B01D67/0037

Ultra-thin, Pinhole-free, Flexible Metal-Organic Films

Described herein are facile, one-step initiated plasma enhanced chemical vapor deposition (iPECVD) methods of synthesizing hyper-thin (e.g., sub-100 nm) and flexible metal organic covalent network (MOCN) layers. As an example, the MOCN may be made from zinc tetraphenylporphyrin (ZnTPP) building units. When deposited on a membrane support, the MOCN layers demonstrate gas separation exceeding the upper bounds for multiple gas pairs while reducing the flux as compared to the support alone.

FUNCTIONAL COATING
20170056920 · 2017-03-02 ·

A method for creating a functional coating on a substrate in vacuum from a deposited monomer material in absence of oxygen and/or radiation from a radiation source. The substrate may be preliminarily activated with inert gas to form an activated layer thereon. The method may include depositing a fluorine containing monomer having a first CF.sub.3:CF.sub.2 ratio, and forming, on the substrate, the self-assembled polymer coating that has a second CF.sub.3:CF.sub.2 ratio, where the first and second CF.sub.3:CF.sub.2 ratios are equal.

Filter apparatus for semiconductor device fabrication process

A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane and a plurality of through holes.

FILTER APPARATUS FOR SEMICONDUCTOR DEVICE FABRICATION PROCESS

A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane and a plurality of through holes.

Biocompatible polymeric filtration membrane with pores defined by uniform passages

A biocompatible polymeric membrane includes pores defined between two material layers, where the first membrane material layer includes strips, and the second membrane material binds to each of the plurality of first membrane material layer strips includes a plurality of windows exposing each of the first membrane material strips. The biocompatible polymeric filtration membrane comprises pores defined by uniform passages defined by the first membrane material layer strips and the second membrane material layer within each window.