A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.

Disclosed is a method of adding a feed medium into a bioprocess. The method includes receiving a stream of CO2-rich gas; treating the stream of CO2-rich gas to remove impurities therefrom; preparing an aqueous mixture for absorbing carbon dioxide, the aqueous mixture having at least one inorganic nitrogen compound in a range of 0.1-50 wt % of the aqueous mixture, the at least one inorganic nitrogen compound is a nitrogen source for microorganisms; absorbing carbon dioxide from the stream of CO2-rich gas into the aqueous mixture, the aqueous mixture with absorbed carbon dioxide forming a feed medium; and adding the feed medium into a bioprocess.

A system for use in carbon negative emission methods, a nitrogen oxide ultra-low emission system, an air supply device and a flow control module. The system for use in carbon negative emission methods enables biomass to produce inorganic carbon and pyrolysis gas/gasification gas to realize negative emission of carbon. The nitrogen oxide ultra-low emission system enables fuel to be in mixed combustion with the pyrolysis gas/gasification gas to remove nitrogen oxides, which realizes ultra-low emission of the nitrogen oxides. The air supply device is in communication with a biomass pyrolysis coupling partial gasification and is in communication with the system for use in carbon negative emission methods and the nitrogen oxide ultra-low emission system. The pyrolysis gas/gasification gas enters the nitrogen oxide ultra-low emission system. The flow control module controls a flow ratio of a pyrolysis agent/gasification agent entering the system for use in carbon negative emission methods and flow of the pyrolysis gas/gasification gas and air entering the nitrogen oxide ultra-low emission system.

Provided are: an exhaust gas treatment catalyst capable of improving NO conversion rate when performing denitrification using CO as a reducing agent, and improving CO oxidation rate when oxidizing CO present in the exhaust gas; a method for producing an exhaust gas treatment catalyst; and an exhaust gas treatment system. The exhaust gas treatment catalyst is a catalyst which uses CO as a reducing agent to treat exhaust gas from a sintering furnace, and contains: a support that is a metal oxide or metal sulfate; and an active metal containing at least iridium supported by the support, wherein the specific surface area of the catalyst is 100 m.sup.2/g or less, and the crystallite size of iridium in the catalyst is 10-25 nm.

Carbon negative emission methods, a nitrogen oxide ultra-low emission system, an air supply device and a flow control module. The system for use in carbon negative emission methods enables biomass to produce inorganic carbon and pyrolysis gas/gasification gas to realize negative emission of carbon. The nitrogen oxide ultra-low emission system enables fuel to be in mixed combustion with the pyrolysis gas/gasification gas to remove nitrogen oxides, which realizes ultra-low emission of the nitrogen oxides. The air supply device is in communication with a biomass pyrolysis coupling partial gasification and is in communication with the system for use in carbon negative emission methods and the nitrogen oxide ultra-low emission system. The pyrolysis gas/gasification gas enters the nitrogen oxide ultra-low emission system. The flow control module controls a flow ratio of a pyrolysis agent/gasification agent entering the system for use in carbon negative emission methods and flow of the pyrolysis gas/gasification gas and air entering the nitrogen oxide ultra-low emission system.

A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.

Apparatus for reactivating a sulfur poisoned oxidation catalyst operating in exhaust of a lean burn, methane source fueled combustion device. Reactivation includes desulfation of the poisoned catalyst through a CO supplementation apparatus communicating with the control unit that is adapted to supplement CO content in exhaust reaching the catalyst, while avoiding an overall rich exhaust atmosphere at the catalyst (e.g., an added supply of hydrocarbons to one or more-of the lean burn engine's combustion chambers as by an ECU controlled extra supply of NG to some of the combustion chambers). Also featured is a method for desulfation of an oxidation catalyst of a lean burn CNG engine by supplying excess CO to exhaust reaching the catalyst while retaining an overall lean state, and a method of assembling an apparatus for reactivating a sulfur deactivated lean burn NG engine catalyst by assembling a CO supplementation apparatus with control unit.

A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.

The present invention relates to a VOC reduction system and a VOC reduction method that applies pulse type thermal energy to a catalyst to activate the catalyst and oxidizes and removes the VOC.

The present invention provides a catalyst for catalytic reduction of an industrial flue gas SO.sub.2 with CO to prepare sulfur, a method for preparing the same and use thereof. A CeO.sub.2 nanocarrier is prepared by using a hydrothermal method, La and Y are loaded as active components, pre-sulfurization is conducted with 6% of SO.sub.2 and 3% of CO, and finally, the catalyst is prepared. The catalyst has high reactivity and sulfur selectivity and strong stability. The by-product sulfur generated by the reaction is recovered with a solvent CS.sub.2, and the solvent CS.sub.2 is recovered by using a distillation process. The preparation method is low in cost, causes no secondary pollution and is high in sulfur recovery rate. The problem of low sulfur production in China at present is solved.