A chip-scale coherent lidar system includes a photonic chip that includes a light source, a transmit beam coupler to provide an output signal, and a receive beam coupler to receive a received signal based on a reflection of the output signal by a target. The system also includes a transmit beam steering device to transmit the output signal out of the system, and a receive beam steering device to obtain the received signal into the system. A transmit beam curved mirror reflects the output signal from the transmit beam coupler to the transmit beam steering device. A receive beam curved mirror reflects the received signal from the receive beam steering device to the receive beam coupler. The transmit beam curved mirror and the receive beam curved mirror are formed in a substrate that is heterogeneously integrated with the photonic chip.

A LIDAR system, LIDAR chip and method of manufacturing a LIDAR chip. The LIDAR system includes a photonic chip configured to transmit a transmitted light beam and to receive a reflected light beam, a scanner for directing the transmitted light beam towards a direction in space and receiving the reflected light beam from the selected direction, and a fiber-based optical coupler. The photonic chip and the scanner are placed on a semiconductor integrated platform (SIP). The fiber-based optical coupler is placed on top of the photonic chip to optically couple to the photonic chip for directing the a transmitted light beam from the photonic chip to the scanner and for directing a reflected light beam from the scanner to the photonic chip.

The invention discloses a MEMS sensor detection device and a MEMS sensor system, wherein the MEMS sensor detection device comprises: a readout circuit used for analog signal processing of the output signal of the MEMS sensor to generate detection voltage; a cancellation voltage generation circuit used for generating a gravity cancellation voltage according to the detection voltage, wherein the gravity cancellation voltage and the gravity acceleration are in a positive proportional relationship; a selection circuit used for selecting the detection voltage output in a feedback phase and selecting the gravity cancellation voltage output in a gravity cancellation phase, wherein in one detection period, the feedback phase is located after the gravity cancellation phase; and a feedback circuit used for generating a feedback voltage according to the output voltage of the selection circuit, wherein the feedback voltage is in a positive proportional relationship with the output voltage of the selection circuit. The MEMS sensor detection device and the MEMS sensor system disclosed by the invention can cancel the influence of gravity acceleration and improve the sensitivity of the MEMS sensor system.

A microelectromechanical system (MEMS) sensor testing device, system and method are provided. The testing device includes a socket having a plurality of pads configured to receive a respective plurality of pins of the MEMS sensor, a body having a plurality of operable positions associated with a respective plurality of orientations of the MEMS sensor and circuitry which performs a method for testing the MEMS sensor in the plurality of operable positions. The method includes, for each position of the plurality of operable positions, outputting an indication of the position to the plurality of operable positions, receiving one or more measurements made by the MEMS sensor at the respective position and determining whether the one or more measurements satisfy a reliability criterion. The method includes generating a report based on the plurality of measurements and indicating whether the plurality of measurements satisfy a plurality of reliability criteria, respectively.

A lidar system includes a light source to generate a frequency modulated continuous wave (FMCW) signal, and a waveguide splitter to split the FMCW signal into an output signal and a local oscillator (LO) signal. A transmit coupler provides the output signal for transmission. A receive lens obtains a received signal resulting from reflection of the output signal by a target. A waveguide coupler combines the received signal and the LO signal into a first combined signal and a second combined signal. A first phase modulator and second phase modulator respectively adjust a phase of the first combined signal and the second combined signal to provide a first phase modulated signal and a second phase modulated signal to a first photodetector and a second photodetector. A processor processes a first electrical signal and a second electrical signal from the first and second photodetectors to obtain information about the target.

A chip-scale lidar system includes a first light source to output a first signal, and a second light source to output a second signal. A transmit beam coupler provides an output signal for transmission that includes a portion of the first signal and a portion of the second signal, and receive beam coupler obtains a received signal resulting from reflection of the output signal by a target. The system includes a first and second set of photodetectors to obtain a first and second set of electrical currents from a first and second set of combined signals including a first and second portion of the received signal. A processor obtains Doppler information about the target from the second set of electrical currents and obtains range information about the target from the first set of electrical currents and the second set of electrical currents.

According to one embodiment, a vibration apparatus includes a coupled vibration mechanism which includes a plurality of mass parts and connects the mass parts, a catch and release mechanism which catches a vibrating mass parts to stop vibration and releases a caught mass parts to start vibration and a control circuitry configured to determine whether catching the mass parts by the catch and release mechanism is successful or failed and control the catch and release mechanism for raising possibility for catching the mass parts by the catch and release mechanism, if the catching the mass parts is determined as failed.

A MEMS device comprising a substrate comprising a die and a plurality of side-walls disposed upon the MEMS die, a proof-mass coupled to the substrate, the proof-mass is configured to be displaced within a first plane that is parallel to the die, wherein the proof-mass is configured to contact at least a sidewall, wherein the proof-mass is configured to adhere to the side-wall as a result of stiction forces, a driving circuit configured to provide a driving voltage in response to a driving signal indicating that the proof-mass is adhered to the side-wall, and an actuator coupled to the driving circuit disposed upon the side-wall, wherein the actuator is configured to receive a driving voltage and to provide an actuator force to the proof mass within the first plane in a direction away from the side-wall in response to the driving voltage, wherein the actuator force exceeds the stiction forces.

Various embodiments of the present disclosure are directed towards a microelectromechanical system (MEMS) device. The MEMS device includes a first dielectric structure disposed over a first semiconductor substrate, where the first dielectric structure at least partially defines a cavity. A second semiconductor substrate is disposed over the first dielectric structure and includes a movable mass, where opposite sidewalls of the movable mass are disposed between opposite sidewall of the cavity. A first piezoelectric anti-stiction structure is disposed between the movable mass and the first dielectric structure, wherein the first piezoelectric anti-stiction structure includes a first piezoelectric structure and a first electrode disposed between the first piezoelectric structure and the first dielectric structure

The present disclosure relates to a system for detecting movement of a microelectromechanical system (MEMS) device. The system uses a drive voltage signal source for generating a low frequency drive voltage signal for driving the MEMS device. An excitation signal source may be used for generating an excitation signal which is also applied to the MEMS device. The excitation signal has a frequency which is above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the excitation signal. A sensing impedance is used to help generate a signal which is responsive to the capacitance of the MEMS device. The capacitance of the MEMS device changes in response to movement of the MEMS device. An output subsystem is provided which responds to changes sensed by the sensing impedance, and which produces an output voltage signal. A filter filters the output voltage signal to produce a filtered output voltage signal. The filtered output voltage signal is indicative of a position of the MEMS device.