A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

Plasma is generated in a gas phase in a processing tub to produce a reforming component, the produced reforming component is dissolved in a liquid and is dispersed in the liquid to produce a reforming liquid, the produced reforming liquid is discharged from the processing tub to be stored in the storage tub, and gas is supplied from a gas supplier into the reforming liquid in the storage tub. The supplied gas has a bubble shape, comes into contact with the reforming liquid stored in the storage tub, and is deodorized.

The present invention relates to a fluorine-containing gas removing agent comprising an alumina and an alkali earth metal compound, wherein an ammonia desorption curve obtained by an ammonia TPD-MS method having a mass-to-charge ratio of 15 has a peak in a range lower than 200 C. and has a shoulder in a range of 200 C. or higher.

An inlet assembly for a an abatement burner includes: an inlet conduit operable to convey an effluent gas stream to be treated from an inlet aperture via a bore to an outlet aperture for treatment; and a lance conduit operable to convey a fuel gas from a gas inlet aperture via a gas bore to a gas outlet aperture positioned within the bore for mixing with the effluent gas stream, a cross-sectional area of the gas bore increasing towards the gas outlet aperture. In this way, the expansion caused by the increasing cross-sectional area of the gas bore enhances the mixing of the fuel gas with the effluent gas stream which provides for improved destruction and removal efficiencies (DRE), which enables the inlet assembly to be operated with reduced quantities of fuel gas, while still maintaining required levels of DRE.

In the method for scrubbing a chemical from a medium, wherein the improvement comprises the steps of using a carbide derived carbon to adsorb the chemical which may later be released by heating. The carbide derived carbon may be a powder, a fiber, a solid foam, a mesh, or other solid form. The carbide derived carbon can adsorb a chemical in the gaseous, liquid, particulate, or aerosol phase.

An air filter medium reduces a decrease in collection efficiency in the case where a main collection layer and a pre-collection layer having a lower collection efficiency than the main collection layer are used. An air filter medium that collects dust in gas includes a main collection layer and a pre-collection layer that has a lower collection efficiency of NaCl particles having a particle size of 0.3 m than the main collection layer, is disposed on an upstream side of an air flow with respect to the main collection layer, and has water repellency.

The present invention provides an energy-efficient method and apparatus that can achieve exhaust gas abatement with a minimum use of diluent nitrogen gas. More specifically, the present invention is directed to a method and apparatus for exhaust gas abatement under reduced pressure, in which an exhaust gas supplied from an exhaust gas source through a vacuum pump is decomposed by combustion heat of a flame under a reduced pressure.

An agent for removing a halogen gas, such as chlorine, in a waste gas by means of reduction; a method for producing this agent; a method for removing a halogen gas by use of this agent; and a system for removing a halogen gas. The agent for removing the halogen gas contains at least pseudo-boehmite, that serves as a host material, and a sulfur-containing reducing agent, that serves as a guest material. 1-8% by weight of the reducing agent, in terms of elemental sulfur, based on the total amount of the pseudo-boehmite and sulfur-containing reducing agent is present in the agent. At least one inorganic compound selected from among oxides, carbonates salts and hydrocarbon salts of alkaline earth metal elements, transition metal elements and zinc group elements is additionally contained in the agent as a third component.

Methods and systems for producing aromatics and light olefins from a mixed plastics stream are described. The method may include feeding a plastic feedstock to a dechlorination operation to melt the plastic feedstock to release HCl and generate a liquid plastic stream; feeding the liquid plastic stream to a pyrolysis reactor, the pyrolysis reactor to generate hydrocarbon vapors; feeding the hydrocarbon vapors to an acid gas removal reactor with a solid inorganic alkali salt disposed within the reaction vessel to remove residual HCl and sulfur-containing compounds from the hydrocarbon vapors to generate a plastic derived oil; and feeding the plastic derived oil to a fluid catalytic cracking reactor to generate a product stream comprising light olefins having a carbon number of C.sub.2-C.sub.4 and aromatics. The associated system for processing mixed plastics into aromatics and light olefins is also described.