A substrate processing device includes: a chamber; a substrate processing mechanism that has a holding member, and discharges a processing fluid onto a substrate held by the holding member; a joint pipe that has a lower opening provided below the holding member, and an upper opening provided above the holding member, and is disposed such that at least part of the joint pipe from the lower opening to the upper opening passes through the outside of the chamber; and an air flow generator that is provided in the joint pipe. The air flow generator circulates an atmosphere in the chamber by discharging the atmosphere in the chamber from the lower opening to the joint pipe to allow the atmosphere to pass through the joint pipe, thereby introducing the atmosphere again into the chamber via the upper opening so that a downflow of the atmosphere occurs in the chamber.

Disclosed is a compact separation system suitable for separating components of a multiphase fluid stream. The compact separation system utilizes a cylindrical cyclone in conjunction with a filtration system. The filtration system incorporates filtration media having at least one of the following characteristics: hydrophilic-oleophobic characteristics or oleophilic-hydrophobic characteristics. The separation system is configured to substantially preclude gas under-carrying into the liquid conduit lines.

An apparatus (1) for additive manufacturing of three-dimensional objects (2) by successive, selective layer-by-layer exposure and thus successive, selective layer-by-layer solidification of construction material layers of construction material (3) that can be solidified by means of an energy beam, comprising a pipe structure (12), and a filter device (7) that is connected to the pipe structure (12), provided for filtering the process gas (9), wherein the filter device (7) comprises several filter modules (14) that can be or are arranged exchangeably connected to the pipe structure (12).

An apparatus (1) for additive manufacturing of three-dimensional objects (2) by successive, selective layer-by-layer exposure and thus successive, selective layer-by-layer solidification of construction material layers of construction material (3) that can be solidified by means of an energy beam, comprising a filter device (7) provided for filtering process gas (9) arising in the course of performing additive construction processes in a process chamber (8) of the apparatus (1), especially containing impurities arising in relation to the process, wherein the filter device (7) comprises several filter modules (14) with a filter module housing (15) each, wherein every filter module housing (15) comprises a filter body receiving room (16) configured with a defined geometry provided for receiving a defined number of filter bodies (18) configured with a defined geometry, wherein every filter module (14) comprises connection interfaces (19, 20) on the filter module via which it is or can be connected, if required, to defined connection areas (21, 22) of a pipe structure (12) of the apparatus that is or can be flown through by the process gas (9).

The present disclosure generally relates to strainers for removing particulates from fluid media, including filter assemblies for strainers having improved sealing and straining characteristics.