A MEMS assembly includes a package, wherein the package includes a substrate and a cover element, wherein a through opening is provided in the cover element, a MEMS component within the package on the cover element, an integrated circuit arrangement within the package on the substrate, and a support component within the package on the substrate, wherein the support component on the substrate is electrically coupled, by first electrical connection lines, to the MEMS component on the cover element and is electrically coupled, by second electrical connection lines, to the circuit arrangement on the substrate in order to produce an electrical connection between the MEMS component and the integrated circuit arrangement.

An application specific integrated circuit (ASIC) chip is provided. Stress in various directions can be measured by disposing symmetrical four-corner+middle delay chain combinations in three dimensions inside the ASIC chip. Two sensors using the ASIC chip are further provided. In one sensor, a micro-electromechanical system (MEMS) chip is stacked with the ASIC chip. In the other sensor, the MEMS chip and the ASIC chip are symmetrically arranged. After being stacked and symmetrically arranged, the MEMS chip and the ASIC chip have highly consistent stress concentration characteristics, which can calibrate stress in various directions and effectively improve accuracy and temperature stability of the MEMS chip. In addition, an electric toothbrush using the ASIC chip is further provided, which can effectively improve consistency, stability, reliability, sensitivity, and linearity of stress detection, and can more accurately compensate for a temperature drift.

The present disclosure generally relates to a method, and apparatus implementing the method for removing particulate accumulation from an optical element of a micro electromechanical systems (MEMS) package. The method may select a cleaning mode based, at least in part on, one or more of output of a sensor or a maintenance routine. Cleaning modes may include actuating, using an actuator of the MEMS package, one of a plurality of motion modes across the optical element. Optionally, the cleaning mode may include applying, using a power source of the MEMS package, a charge to the optical element. The disclosed techniques may enable the MEMS package to automatically and dynamically remove particulate matter without introducing additional mechanical elements.

The present disclosure relates to a system comprising: a MEMS capacitive transducer comprising a first electrode and a second electrode; integrator circuitry; and test circuitry. The MEMS capacitive transducer forms part of a negative feedback path of the integrator circuitry, and the test circuitry is operable to selectively apply one or more current sources to an input of the integrator circuitry based on a signal at an output of the integrator so as to generate a periodic signal at the output of the integrator circuitry. A frequency of the periodic signal is at least partially dependent upon a capacitance of the MEMS capacitive transducer. The system is further operative to determine a parameter indicative of the frequency of the periodic signal and to estimate the capacitance of the MEMS capacitive transducer based on the parameter indicative of the frequency of the periodic signal.

According to one embodiment, a vibration apparatus includes a coupled vibration mechanism which includes a plurality of mass parts and connects the mass parts, a catch and release mechanism which catches a vibrating mass parts to stop vibration and releases a caught mass parts to start vibration and a control circuitry configured to determine whether catching the mass parts by the catch and release mechanism is successful or failed and control the catch and release mechanism for raising possibility for catching the mass parts by the catch and release mechanism, if the catching the mass parts is determined as failed.

The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

A microelectromechanical systems (MEMS) device includes a MEMS die and an electrical circuit electrically connected to the MEMS die. The electrical circuit includes a first capacitor that produces a first output signal based on a signal received from the MEMS die, and a second capacitor that produces a second output signal based on a signal received from the MEMS die. The electrical circuit is configured to determine a nominal capacitance of the MEMS die based on a ratio of the first output signal to the second output signal and a ratio of the capacitances of the first and second capacitors.

A wearable sound device includes a venting module, configured to form at least one vent to connect a volume within the wearable sound device and ambient, and a sound producing device, configured to produce sound according to an equalized input signal. The venting module, including at least one venting device, operates among a plurality of statuses corresponding to a plurality of degrees of opening. A controller generates the equalized input signal according to a degree of opening among the plurality of degrees of opening, in order to counteract a roll off caused by the at least one vent.

A triple-membrane MEMS device includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, a sealed low pressure chamber between the first membrane and the third membrane, a first stator and a second stator in the sealed low pressure chamber, and a signal processing circuit configured to read-out output signals of the triple-membrane MEMS device.

The application describes a MEMS transducer comprising a layer of conductive material provided on a surface of a layer of membrane material. The layer of conductive material comprises first and second regions, wherein the thickness and/or the conductivity of the/each first and second regions is different.