A method for the purification of a raw gas stream by selective catalytic oxidation, in which organic and inorganic sulfur compounds, halogenated and non-halogenated volatile organic compounds are selectively oxidized without substantially oxidizing the lower hydrocarbons and the sulfur containing compounds present in the gas to sulfur trioxide and excess of oxygen is removed by oxidation of lower alcohols, ethers or hydrogen added to the raw gas stream upstream the catalytic oxidation.

Disclosed is a system for integrally treating a composite waste gas including nitrogen oxides (NO.sub.x and N.sub.2O), chlorofluorocarbons (CFCs), hydrochlorofluorocarbons (HCFCs), hydrofluorocarbons (HFCs), and perfluorinated compounds (PFCs). The system includes a first wet processor configured to wash and adsorb dust including gases, SO.sub.x, and ash dissolved in water, a decomposing reactor configured to receive waste gas processed in the first wet processor and process nitrogen oxides (NO.sub.x and N.sub.2O), fluorocarbons (CFCs), hydrochlorofluorocarbons (HCFCs), hydrofluorocarbons (HFCs), and perfluorinated compounds (PFCs) in the waste gas, and a second wet processor configured to receive the waste gas processed in the decomposing reactor and wash and adsorb the received waste gas. The system can efficiently treat a large amount of composite waste gas.

Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

A method for capturing halocarbon from a gas, the method comprising processing gas containing halocarbon with material which is undamaged by exposure to supercritical fluid. A method for reclaiming halocarbon from a material, the method comprising exposing the material to a supercritical fluid. A module for processing a gas containing halocarbon, the module comprising material for capturing halocarbon from a gas, wherein the module is arranged to withstand supercritical fluid.

In one aspect, an air contactor comprising an air inlet, an air outlet, a fan assembly to produce an airflow, a heat exchanger operable to transfer heat between a process fluid and the airflow, and an air pollutant capture system configured to selectively remove an air pollutant from the airflow. A controller has a fluid cooling and air pollutant capture mode wherein the controller controls the fan assembly to facilitate the heat exchanger transferring heat between the process fluid and the airflow and the air pollutant capture system removing the air pollutant from the airflow. The controller has a fluid cooling mode wherein the controller controls the fan assembly to facilitate the heat exchanger transferring heat between the process fluid and the airflow and the air pollutant capture system removing less of the air pollutant from the air.

A method of removing impurities from a gas including the steps of removing impurities from biogas comprising at least one adsorbents via a process vessel or reactor, directing the purified gas to an device to generate power and/or heat, regenerating the saturated adsorption media with the waste heat recovered from the engine exhaust and directing the regeneration gas (hot air or engine exhaust) to flare, engine exhaust stack, or atmosphere.

A process for treating a composition comprising one or more desired (hydro)fluoroolefins and one or more undesired halogenated ethanes, halogenated methanes or mixtures thereof so as to reduce the concentration of at least one undesired halogenated ethane or halogenated methane, the process comprising contacting the composition with an adsorbent comprising pores having openings which have a size across their largest dimension of about 6 or less.

A process of removing a volatile organic compound (VOC) from a gaseous environment, involving contacting a gaseous feedstream containing one or more VOC's, such as an odoriferous compound, an irritant, a contaminant or pollutant, for example, formaldehyde, with a sorbent under conditions sufficient to reduce the concentration of the VOC's in the gaseous feedstream. The sorbent is comprised of a functionalized graphene prepared by amination of graphene oxide. The sorbent is regenerated by adsorbate desorption under mild conditions of air flow. The process can be run through multiple adsorption-desorption cycles in a single fixed bed or swing bed configuration, and is applicable to purifying indoor air and ventilation air as well as reducing pollutants in industrial waste gas streams.

A process of removing a volatile organic compound (VOC) from a gaseous environment, involving contacting a gaseous feedstream containing one or more VOC's, such as an odoriferous compound, an irritant, a contaminant or pollutant, for example, formaldehyde, with a sorbent under conditions sufficient to reduce the concentration of the VOC's in the gaseous feedstream. The sorbent is comprised of a functionalized graphene prepared by amination of graphene oxide. The sorbent is regenerated by adsorbate desorption under mild conditions of air flow. The process can be run through multiple adsorption-desorption cycles in a single fixed bed or swing bed configuration, and is applicable to purifying indoor air and ventilation air as well as reducing pollutants in industrial waste gas streams.

A process for treating a composition comprising one or more desired (hydro)fluoroolefins and one or more undesired halogenated ethanes, halogenated methanes or mixtures thereof so as to reduce the concentration of at least one undesired halogenated ethane or halogenated methane, the process comprising contacting the composition with an adsorbent comprising pores having openings which have a size across their largest dimension of about 6 A or less.