A method of forming a semiconductor structure includes forming two or more catalyst nanoparticles from a metal layer disposed over a substrate in two or more openings of a hard mask patterned over the metal layer. The method also includes growing two or more carbon nanotubes using the catalyst nanoparticles, and removing the carbon nanotubes to form two or more nanoscale pores. The two or more nanoscale pores may be circular nanoscale pores having a substantially uniform diameter. The two or more openings in the hard mask may have non-uniform size, and the substantially uniform diameter of the two or more nanopores may be controlled by a size of the carbon nanotubes.

Nanopillar-based closed ring resonator (CRR) MMs, utilizing displacement current in the nano gap medium between nanopillars that significantly increases energy storage in the MMs, leading to an enhanced Q-factor of at least 11000. A metallic nanopillar array is designed in the form of a closed ring (e.g., square-shape) CRR.

The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.

A method of forming a semiconductor structure includes forming a substrate, forming an anchor layer, and forming one or more self-aligned nanotip pillar pairs disposed vertically between the substrate and the anchor layer. A given one of the nanotip pillar pairs comprises a bottom nanotip pillar and a top nanotip pillar, the bottom nanotip pillar comprising a base portion disposed on a top surface of the substrate and the top nanotip pillar comprising a base portion disposed in the anchor layer. The bottom nanotip pillar and the top nanotip pillar comprise sidewalls that taper to points as distance from the respective base portions increases.

A 3D nanopore device for characterizing biopolymer molecules includes a first selecting layer having a first axis of selection. The device also includes a second selecting layer disposed adjacent the first selecting layer and having a second axis of selection orthogonal to the first axis of selection. The device further includes an third electrode layer disposed adjacent the second selecting layer, such that the first selecting layer, the second selecting layer, and the third electrode layer form a stack of layers along a Z axis and define a plurality of nanopore pillars.

Methods are provided for manufacturing well-controlled, solid-state nanopores and arrays of well-controlled, solid-state nanopores by a cyclic process including atomic layer deposition (ALD), or chemical vapor deposition (CVD), and etching. One or more features are formed in a thin film deposited on a topside of a substrate. A dielectric material is deposited over the substrate having the one or more features in the thin film. An etching process is then used to etch a portion of the dielectric material deposited over the substrate having the one or more features in the thin film. The dielectric material deposition and etching processes are optionally repeated to reduce the size of the features until a well-controlled nanopore is formed through the thin film on the substrate.

A stabilized elementary metal structure is disclosed. The stabilized elementary metal structure may include an elementary metal having at least one layer and having a two-dimensional layer structure, and an organic molecular layer provided on at least one of a top surface and a bottom surface of the elementary metal.

A nanotube particle device for two dimensional and three dimensional printing or additive/subtractive manufacturing. The nanotube particle device comprising a nanotube, a particle shooter, a positioning mechanism, and a detection sensor. The particle shooter shoots a particle down the nanotube towards a target, the detection sensor senses the collision of the particle with the target, and the positioning mechanism re-adjusts the positioning of the nanotube based on the results of the collision. A method for aiming the particle shooter and additive/subtractive manufacturing are also disclosed and described.

A nanotube particle device for two dimensional and three dimensional printing or additive/subtractive manufacturing. The nanotube particle device comprising a nanotube, a particle shooter, a positioning mechanism, and a detection sensor. The particle shooter shoots a particle down the nanotube towards a target, the detection sensor senses the collision of the particle with the target, and the positioning mechanism re-adjusts the positioning of the nanotube based on the results of the collision. A method for aiming the particle shooter and additive/subtractive manufacturing are also disclosed and described.

Carbon opals, a form of colloidal crystal, are composed of ordered two-dimensional or three-dimensional arrays of Monodispersed Starburst Carbon Spheres (MSCS). Methods for producing such carbon opals include oxidizing as-synthesized MSCS, for example by heating in air, to increase surface charge. Such oxidation is believed to decrease settling rates of a colloidal suspension, enabling formation of an ordered colloidal crystal. Inverse opals, composed of any of a wide variety of materials, and based on a carbon opal template, have a reciprocal structure to a carbon opal. Inverse opals are formed by methods including: forming a carbon opal as described, impregnating a desired material into pores in the carbon opal to produce a hybrid structure, and removing the carbon portion from the hybrid structure.