising: a mobile body including a top region and a bottom region; top electrodes facing the top region; and bottom electrodes, facing the bottom region. The mobile body is, in a resting condition, at a distance from the electrodes. The latter can be biased for generating a movement of the mobile body for causing a direct contact of the top region with the top electrodes and, in a different operating condition, a direct contact of the bottom region with the bottom electrodes. In the absence of biasing, molecular-attraction forces maintain in stable mutual contact the top region and the top electrodes or, alternatively, the bottom region and the bottom electrodes.

A software-controlled triangle-topology valve-cluster for use at taps or conduit junction points that facilitate fluid-based clearing, gas-based clearing, solvent-based cleaning, gas drying, small-volume burst formation, abandoned-material return, and other valuable operations is disclosed. The invention provides better contamination performance than simple passive or valve-chaperoned T-topology junctions. The valve-cluster arrangement can be implemented or approximated in various ways. For faster performance, simplified programming, or other reasons macro controllability can be provided for operating groups of valves in one or more of simultaneous operation, time-defined sequenced operation, or conditional operation, and such macros can further provide for conditional inputs or parameters. Such macro, conditional-macro, and parameterized-macro control could be implemented in software, firmware, and/or hard-wired logic. The invention can be used in reusable or reconfigurable microfluidic systems, facilitate decontaminated and green disposal and recycling of microfluidics, and other fluidic applications. Features of the invention can also be extended to gas transport.

Although most contemporary and envisioned microfluidic systems are entirely passive or have limited control capabilities, future microfluidic systems require detailed sequenced control of valves and other elements. For this software-control of transport and processes for microfluidic systems under the control of temporal and/or event-driven scripts, script authoring and editing, functional libraries, and other development tools for process and configuration control are proposed with intent towards future standardization. Scripts can respond to external inputs and can comprise conditional-logic, temporal-logic, calculations, hierarchical structure, subroutines, macros, multi-thread and parallel execution operations, procedural calls, interrupts, real-time regulatory control calculations, and element resource allocation.

Scripts can be executed by a script reader, responsive to incoming signals and information, to produce temporal control sequences for operating microfluidic devices, emulation hardware, simulation software, process visualization, etc.

Script authoring/editing tools and readers can record and store information, and can interface to with commercial software, systems, languages, and protocols.

Disclosed is an opto-electronic module including a first substrate, a photonic integrated circuit (PIC) attached to the first substrate, a laser assembly attached to the first substrate, and a microelectromechanical systems (MEMS) micro-mirror device positioned between the laser and the waveguide. The PIC comprising a waveguide. The laser assembly is configured to generate a laser beam to optically couple to the waveguide. The laser assembly includes a thermal electric cooler (TEC) and a laser thermally coupled to the TEC. The MEMS micro-mirror device comprising an actuatable MEMS mirror and a fixed mirror.

A thermal metamaterial device comprises at least one MEMS thermal switch, including a substrate layer including a first material having a first thermal conductivity, and a thermal bus over a first portion of the substrate layer. The thermal bus includes a second material having a second thermal conductivity higher than the first thermal conductivity. An insulator layer is over a second portion of the substrate layer and includes a third material that is different from the first and second materials. A thermal pad is supported by a first portion of the insulator layer, the thermal pad including the second material and having an overhang portion located over a portion of the thermal bus. When a voltage is applied to the thermal pad, an electrostatic interaction occurs to cause a deflection of the overhang portion toward the thermal bus, thereby providing thermal conductivity between the thermal pad and the thermal bus.