A corona plasma cell includes a polarized electrode and a ground electrode, including a cylinder and a porous film, with the cylinder having a low profile and the polarized electrode not entering the cylinder; a corona plasma dual element including a first cell, a second cell having such a structure, which first and second cell are symmetrically arranged; and finally a plasma reactor including a plurality of cells or dual elements.

A method of reducing corrosion of a heat exchanger of an incinerator, said method comprising the steps ofintroducing oxygen-comprising gas and a particulate fuel into a combustion chamber,introducing an additive material comprising i) clay and ii) calcium carbonate into the incinerator,recuperating heat from the flue gas using a heat exchanger. For protecting the heat exchanger, the additive material is a powdery material that is introduced into the flue gas upstream of the heat exchanger, a powder particle of said powdery additive material comprising granules, each granule comprising a mixture of clay and calcium carbonate, at least 10% by weight relative to the calcium carbonate being calcium carbonate in a form that when characterized by means of Thermogravimetric Analysis under a nitrogen atmosphere with a rate of increase in temperature of 10 JC per minute has decomposed completely when a temperature of 875 C. has been reached.

A method of reducing corrosion of a heat exchanger of an incinerator, said method comprising the steps ofintroducing oxygen-comprising gas and a particulate fuel into a combustion chamber,introducing an additive material comprising i) clay and ii) calcium carbonate into the incinerator,recuperating heat from the flue gas using a heat exchanger. For protecting the heat exchanger, the additive material is a powdery material that is introduced into the flue gas upstream of the heat exchanger, a powder particle of said powdery additive material comprising granules, each granule comprising a mixture of clay and calcium carbonate, at least 10% by weight relative to the calcium carbonate being calcium carbonate in a form that when characterized by means of Thermogravimetric Analysis under a nitrogen atmosphere with a rate of increase in temperature of 10 JC per minute has decomposed completely when a temperature of 875 C. has been reached.

Method for detecting compromised zone in cleanroom, including the following steps: (1) cleanroom including air supply space, ceiling, clean space, elevated floor, and return air space that are arranged sequentially from top down, wherein ceiling is divided into plurality of air supply zones, elevated floor is divided into plurality of exhaust zones, air supply zones and exhaust zones are arranged vertically in one-to-one corresponding manner with cylindrical space formed between corresponding two, cleanroom further includes detection mechanisms corresponding, one-to-one, to cylindrical spaces, and detection mechanism includes corrosion test specimen and detection unit; and (2) monitoring electrical parameters of corrosion test specimen of each detection mechanisms, and determining, if electrical parameters of corrosion test specimen of one detection mechanism change continuously in trend, that cylindrical space corresponding to this detection mechanism is compromised zone.

Method for detecting compromised zone in cleanroom, including the following steps: (1) cleanroom including air supply space, ceiling, clean space, elevated floor, and return air space that are arranged sequentially from top down, wherein ceiling is divided into plurality of air supply zones, elevated floor is divided into plurality of exhaust zones, air supply zones and exhaust zones are arranged vertically in one-to-one corresponding manner with cylindrical space formed between corresponding two, cleanroom further includes detection mechanisms corresponding, one-to-one, to cylindrical spaces, and detection mechanism includes corrosion test specimen and detection unit; and (2) monitoring electrical parameters of corrosion test specimen of each detection mechanisms, and determining, if electrical parameters of corrosion test specimen of one detection mechanism change continuously in trend, that cylindrical space corresponding to this detection mechanism is compromised zone.

An article for use in a plasma processing apparatus includes a gas supply pipe, and a component disposed in the gas supply pipe. The component is configured to cause radicals of gas passing through the gas supply pipe to be deactivated in the component.

An article for use in a plasma processing apparatus includes a gas supply pipe, and a component disposed in the gas supply pipe. The component is configured to cause radicals of gas passing through the gas supply pipe to be deactivated in the component.

Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.

Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.

A venturi-type composite nozzle device for suctioning and removing air pollutants is disclosed. The venturi-type composite nozzle device suctions air pollutants in the vicinity thereof by using negative pressure formed through the venturi principle, and then mixes same with water, jets the mixed water and brings same into contact with the air pollutants again, so as to have a large adsorption ratio of air pollutants in comparison to the amount of water usage, and enables water to be reduced by that amount, and thus has excellent operating performance. To perform such functions, the device employs a venturi-type intake casing, an introducing-spray nozzle, and an impeller.