A catalytic recombiner and filter apparatus is especially suited for placement in a containment of a nuclear reactor. The apparatus has a natural convection flow duct with a number of catalytic elements for recombining hydrogen and oxygen contained in a gas flow through the flow duct. The catalytic recombiner and filter apparatus provides for reliable hydrogen reduction and iodine filtering for a gas flow even for a comparatively long period of operation. The catalytic recombiner and filter apparatus includes a number of adsorber elements with iodine adsorbing surfaces and with macroscopic flow channels in between. The iodine adsorbing surfaces are flown over by the gas flow, and the adsorber elements are arranged, when in use, downstream of the catalytic elements in a direction of the gas flow.

The present disclose is directed to a method for controlling iodine levels in wet scrubbers, and, in particular, recirculating wet scrubbers by removing the iodine from the scrubbing solution, such as by using ion exchange, absorption, adsorption, precipitation, filtration, solvent extraction, ion pair extraction, and an aqueous two-phase extraction.

Polymeric sorbents for reactive gases are provided. More particularly, the polymeric sorbents are a reaction product of a divinylbenzene/maleic anhydride precursor polymeric material with a nitrogen-containing compound. The polymeric sorbent has nitrogen-containing groups that are covalently attached to the polymeric sorbent. The nitrogen-containing groups include a primary amino group, a secondary amino group, a tertiary amino group, or a combination thereof. Additionally, methods of sorbing reactive gases on the polymeric sorbents and compositions resulting from the sorption of reactive gases on the polymeric sorbents are provided.

The present disclose is directed to a method for controlling iodine levels in wet scrubbers, and, in particular, recirculating wet scrubbers by removing the iodine from the scrubbing solution, such as by using ion exchange, absorption, adsorption, precipitation, filtration, solvent extraction, ion pair extraction, and an aqueous two-phase extraction.

Compositions and methods for adsorption of a species (e.g., ammonia, water, a halogen) comprising metal organic frameworks (MOFs) are generally provided. In some embodiments, a MOF comprises a plurality of metal ions, each coordinated with at least one ligand comprising at least two unsaturated N-heterocyclic aromatic groups arranged about an organic core.

Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a chamber including a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. Methods and systems in accordance with these and other embodiments are also disclosed.

The present invention relates to a vertical column apparatus (1) for mass exchange processes in the chemical, oil or gas industry and in particular, for the production of iodine from formation water of oil and gas fields, comprising: a gas outlet (2) at the top and a liquid outlet (3) at the bottom of the column (1); a packed section (4) between the top and the bottom of the column (1), wherein the column (1) has a liquid inlet (5) above the packed section (4) and a gas inlet (6) below the packed section (4), wherein an upper portion (7) of the column (1) has a larger diameter (d.sub.u) compared to a diameter (d.sub.p) of the packed section (4).

In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.

A halogen gas removing agent for removing halogen gas from a gas flow, which reduces the risk of leakage of the halogen gas exhausted from a semiconductor production process by treating the gas flow with the removing agent and a process for producing the removing agent. Also provided are an apparatus for removing the halogen gas using the removing agent, and a method for monitoring the state of consumption of the halogen gas. The halogen gas removing agent includes an inorganic compound base material, a sulfur-containing reducing compound and a color indicator, preferably using a pseudoboehmite as the base material, adding a pH indicator having a transition range in a pH range of 3 to 8 as the color indicator, and adding a basic metal compound such as zinc oxide.

A filtered containment venting system includes a filtered containment venting tank having: an organic iodine remover for collecting organic iodine; scrubbing water for collecting inorganic iodine; and an alkalizing agent for adding an action of buffering a pH value to the scrubbing water.