A method for ascertaining at least one dynamic parameter of a MEMS apparatus, which has at least one movable component, and the at least one dynamic parameter describes a dynamic property of the at least one movable component. A test signal which has at least one static excitation of constant amplitude is applied to the MEMS apparatus, and a response signal of the MEMS apparatus to the test signal is detected. At least one static parameter of the MEMS apparatus is ascertained by evaluating the response signal in respect of the at least one static excitation, using a model of at least the movable component of the MEMS apparatus, the at least one static parameter describing a geometric and/or structural property of the at least one movable component. The at least one dynamic parameter of the MEMS apparatus is calculated based on the ascertained at least one static parameter.

Packaged MEMS device having a MEMS die of semiconductor material formed by a sensor body and a cap mutually bonded. The sensor body incorporates at least one MEMS component and the cap carries a humidity sensor having a first and a second group of electrodes, facing each other and capacitively coupled, configured to provide a humidity signal. A packaging mass, of electrically insulating material, surrounds the MEMS die and the humidity sensor.

Aspects are directed to MEMS-type devices. In specific example, a MEMS device is to become actuated at least in part by an input signal and is coupled to or integrated with: a control circuit including at least one micro-mirror to provide a field of view; modulation circuitry to modulate the input signal via signal modulation, wherein in response to the input signal, as modulated, driving the MEMS apparatus, the field of view changes based on the operation of the control circuit. Such a MEMS device may be further configured to operate as a separate unit and/or with another device provide input signals, and to derive a signal indicative of nonlinearities or of changes in capacitance related to the MEMS device.