A clothes-treating apparatus includes: a housing including an accommodating space to accommodate clothes therein; and a plurality of air conditioning modules provided inside the housing and different in an air conditioning function from each other, wherein each of the plurality of air conditioning modules is provided to be switched over between an exposing status in which the air conditioning function is activated and a blocking status in which the air conditioning function is inactivated, and a first air conditioning module among the plurality of air conditioning modules is in the exposing status while a second air conditioning module is in the blocking status. Thus, the clothes-treating apparatus prevents the air conditioning functions of the plurality of air conditioning modules from being offset by each other, thereby improving the effects of the air conditioning functions and extending the life of each air conditioning module.

Oxygen is removed from a gas feed such as a landfill gas, a digester gas or an industrial CO.sub.2 off-gas by heating the feed gas, optionally removing siloxanes and silanols from the heated feed gas, optionally removing part of the sulfur-containing compounds in the heated feed gas, injecting one or more reactants for oxygen conversion into the heated feed gas, carrying out a selective catalytic conversion of any or all of the volatile organic compounds (VOCs) present in the gas, including sulfur-containing compounds, chlorine-containing compounds and any of the reactants injected, in at least one suitable reactor, and cleaning the resulting oxygen-depleted gas. The reactants to be injected comprise one or more of H.sub.2, CO, ammonia, urea, methanol, ethanol and dimethyl ether (DME).

Methods, apparatuses, and systems related to electrochemical capture of Lewis acid gases from fluid mixtures are generally described. Certain embodiments are related to electrochemical methods involving selectively removing a first Lewis acid gas from a fluid mixture containing multiple types of Lewis acid gases (e.g., a first Lewis acid gas and a second Lewis acid gas). Certain embodiments are related to electrochemical systems comprising certain types of electroactive species having certain redox states in which the species is capable of binding a first Lewis acid gas but for which binding with a second Lewis acid gas is thermodynamically and/or kinetically unfavorable. The methods, apparatuses, and systems described herein may be useful in carbon capture and pollution mitigation applications.

Embodiments disclosed herein include an abatement system and method for abating compounds produced in semiconductor processes. The abatement system includes a remote plasma source for generating an oxidizing plasma for treating exhaust gases from a deposition process performed in the processing chamber, the treatment assisting with the trapping particles in an exhaust cooling apparatus. The remote plasma source then generates a cleaning plasma for treating exhaust gases from a cleaning process performed in the processing chamber, the cleaning plasma reacting with the trapped particles in the exhaust cooling apparatus and cleaning the exhaust cooling apparatus.

Methods, systems, and apparatuses for coating a material by contacting the material with a coating material and a solvent are disclosed herein. The coated material can be obtained by evaporating the solvent: by heating the coated material directly or indirectly with electromagnetic radiation; by heating with heat generated from a heat source that heats an internal container for the material to be coated and/or coated material; and/or in an interior volume of a coating container having a side wall, by heating a portion of the side wall of the coating container and/or internal container with a heat source that is positioned outside of the interior volume of the coating container.

A filtration apparatus for filtering a fluid stream includes a vessel housing. At least one cartridge assembly is arranged within the vessel housing. The cartridge assembly includes filtration material arranged between at least one inlet and at least one outlet. The filtration material treats the fluid stream to form a filtered fluid stream. In use, the fluid stream is received a feed port of the vessel housing, flows through the filtration material in the cartridge assembly between the inlet and the outlet, and the filtered fluid stream is discharged from a discharge port of the vessel housing. The filtration apparatus can be used to remove siloxanes from the fluid stream.

Contaminant treatment methods and systems are described. Methods utilize biodegradable, non-toxic materials that can carry one or more functionalities useful for the remediation of fluids such as liquid or gaseous waste streams, chemical spills, etc. The carrier materials carry one or more functional groups that can target particular contaminants of a fluid for removal and/or modification to a more benign form. Targeted contaminants can include components of gaseous and/or liquids such as, and without limitation, gaseous discharges including VOCs and potentially hazardous contaminants such as organophosphorous compounds.

Adsorbent materials are disclosed, along with filter elements containing the adsorbent materials methods of using adsorbents to remove siloxane contaminants from a gas stream. The method includes providing an adsorbent material that has been washed with an acid and passing a gas through the adsorbent material so as to reduce siloxane levels in the gas. A filter element for reducing siloxane levels in a gas includes a first adsorbent material, the first adsorbent material comprising an acid-washed adsorbent; and a second adsorbent material, the second adsorbent material comprising an acid-impregnated adsorbent.

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C.sub.2F.sub.6) and tetrafluoromethane (CF.sub.4), as well as particulate-forming silicon dioxide precursors, such as silane (SiH.sub.4) and tetraethoxysilane (Si(OC.sub.2H.sub.5).sub.4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

A system for chemical vapor densification includes a reaction chamber having an inlet and outlet; a trap; a conduit fluidly coupled between the outlet of the reaction chamber and the trap; a cryogenic cooler fluidly coupled to the trap though a frustoconical conduit; a first exit path from the cryogenic cooler that vents hydrogen gas to an exhaust; and a second exit path from the cryogenic cooler that recirculates silane and hydrocarbon-rich gas back to the inlet of the reaction chamberand a related method places a substrate in the reaction chamber; establishes a sub-atmospheric pressure inert gas atmosphere within the reaction chamber; densifies the substrate by inputting virgin gas into the reaction chamber; withdraws effluent gas from the reaction chamber; extracts silane and hydrocarbon-rich gas from the effluent gas; and recirculates the silane and hydrocarbon-rich gas back to the reaction chamber.