Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

The present invention relates to an intensified 5-bed and 6-bed PSA process cycles features, as well as fast rate adsorbents that enable the intensified PSA system to meet cost and performance target are identified. The proposed capital efficient H.sub.2PSA system offers opportunity to reduce PSA capital expenditure by ten percent (10%).

The invention relates to a process and apparatus for separation of gas mixtures with reduced maintenance costs. The process and the apparatus consist of a feed stream separation stage (1), and a retentate separation stage (2), of which both are membrane separation stages, wherein the first retentate stream (7) is heated to temperature higher than the temperature of the feed stream (5), before it is introduced to the retentate separation stage (2), and the total capacity of the membranes used in the retentate separation stage (2) is higher than the total capacity of the membranes used in the feed stream stage (1).

A wheel lock or clip for maintaining position of a thumbwheel or wheel of a rotary actuated delivery device includes an arcuate or curved body having a live hinge extending therefrom, the hinge connected to an arm having an engagement tooth extending therefrom. The tooth is operatively connected to tab for actuation by a user to disengage the engagement tooth from teeth of gear or barrel of a wheel or a thumbwheel of the rotary actuated device to thereby allow free movement of the wheel or thumbwheel.

An air composition adjusting device includes: a carbon dioxide separator that separates carbon dioxide from air-to-be-treated to be supplied to a target space; a gas supply path including a high concentration gas supply path through which the carbon dioxide separator communicates with the target space; and a controller that performs a carbon dioxide concentration raising operation of supplying a high carbon dioxide concentration gas, which has a higher carbon dioxide concentration than air-to-be-treated before being treated, to the target space through the high concentration gas supply path.

A feed containing methane and nitrogen gas is processed in a three-stage membrane system, each stage of which is selective for methane over nitrogen. The methane enriched permeate from the first stage is removed as product gas. The methane-depleted residue from the second stage is purified in second and third cascaded stages to provide second and third permeates and second and third residues. The third stage permeate is recycled to the feed.

Provided is a system for adsorbing a gaseous component comprising nitrogen from a pressurized flow of air containing the gaseous component. The system comprises a first adsorption bed, and a second adsorption bed. Each of the adsorption beds are suitable for selectively adsorbing the gaseous component from the flow of air to produce a product gas having a higher oxygen concentration than that of the air. The system includes an adjustable feed gas supply which alternately supplies the first adsorption bed and the second adsorption bed with the air. The first adsorption bed is supplied with air during a first half cycle of operation of the system, and the second adsorption bed is then supplied with air during a second half cycle of operation of the system. The feed gas supply enables adjustment of at least one parameter relating to the amount or respective amounts of air being supplied to the first adsorption bed in the first half cycle and/or to the second adsorption bed in the second half cycle. A connection and valve assembly is provided between the first and second adsorption beds. The connection and valve assembly diverts a portion of the product gas, produced from the respective absorption bed being supplied with the flow of air during the respective half cycle, to the other adsorption bed. This causes previously adsorbed gaseous component to be released from latter. The released gaseous component then escapes from the system, e.g. to the atmosphere, via a vent. A sensor system determines a measure of the flow rate of waste gas, including the released gaseous component, escaping from the system via the vent. The at least one parameter can be adjusted based on the measure in order to tune the performance of the system. Further provided is a method for operating the system.

This invention relates to a dispersion comprising porous particles dispersed in a liquid phase, wherein the porous particles comprise a zeolite and the liquid phase is a size-excluded liquid. The invention also relates to a method of adsorbing a gas into a liquid, comprising at least the step of bringing the gas into contact with the dispersion. In addition, the invention relates to an assemblage of the dispersion, the zeolite comprising a cavity and a gas contained within the cavity.

The invention relates to the intensification of hydrogen PSA processes through utilization of specifically engineered core-shell composite adsorbents. Different embodiments of core-shell adsorbents can be used with either high or low heat capacity cores, and different adsorbent shells (e.g. activated carbon, zeolite, silica gel, alumina etc.) resulting in higher mass transfer rates and hence sharper mass transfer fronts during the PSA process. The location of the limiting impurity front determines the product purity. Therefore, with sharper impurity fronts, lower height of adsorbent bed is required, and cycle time can be proportionally reduced. Also, thermal swing during the PSA can be reduced by use of such adsorbents. The use of a high heat capacity core to reduce the thermal swing, leads to higher overall working capacity of the adsorbent bed.

The present invention and embodiments thereof provide a process to separate ethylene products from impurities such as nitrogen, hydrogen, ethane, propane and isobutane without the need for distillation processes.