Implementations disclosed herein provide a dry chemical scrubber with a pH regulator that adjusts an internal pH value of the dry chemical scrubber by adding high pH elements to the contents of the dry chemical scrubber on a continuous or periodic basis.

Both a system and a method for scrubbing a contaminated gas stream with a glycerol solution are disclosed. The system includes a contaminated gas stream in need of purification, along with a column which receives the contaminated gas stream. A glycerol solution is also received by the column and is used to scrub the contaminated gas stream in the column. The glycerol solution is used to reduce at least three contaminants from the gas stream, and includes greater than 50% glycerol and less than 98% glycerol. In one embodiment, the glycerol solution includes between 0.5% to 10% salts, wherein the salts are sodium based, potassium based or a combination thereof. The salts act catalytically to convert glycerol and carbon dioxide to glycerol carbonate.

High purity cyclohexasilane and a method for increasing the purification efficiency thereto are provided. The method for producing cyclohexasilane of the present invention is characterized in that, in distilling crude cyclohexasilane to obtain purified cyclohexasilane, the absolute pressure during distillation is set to 2 kPa or less, and the heating temperature of crude cyclohexasilane is set to 25 to 100 C. The cyclohexasilane of the present invention contains pure cyclohexasilane at a rate of 98% by mass or more and 100% by mass or less.

Adsorbent materials are disclosed, along with filter elements containing the adsorbent materials methods of using adsorbents to remove siloxane contaminants from a gas stream. The method includes providing an adsorbent material that has been washed with an acid and passing a gas through the adsorbent material so as to reduce siloxane levels in the gas. A filter element for reducing siloxane levels in a gas includes a first adsorbent material, the first adsorbent material comprising an acid-washed adsorbent; and a second adsorbent material, the second adsorbent material comprising an acid-impregnated adsorbent.

The invention relates to a method and an apparatus for treating exhaust gases comprising organosilicon components or accompanying substances. The invention more specifically relates to the use of bulk regenerator materials as storage materials allowing periodic removal, purification, and redelivery to the system. The invention solves the problem of clogged regenerator-storage materials during regenerative post-combustion of exhaust gases containing organosilicon components.

Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes a plasma source that has a first plate and a second plate parallel to the first plate. An electrode is disposed between the first and second plates and an outer wall is disposed between the first and second plates surrounding the electrode. The plasma source has a first plurality of magnets disposed on the first plate and a second plurality of magnets disposed on the second plate. The magnetic field created by the first and second plurality of magnets is substantially perpendicular to the electric field created between the electrode and the outer wall. In this configuration, a dense plasma is created.

An air separation system includes an air separation module configured to receive feed air and separate the feed air into nitrogen-enriched air and oxygen-enriched air, a nitrogen-enriched air line for transporting the nitrogen-enriched air from the air separation module to a fuel tank for inerting, an oxygen sensing line connected to the nitrogen-enriched air line, a gas adsorption filter located in the oxygen sensing line, and an oxygen sensor downstream of the gas adsorption filter in the oxygen sensing line.

An object of the present disclosure is to provide a methane removal device that efficiently removes methane from various exhaust gases.

For this reason, the methane removal device includes a housing provided with a suction port and a discharge port, an adsorption section provided in the housing and supporting a BEA-type zeolite that includes ion-exchanged cobalt, and an ozone supply device that supplies ozone between the suction port and the adsorption section.

A metal organic framework, comprising: an organic ligand; a structure S.sub.x constituted by one or more of O.sup.2-, OH.sub.2, OH.sup., OCH.sub.3.sup., and OC.sub.2H.sub.5.sup.; and a metal ion, wherein the metal organic framework has a structure S.sub.M-x, in the structure S.sub.M-x, two or more metal ions are bonded to one oxygen atom in the structure S.sub.x, the number of the metal ions in a unit lattice is two or more, and a water absorption rate A obtained by formula (1) is 25% or more:

[00001]$\begin{array}{cc}\mathrm{water}\mathrm{absorption}\mathrm{rate}A=\left(W_1-W_2\right)/W_2& \left(1\right)\end{array}$

in the formula, W.sub.1 represents a mass of the metal organic framework after being left until an equilibrium moisture content is reached under conditions of a temperature of 25 C. and a relative humidity of 50%, and W.sub.2 represents a mass of the organic metal framework after obtaining the mass W.sub.1 and being left at a temperature of 200 C. for 1 hour.

Decontaminating materials and methods of making and using the same are provided. The material comprises a network comprising electrospun polymeric nanofibers and at least 50 grams of metal organic framework (MOF) microparticles per m.sup.2 of the network based on the entire area of the network. A composition of the polymeric nanofibers comprises a hydroscopic polymer. An area of the material is defined by an outer surface of the network. The MOF microparticles are retained between the polymeric nanofibers in the network and are configured to decontaminate a chemical threat agent in contact with the material.