A MEMS transducer, for instance a MEMS capacitive transducer, comprising: a flexible membrane, the flexible membrane comprising a conductive track; and a continuity testing circuit electrically connected to the conductive track. The conductive track may be electrically isolated from any further conductive regions of the flexible membrane. The continuity testing circuit is configured to test the continuity of the conductive track.

A method for projecting an image comprising providing a scanning mirror having a resonance frequency which is unequal to a target operating frequency (aka scanning frequency) at which the mirror is to operate; and/or providing logic and an actuator e.g. motor; and/or using the scanning mirror to project at least one image, including repeatedly using the logic to measure the mirror's operating frequency and to control the actuator to apply at least one force, to the mirror, which causes the mirror's instantaneous operating frequency to equal the target operating frequency.

A microfluidic device, a method of using a microfluidic device and a micro total analysis system are provided. The microfluidic device includes a first substrate, and the first substrate includes a base substrate and a pixel array. The pixel array includes a plurality of pixels and is on the base substrate, and each of the plurality of pixels includes a driving electrode. Driving electrodes of two adjacent pixels are in different layers.

Accelerometers are described herein that have RMS outputs. For instance, an example accelerometer may include a MEMS device and an ASIC. The MEMS device includes a structure having an attribute that changes in response to acceleration of an object. The ASIC determines acceleration of the object based at least in part on changes in the attribute. The ASIC includes analog circuitry, an ADC, and firmware. The analog circuitry measures the changes in the attribute and generates analog signals that represent the changes. The ADC converts the analog signals to digital signals. The firmware includes RMS firmware. The RMS firmware performs an RMS calculation on a representation of the digital signals to provide an RMS value that represents an amount of the acceleration of the object.

Disclosed is a MEMS device, comprising: a movable electrode plate; a first electrode plate and a first feedback electrode plate located on a first side of the movable electrode plate; a second electrode plate and a second feedback electrode plate located on a second side of the movable electrode plate. The first electrode plate, the first feedback electrode plate, the second electrode plate, the second feedback electrode plate respectively form a first capacitor, a first feedback capacitor, a second capacitor and a second feedback capacitor with the movable electrode plate. The first and the second capacitors are coupled to a detection circuit for performing differential detection on the first and the second capacitors; the first feedback capacitor and the second feedback capacitor are coupled to a feedback circuit for eliminating nonlinear relationship between an output voltage of the detection circuit and a displacement of the movable electrode plate.

A MEMS assembly includes a package, wherein the package includes a substrate and a cover element, wherein a through opening is provided in the cover element, a MEMS component within the package on the cover element, an integrated circuit arrangement within the package on the substrate, and a support component within the package on the substrate, wherein the support component on the substrate is electrically coupled, by first electrical connection lines, to the MEMS component on the cover element and is electrically coupled, by second electrical connection lines, to the circuit arrangement on the substrate in order to produce an electrical connection between the MEMS component and the integrated circuit arrangement.

A LIDAR system, optical coupler for a LIDAR system and method of optical communication. The LIDAR system includes an optical coupler having a chip-side face in optical communication with a photonic chip and a scanner-side face in optical communication with a scanner, the optical coupler comprising a polarization rotator and a birefringent wedge. A first beam of light is transmitted from the first location toward a chip-side face of an optical coupler to direct the first beam of light, via the optical coupler, along an optical path at a scanner-side face of the optical coupler. A second beam of light is received along the optical path at the scanner-side face and directed the second beam of light toward a second location.

A microelectromechanical system (MEMS) sensor testing device, system and method are provided. The testing device includes a socket having a plurality of pads configured to receive a respective plurality of pins of the MEMS sensor, a body having a plurality of operable positions associated with a respective plurality of orientations of the MEMS sensor and circuitry which performs a method for testing the MEMS sensor in the plurality of operable positions. The method includes, for each position of the plurality of operable positions, outputting an indication of the position to the plurality of operable positions, receiving one or more measurements made by the MEMS sensor at the respective position and determining whether the one or more measurements satisfy a reliability criterion. The method includes generating a report based on the plurality of measurements and indicating whether the plurality of measurements satisfy a plurality of reliability criteria, respectively.

The disclosure provides a system, comprising: a MEMS capacitive transducer, comprising one or more first capacitive plates coupled to a first node and one or more second capacitive plates coupled to a second node; biasing circuitry coupled to the first node, operable to provide a biasing voltage to the one or more first capacitive plates; and test circuitry coupled to the second node, operable to: selectively apply one or more current sources to the second node, so as to charge and discharge the MEMS capacitive transducer and so vary a signal based on a voltage at said second node between an upper value and a lower value; determine a parameter that is indicative of a time period of the variation of the signal; and determine a capacitance of the MEMS capacitive transducer based on the parameter that is indicative of the time period.

The present disclosure generally relates to a method, and apparatus implementing the method for removing particulate accumulation from an optical element of a micro electromechanical systems (MEMS) package. The method may select a cleaning mode based, at least in part on, one or more of output of a sensor or a maintenance routine. Cleaning modes may include actuating, using an actuator of the MEMS package, one of a plurality of motion modes across the optical element. Optionally, the cleaning mode may include applying, using a power source of the MEMS package, a charge to the optical element. The disclosed techniques may enable the MEMS package to automatically and dynamically remove particulate matter without introducing additional mechanical elements.