Provided is a bubble removal apparatus for removing a bubble on a substrate during a process of manufacturing a display panel or a semiconductor using a liquid, and more particularly, to a bubble removal apparatus using acoustic waves that collects a bubble on a substrate using an acoustic wave and removes the bubble by moving the bubble to a desired position, and a bubble removal method using the same.

An acoustic technique designed to increase the gas-dissolution rate of a bubble in a liquid media is proposed. Increased gas-dissolution rate is achieved by increasing the bubble's surface-to-volume ratio via bubble fragmentation. This is achieved by attaching an electroacoustic transducer to the system or load in which bubbles travel and exciting the transducer at the frequency of resonance. The electric resonance of the transducer attached to the system corresponds in frequency to the mechanical resonance of the system or load which allows for achieving such state without the use of an internally placed hydrophone to certify the resonance state. The acoustic bubble fragmentation technique increased the dissolution rate 4 to 5 times of bubbles with initial diameters between 150 and 550 μm in distilled water and in medical grade saline solution.

A system may include an output manifold that may be in fluid communication with a reservoir and that may include multiple discharge ports. Each of the discharge ports may be configured to discharge electrorheological fluid into a housing. A recovery manifold may be in fluid communication with the reservoir and include multiple recovery ports. Each of the recovery ports may be configured to receive the electrorheological fluid from a housing. A gas remover may be positioned to extract gas from the electrorheological fluid received from the recovery ports. A housing may be connected to the system, and electrorheological fluid from the system may be pumped through the housing and the gas remover.

An inline process for imparting sonic energy plus a liquid gas separator to a continuous flow of a heterogeneous liquid to de-gassify the liquid and thereby provide for separation and extraction of selected liquid and gas components. The device utilizes a flat plate oriented in the direction of flow within the liquid so as to impart pressure fronts into the liquid to initiate liquid gas separation followed by a line pressure regulation, fluid jet stream, device to impart fluidic shear to fluid jet stream, and a separation vessel to facilitate mass transfer.

Embodiments of the present disclosure describe an inline demulsification system (400, 430) including an inline flow conditioner (402,410) for separating a multiphase fluid into a liquid phase (420) and a gas phase (422), wherein the liquid phase (420) includes an emulsion; and an ultrasonic wave device (404), provided downstream from the flow conditioner (402, 410), including one or more ultrasonic probes (442) for emitting ultrasonic waves (452) towards the multiphase fluid, wherein the ultrasonic waves (452) demulsify at least a portion of the emulsion. Embodiments of the present disclosure also describe related systems and methods.

A device for degassing and/or dehydrating a hydraulic oil includes a flow lance, a flow duct, and a decoupling module. The flow lance includes a restriction site via which the hydraulic oil flows under a high pressure drop. The flow duct is configured as a pipe that is located downstream of the restriction site. The quantity of oil that flows via the restriction site and a throughflow cross section of the restriction site are coordinated to one another such that a cavitation zone or supercavitation zone forms downstream of the restriction site. The flow duct has a significantly larger cross section with respect to the throughflow cross section of the restriction site. For a quiet operation of the device, the flow lance is held in the decoupling module via which the flow lance is configured to be fastened in a vibration-decoupled manner to a tank.

Embodiments of the present disclosure describe an inline demulsification system (400, 430) including an inline flow conditioner (402,410) for separating a multiphase fluid into a liquid phase (420) and a gas phase (422), wherein the liquid phase (420) includes an emulsion; and an ultrasonic wave device (404), provided downstream from the flow conditioner (402, 410), including one or more ultrasonic probes (442) for emitting ultrasonic waves (452) towards the multiphase fluid, wherein the ultrasonic waves (452) demulsify at least a portion of the emulsion. Embodiments of the present disclosure also describe related systems and methods.

A system can include a multi-material fluid having a mixture of a first material and a second material. The system can also include a first vessel into which the multi-material fluid is disposed. The system can further include a first sonication device disposed, at least in part, in the multi-material fluid in the first vessel. The first sonication device, when operating, can emit ultrasound waves into the multi-material fluid. The ultrasound waves separate the first material and the second material from each other in the first vessel.

A system may include an output manifold that may be in fluid communication with a reservoir and that may include multiple discharge ports. Each of the discharge ports may be configured to discharge electrorheological fluid into a housing. A recovery manifold may be in fluid communication with the reservoir and include multiple recovery ports. Each of the recovery ports may be configured to receive the electrorheological fluid from a housing. A gas remover may be positioned to extract gas from the electrorheological fluid received from the recovery ports. A housing may be connected to the system, and electrorheological fluid from the system may be pumped through the housing and the gas remover.

An operating point for control of an acoustic transducer can drift during operation and be compensated. A model for the transducer and/or environment frequency response is provided and used to compensate feedback from the transducer to determine an adjustment for the operating point. The model can be recalibrated during operation.